System Specifications
System
Grating Period
20µm
Signal Period
20µm
System Resolution 5µm - 0.078µm in integer interpolation steps (factory set or user
programmed using MicroE SmartPrecision Software)
Linear accuracy*
Interpolation
accuracy:
Better than ± 0.12µm over any 20µm movement
Long-travel
accuracy:
±1µm accuracy available - consult MicroE
Better than ± 3µm for scales up to 130mm
Better than ±5µm for scales 155mm to 1m
Better than ±5µm per meter for scales 1m or more
*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard,
used at room temperature and with MicroE interpolation electronics.
Rotary Accuracy* Scale O.D.
12.00mm
19.05mm
31.75mm
57.15mm
107.95mm
*Based on ideal scale mounting concentricity
Microradians
±100
±63
±38
±19
±10
Arc-Seconds
±21
±13
±7.8
±3.9
±2.1
Sensor Size
W:
L:
H:
12.70mm
20.57mm
8.38mm
0.500"
0.810"
0.330"
Operating and Electrical Specifications
Power Supply
Temperature
Operating:
Storage:
Humidity:
EMI:
Shock:
Sensor Weight:
Cable:
5VDC ±5% @ 330mA (30mA for sensor)
0 to 70°C
-20 to 70°C
10 - 90% RH non-condensing
CE Compliant
1500G 0.5 ms half sine (Sensor)
5.0g (Sensor without cable)
Double shield. Maximum length 2m. Diameter: 3.6mm (0.142”)
Flex Life: 20 x 10
6
cycles @ 20mm bending radius
Mechanical Information - Sensor
.272 6.91
.166 4.22
A
19.7 [500] or 39.4 [1000]
or 78.7 [2000] ±.50 [12.7]
A
SENSOR MTG. SURFACE
SENSOR MTG SURFACE
.058 1.47
.13 3.4
.037 0.94
.083 2.11
.155 3.94
.810 20.57
.405 10.29
.24 6.2
.334 8.5
.500 12.70
.345 8.75
.080 2.03
.650 16.5
C
B
.142 [3.61]
CABLE DIAMETER
All Specifications are subject to change. All data is
accurate to the best of our knowledge. MicroE
Systems is not responsible for errors.
2X
.106 2.69
THRU.
Page 5 of 10
MICROESYS [ GSI Group, Inc. ]
