Freescale Semiconductor
Technical Data
MPX5100
Rev 10, 05/2005
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated, and
Calibrated
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate,
high level analog output signal that is proportional to the applied pressure.
Features
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2.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Patented Silicon Shear Stress Strain Gauge
Available in Absolute, Differential and Gauge Configurations
Durable Epoxy Unibody Element
Easy-to-Use Chip Carrier Option
Patient Monitoring
Process Control
Pump/Motor Control
Pressure witching
S
ORDERING INFORMATION
Device
Type
Options
Case
No.
867
867
867C
867B
867B
867F
482A
482C
1351
MPX Series Order
Device Marking
Number
MPX5100A
MPX5100D
MPX5100DP
MPX5100AP
MPX5100GP
MPX5100GSX
MPXV5100GC6U
MPX5V100GC7U
MPXV5100DP
MPX5100A
MPX5100D
MPX5100DP
MPX5100AP
MPX5100GP
MPX5100D
MPXV5100G
MPXV5100G
MPXV5100
MPX5100/MPXV5100
SERIES
INTEGRATED PRESSURE SENSOR
0 to 100 kpa (0 to 14.5 psi)
15 to 115 kPa
(2.2 to 16.7 psi)
0.2 to 4.7 V Output
SMALL OUTLINE PACKAGES
MPXV5100GC6U
CASE 482A-01
MPXV5100GC7U
CASE 482C-03
Typical Applications
MPXV5100DP
CASE 1351-01
PIN NUMBER
(1)
1
2
3
4
N/C
V
S
GND
V
OUT
5
6
7
8
N/C
N/C
N/C
N/C
UNIBODY PACKAGE (MPX5100 SERIES)
Basic
Absolute
Elements Differential
Ported
Differential Dual Ports
Elements Absolute, Single Port
Gauge, Single Port
Gauge, Axial PC Mount
Gauge, Axial Port, SMT
Gauge, Axial Port, DIP
Gauge, Dual Port, SMT
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin1 is noted by the
notch in the lead.
PIN NUMBER
(1)
1
2
3
V
OUT
GND
V
S
4
5
6
N/C
N/C
N/C
1. Pins 4, 5, and 6 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
UNIBODY PACKAGES
MPX5100A/D
CASE 867-08
MPX5100GSX
CASE 867F-03
MPX5100AP/GP
CASE 867B-04
MPX5100DP
CASE 867C-05
© Freescale Semiconductor, Inc., 2005. All rights reserved.