D6F MEMS Flow Sensor
High accuracy mass flow sensing
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D6F
Small size
Fast response
Applicable to air, non-corrosive gas, LNG
Ordering Information
Model
D6F-01A1-110
D6F-02A1-110
D6F-05N2-000
Aluminum
LNG* (13A)
PPS
Case
Air*
Gsa
0-1L/min
0-2L/min
0-5L/min
Flow Range
Notes
Integral orifice
Application Examples
• Medical equipment
• Analysis apparatus
• Combustion control
Ratings
Absolute Maximum Rating
Item
Power Supply
Output Voltage
V
CC
V
OUT
Symbol
26.4
6
Rating
VDC
VDC
Unit
Recommendation Condition
Item
Power Supply
Output Voltage (Max.)
Output Voltage (Min.)
Symbol
V
CC
V
OH
V
OL
–
–
Condition
10.8
-10
Min.
–
–
–
–
Typ.
26.4
60
5.7
1
Max.
VDC
°C
VDC
VDC
Unit
Operating Temperature
T
ORR
V
CC =
12 to 24VDC I
OH
= 5mA 5
V
CC =
12 to 24VDC I
OH
=-5mA 0
OMRON [ OMRON ELECTRONICS LLC ]
