MS7907
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PRESSURE SENSOR DIE (0-7 BAR)
0 to 700 kPa range (7 bar or 102 PSI)
Absolute/differential pressure sensors
High linearity, small size
RoHS-compatible & Pb-free
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DESCRIPTION
The sensor element of the MS7907 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7907-A_0.2) or 0.5 mm (MS7907-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7907-D) and the other without Pyrex glass
(MS7907-S).
FEATURES
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Uncompensated pressure sensor die
Output Span 150mV @ 5V
Temperature Range -40°
…+125°
C
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Linearity 0.05% (typical)
Small Die Size 1.72 x 1.58mm (MS7907-A)
Low Cost, High reliability
APPLICATION
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For absolute or differential pressure sensor systems
Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out- : Negative output
Out-
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
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GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7907_002.doc
000079071388
ECN 1186
March 16, 2009
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