MS7801
PRESSURE SENSOR DIE (0-1 BAR)
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0 to 100 kPa range (1 bar or 14.5PSI)
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Absolute/differential pressure sensors
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RoHS-compatible & Pb-free
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DESCRIPTION
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(MS7801D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
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Uncompensated pressure sensor die
Output Span 150mV @ 5V
Temperature Range -40°
…+125°
C
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Linearity 0.05% (typical)
Small Die Size 1.98 x 1.84mm
Low Cost, High reliability
APPLICATION
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For absolute or differential pressure sensor systems
Barometers, Altimeters
Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
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The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
00007801345
ECN 743
DA7801_005.doc
May 05th, 2005
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INTERSEMA [ INTERSEMA SENSORIC SA ]
