MS7970
PRESSURE SENSOR DIE (0-70 BAR)
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0 to 7000 kPa range (70 bar or 1015 PSI)
Absolute/differential pressure sensors
High linearity, small size
RoHS-compatible & Pb-free
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DESCRIPTION
The sensor element of the MS7970 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass
(MS7970-S).
FEATURES
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Uncompensated pressure sensor die
Output span 310mV @ 5V
Temperature range -40°
…+125°
C
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Linearity 0.25% (typical)
Very small die size 1.72 x 1.58 mm (MS7970-A)
Low cost, high reliability
APPLICATION
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Absolute pressure sensor systems
Differential/gauge pressure sensor systems
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Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
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GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7970_000.doc
000079701592
ECN 1205
May 11, 2009
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INTERSEMA [ INTERSEMA SENSORIC SA ]
