GEN 2.5 SERIES
DC SPUTTERING
POWER SUPPLY
DESCRIPTION
CPW2870L5-01, M5-01, P5-01
6kW, 12kW, 24 kW
200/208 VAC
In the 1980s, CPI Canada pioneered Resonant Power Conversion Technology (Resmode) for high power processing.
This method offers unique advantages in sputtering systems in the areas of wide load range (without tap changing),
reliability (using an inherently short-circuit proof, rugged power chain), highest efficiency with zero switching losses
and wide control range (from < 1% to full power).
CPI has continued to evolve this technology into many different models. When it comes to Watts/lbs (weight),
Watts/$ (price), and proven field reliability, CPI is unmatched in the industry.
6kW & 12kW – 200/208 VAC (shown)
SPECIFICATIONS
Input power requirements:
180 - 229 VAC
50/60Hz, 4 wire
3 phase + gnd
> 90%
Input/ Output interlocks for safe operation
Protection:
Over temperature
Over-current, over-voltage, over-power
Input undervoltage
Input/ Output Power connections are hard wired
cable strain reliefs.
Efficiency:
Cooling: Forced air:
T ambient = 45C max. at full power
through
CPI [ COMMUNICATIONS & POWER INDUSTRIES, INC. ]
