Freescale Semiconductor
Technical Data
MPXH6400A
Rev 1, 05/2005
High
Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The Freescale MPXH6400A series sensor integrates on-chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
The MPXH6400A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1
shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
•
•
•
•
•
•
Improved Accuracy at High Temperature
Available in Small and Super Small Outline Packages
1.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from –40° to +125°C
Durable Thermoplastic (PPS) Surface Mount Package
1
2
3
4
Device
Marking
MPXH6400A
MPXH6400A
SERIES
INTEGRATED
PRESSURE SENSOR
20 TO 400 kPA (3.0 TO 58 psi)
0.2 TO 4.8 V OUTPUT
(3.0 TO 58 psi)
SUPER SMALL OUTLINE PACKAGES
MPXH6400A6U/6T1
CASE 1317-04
MPXH6400AC6U/C6T1
CASE 1317A-01
PIN NUMBERS
(1)
N/C
V
S
GND
V
OUT
5
6
7
8
N/C
N/C
N/C
N/C
Typical Applications
•
•
Industrial Controls
Engine Control/Manifold Absolute Pressure (MAP)
ORDERING INFORMATION
Device
Type
Basic
Element
Options
Absolute,
Element Only
Absolute,
Element Only
Ported
Element
Case
No.
MPX Series
Order No.
Packing
Options
Rails
1317 MPXH6400A6U
1317 MPXH6400A6T1
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
Tape & Reel MPXH6400A
Rails
MPXH6400A
Absolute, Axial 1317A MPXH6400AC6U
Port
Absolute, Axial 1317A MPXH6400AC6T1 Tape & Reel MPXH6400A
Port
© Freescale Semiconductor, Inc., 2005. All rights reserved.
FREESCALE [ FREESCALE SEMICONDUCTOR, INC ]
