MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS
technology for precision mass airflow
measurement
• Precision unidirectional mass airflow up to 3 LPM
• Stable output across full scale
• Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm
• Low power consumption
Application Examples
• Pick and place systems
• Industrial processes
• Leak detection
• Spectroscopy
• Mass flow controllers
• Scientific / test equipment
• Environmental comfort controls
• Fuel cell controls
Ordering Information
Model
D6F-03A3-000
D6F-Cable2
*Dry gas must not contain large particles, e.g., dust, oil, mist.
Case
Thermoplastic resin / Aluminum alloy
Air*
Applicable Gas
Flow Range
0 – 3 LPM
■
Rating
Absolute maximum rating
Item
Power-supply voltage
Output voltage
V
CC
V
OUT
Term
26.4
6
Ratings
VDC
VDC
Unit
MEMS Mass Flow Sensor
D6F-03A3-000
1
OMRON [ OMRON ELECTRONICS LLC ]
