MS761
PRESSURE SENSOR DIE (0-1 BAR)
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0 to 100 kPa bar range (1 bar or 14.5 PSI)
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High Sensitivity
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ROHS-Compatible & Pb-free
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DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
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Uncompensated pressure sensor die
High Sensitivity: Output Span 240 mV @ 5V
Temperature Range -40° …+ 125°
C
C
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Linearity 0.15 % (typical)
Small Die Size 2.00 X 1.86 mm
Low cost, High reliability
APPLICATION
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For high resolution absolute sensor systems
Engine Controls
Barometers, Altimeters, Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
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GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA761_002.doc
00000761348
ENC922
May 9, 2007
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INTERSEMA [ INTERSEMA SENSORIC SA ]
