MS7305D
LOW PRESSURE SENSOR DIE (0 to 5 kPa)
•
•
•
•
•
•
0 to 5 kPa (50 mbar or 0.73 PSI)
Uncompensated differential pressure sensor die
Piezoresistive silicon micromachined sensor
High output signal 110mV
Small size
RoHS-compatible & Pb-free
1
DESCRIPTION
The MS7305D pressure sensor die is designed for low pressure sensor systems with the highest demands on
resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a
Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side
of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.
FEATURES
•
•
•
•
Uncompensated differential pressure sensor die
Output span 110 mV @ 5 V
Temperature range -40° to +125 °
C
C
Typical linearity 0.3% (5kPa) or 0.1% (1kPa)
•
•
•
Die size 2.45 mm x 2.45 mm
Low cost, high reliability, low drift
High pressure burst capability (600 kPa)
APPLICATION
•
•
Washing machines
Level indicators
•
•
Industrial controls
Leak detection
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
1
GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7305D_001.doc
00007305749
ECN836
March 10, 2006
1/
4
INTERSEMA [ INTERSEMA SENSORIC SA ]
