MOTOROLA
Freescale Semiconductor, Inc.
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
SEMICONDUCTOR TECHNICAL DATA
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by MPX2100/D
100 kPa
On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPX2100 series device is a silicon piezoresistive pressure sensor providing a
highly accurate and linear voltage output — directly proportional to the applied pressure.
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
•
Temperature Compensated Over 0°C to +85°C
•
Easy–to–Use Chip Carrier Package Options
•
Available in Absolute, Differential and Gauge Configurations
•
Ratiometric to Supply Voltage
• ±0.25%
Linearity (MPX2100D)
Application Examples
•
Pump/Motor Controllers
•
Robotics
•
Level Indicators
•
Medical Diagnostics
•
Pressure Switching
•
Barometers
•
Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone
pressure sensor chip.
V
S
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
1
GND
MPX2100
SERIES
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
UNIBODY PACKAGE
Freescale Semiconductor, Inc...
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
MPX2100A/D
CASE 344
MPX2100AP/GP
CASE 344B
2
4
SENSING
ELEMENT
V
out+
V
out-
MPX2100DP
CASE 344C
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
1
2
MPX2100ASX/GSX
CASE 344F
PIN NUMBER
Gnd
+V
out
3
4
V
S
–V
out
NOTE: Pin 1 is noted by the notch in
the lead.
REV 9
Motorola Sensor Device Data
©
Motorola, Inc. 2002
For More Information On This Product,
Go to: www.freescale.com
1
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