MS7212
PRESSURE SENSOR DIE (0-12 BAR)
FOR HARSH ENVIRONMENT
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0 to 1200 kPa range (12 bar or 174 PSI)
Absolute pressure sensors
Hermetic sensor
RoHS-compatible & Pb-free
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DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference
cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure,
applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of
Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive
applications.
FEATURES
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Media resistive pressure sensor die
Output Span 150mV @ 5 V
Temperature Range -40°
…+125°
C
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Linearity 0.05% (typical)
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Die Size 1.63 x 1.95 mm
Low Cost, High reliability
APPLICATION
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Harsh environments
Absolute pressure sensor systems
Braking systems
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Tire pressure
Engine controls
Diving computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
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Vs+
EPI
Out+
Out-
GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
00007212583
ECN 743
DA7212_003.doc
December 4, 2006
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INTERSEMA [ INTERSEMA SENSORIC SA ]
