MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 slpm
• Stable output across full scale
• Horizontal mounting feature with *NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
* NBR material recommended for all applications including
medical and food processing
Application Examples
• Industrial processes
• Medical Respirators and Ventilators
• MiG and TiG welding systems
• Anesthesia Delivery
• Mass flow controllers
• Scientific / test equipment
• Fuel cell controls
Ordering Information
Model
D6F-10A5
D6F-20A5
D6F-50A5
D6F-10A6
D6F-20A6
D6F-50A6
D6F-Cable1
Case
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Applicable Gas
Air, N
2
O, O
2
Air, N
2
O, O
2
Air, N
2
O, O
2
Air, N
2
O, O
2
Air, N
2
O, O
2
Air, N
2
O, O
2
Flow Range
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
Notes
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Optional (recommended)
■
Rating
Absolute maximum rating
Item
Power-supply voltage
Output voltage
V
CC
V
OUT
Term
26.4
6
Ratings
VDC
VDC
Unit
MEMS Airflow Sensor
D6F-10A, -20A, -50A
1
OMRON [ OMRON ELECTRONICS LLC ]
