Mass flow controllers &
accessories
MFCs & MFMs series
th e ca t a lo g u e D 1 0 - 0 3 V0 2
www.qualiflow.com
Smart solutions to meet your needs
DeviceNet
- Analog
- Digital - ModBus communication
MFC
Calibration
&
Retrofit
support
center
Gas systems solutions & manufacturing - Gas accessories
Special MFC configuration upon request (metal design...)
AF C 5 0 / A F M 5 5
The traditional analog
Qualiflow Therm AFC 50
and
AFM 55
with elastomeric seals and magnetic
valve :
- Unique fast and reliable horizontal magnetic valve
- Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low
pressure drop and defeats contamination and clogging
- Perfect flow splitting through special bypass design, giving optimal linearity and accuracy
10sccm
-
25slm
AF C 5 0 D / A F M 5 5D
The highest performances of digital P.C.B. combined with elastomeric seals on the
Qualiflow
Therm AFC 50 D
and
AFM 55 D
:
- Full potential of digital technology
- Low pressure drop option for TEOS SDC, TiCl4, etc..
- 100% compatible with analog AFC50
10sccm
-
25slm
AF C 2 0 2 / A F M 3 02
For high flow from 30 slm to 250 slm, the traditional analog
Qualiflow Therm AFC 202
and
AFM
302
with elastomeric seals and magnetic valve :
- Unique fast and reliable horizontal magnetic valve
- Special pressure compensated stainless steel valve for ultra fast flow control
- No particle generation or entrapment
30sccm
-
250slm
AF C 2 0 2 D / A F M 30 2 D
For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with
elastomeric seals on the
Qualiflow Therm AFC 202D
and
AFM 302D
:
- Full potential of digital technology
- Special pressure compensated stainless steel valve for ultra fast flow control
30slm
-
250slm
AF C 2 6 0 - 2 6 1 / A FM 3 60 - 361
The traditional analog
Qualiflow Therm AFC 260 & 261
and
AFM 360 & 361
with elastomeric
seals and reliable thermal valve :
-½½ Compatible with other MFC
-½ Economic design, simple construction
-½ Possibility to regulate with external readout
10sccm
-
5slm
10slm
-
20slm
AF M 10 & 1 1
A small flow meter designed to replace rotameter whenever an electrical signal of the flow
measurement is required :
- Low cost design, simple construction
- Small footprint
- Accuracy up to ±2% F.S.
2slm
-
60slm
100slm
-
200slm
395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48
QUALIFLOW [ Qualiflow Therm ]
