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Tel : (+852) 2565 6979
Fax : (+852) 2565 0319
Email : sales@jlworld.com
Website : www.jlworld.com
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060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
Dual Axis Silicon
Accelerometer Die
The MTX2-02G series capacitive silicon
accelerometer sensors are manufactured in class
10 clean room using state of the art CMOS and
bulk micro-machining capabilities. They are
manufactured in six inched wafers, utilizing DRIE
techniques and patented processes.
An applied force or acceleration (including gravity)
causes a capacitance shift in a differential
capacitor, which is converted to a pulse density
modulation by an integrated ASIC. The XY
sensing element is a differential capacitor
fabricated in single crystal silicon with a high
aspect ratio thereby offering excellent
performance in sensitivity and linearity.
The sensing element is enclosed in a hermetic
wafer-level package using wafer to wafer bonding.
This allows it to be assembled in different types of
packaging including low cost over-molded plastic
packages.
Dies are fully probed and inspected and can be
shipped in waffle pack.
FEATURES
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Excellent accuracy over 2g range
Good temperature performance
Low cost design
Capacitive, high performance
100% factory tested
High volume manufacturing
Patented process
THE MAIN FIELD OF APPLICATIONS
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Acceleration Measurement
Vibration measurement
Inclination Measurement
Preliminary
JLWORLD [ JL WORLD COMPANY LIMITED. ]
