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HSH1500PILO 参数 Datasheet PDF下载

HSH1500PILO图片预览
型号: HSH1500PILO
PDF下载: 下载PDF文件 查看货源
内容描述: 灯光刻 [Lamps for Photolithography]
分类和应用:
文件页数/大小: 2 页 / 50 K
品牌: PERKINELMER [ PERKINELMER OPTOELECTRONICS ]
 浏览型号HSH1500PILO的Datasheet PDF文件第1页  
HSH1500PILO  
Physical Specifications  
Operational Specifications  
Description  
Power  
Current  
Nominal  
Range  
Description  
Arc Gap  
Specification  
4.0 mm (max)  
M6-P1.0  
1500 watts  
65.2 amps (DC  
23 volts (DC)  
3%  
220°C  
1500 hours  
57.5-75 amps (DC)  
20-26 volts (DC)  
Voltage  
Anode Base  
Cathode Base  
Current Ripple  
Temperature (at base)  
Lifetime  
M10-P1.5  
Spectral Output  
100  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
Dimensions  
CATHODE (-)  
END UP  
120  
250  
300  
350  
400  
450  
500  
550  
600  
650  
700  
750  
Wavelength (nm)  
Typical Performance Graph  
100  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
241 MAX  
Ø51 MAX  
ANODE (+)  
END DOWN  
0
300  
600  
900  
1200  
1500  
All dimensions are in millimeters.  
Hours of Operation  
Notes  
Part Number References  
Used In  
ASML 5500/100C, 100D  
1. Lamp must be operated with cathode end up and  
anode end down. Inclination of lamp axis to vertical  
must not exceed 10º.  
Replaces  
SUV 1500 SIL  
HBO 1500 W/PIL  
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of  
designing a lamp specifically suited to your needs.  
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.  
All values are nominal; specifications subject to change without notice.  
USA:  
Europe:  
Asia:  
PerkinElmer Optoelectronics  
44370 Christy St.  
Fremont, CA 94538  
Phone: (510) 979-6500  
Fax: (510) 687-1140  
PerkinElmer Optoelectronics GmbH  
Wenzel-Jaksch-Str. 31  
65199 Wiesbaden  
Germany  
Phone: +49 611 492 0  
Fax: +49 611 492 177  
PerkinElmer Optoelectronics  
47 Ayer Rajah Crescent #06-12  
Singapore 139947  
Phone: +65 775 2022  
Fax: +65 775 1008  
.
© 2000 PerkinElmer inc. All rights reserved.  
DS-185 Rev C 1101  
www.perkinelmer.com/opto