MS767
PRESSURE SENSOR DIE (0-7 BAR)
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0 to 700 kPa range (7 bar or 102 PSI)
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Absolute pressure sensors
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RoHS-compatible & Pb-free
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DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an
absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference
pressure.
FEATURES
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•
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Uncompensated pressure sensor die
Output Span 392mV @ 5V
Temperature Range -40°
…+125°
C
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Linearity 0.15% (typical)
Die Size 1.72 x 1.58mm
Low Cost, High reliability
APPLICATION
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For absolute pressure sensor systems
Tire pressure measurements
Electronic scales
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out- : Negative output
Out-
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
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The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA767_008.doc
00000767356
ECN 1043
February 5th, 2008
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INTERSEMA [ INTERSEMA SENSORIC SA ]
