MS7901
PRESSURE SENSOR DIE (0-1 BAR)
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0 to 100 kPa range (1 bar or 14.5 PSI)
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Absolute/differential pressure sensors
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RoHS-compatible & Pb-free
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DESCRIPTION
The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass
(MS7901-S).
FEATURES
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•
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Uncompensated pressure sensor die
Output span 150mV @ 5V
Temperature range -40°
…+125°
C
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•
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Linearity 0.05% (typical)
Very small die size 1.78 x 1.78 mm (MS7901-A)
Low cost, high reliability
APPLICATION
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Absolute pressure sensor systems
Differential/gauge pressure sensor systems
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Barometers, altimeters
Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
Out+
Out-
GND1 : Ground
GND2 : Ground
R5+
R6+
R5 and R6 are
placed on bulk
R6-
R5+ : Reference Resistor 5: positive access
R5- : Reference Resistor 5: negative access
R6+ : Reference Resistor 6: positive access
R6- : Reference Resistor 6: negative access
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R5-
GND1 GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7901_005.doc
00007901872
ECN 1178
January 23
rd
, 2009
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INTERSEMA [ INTERSEMA SENSORIC SA ]
