AWM2000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...±30 to 0...±1000 sccm
1
or 0...±4 "H
2
O (0...±10 mbar)
· Bidirectional sensing
· Actual mass flow sensing
· Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage
2
8 to 15 V
typ. 10 ±0.01 V
max. 50 mW
typ. 30 mW
ELECTRICAL CONNECTION
Power consumption
P1
P2
Temperature limits
Operating
Storage
Mechanical shock
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
1 2 3 4 5 6
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
June 2005 / 581
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