System Specifications
System
Grating Period
20µm
System Resolution 5µm, 2.5µm, 1.00µm, or 0.50µm (linear)
Linear Accuracy* Better than ±1µm** available; contact MicroE
Better than ±3µm** up to 130mm, ±5µm from 155mm to 1m,
±5µm per meter from 1m to 2m
*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard,
used at room temperature and with MicroE interpolation electronics.
**Or +/- one quadrature count, whichever error value is greater.
Rotary Accuracy* Scale O.D.
12.00mm
19.05mm
31.75mm
57.15mm
107.95mm
Microradians**
±100
±63
±38
±19
±10
Arc-Seconds**
±21
±13
±7.8
±3.9
±2.1
*Based on ideal scale mounting concentricity
**Or +/- one quadrature count, whichever error value is greater.
Sensor Size
W:
L:
H:
12.70mm
20.57mm
8.38mm
0.500"
0.810"
0.330"
Operating and Electrical Specifications
Power Supply
Temperature
Operating:
Storage:
Humidity:
EMI:
Shock:
Sensor Weight:
Cable:
5VDC ±5% @ 60mA
0 to 70°C
-20 to 70°C
10 - 90% RH non-condensing
M1500S: Entire system is EMI/RFI protected
M1500H: Customer provides shielding at cable termination
1500G 0.5 ms half sine (Sensor)
5.0g (Sensor without cable)
Double Shield. Diameter: 3.6mm (0.142”)
Flex Life: 20 x 10
6
cycles @ 20mm bending radius
All Specifications are subject to change. All data is accurate to the best of our knowledge.
MicroE Systems is not responsible for errors.
Page 5 of 9
MICROESYS [ GSI Group, Inc. ]
