AWM3000 Series
Mass flow sensor for gases
PERFORMANCE CHARACTERISTICS
CURRENT OUTPUT VERSIONS (V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
Repeatability and hysteresis (combined)
Non-linearity
Temperature effects
5
Offset
Span
-25 to 85 °C
6
-25 to 25 °C
25 to 85 °C
AWM3200CR
AWM3201CR
AWM3200CR
AWM3201CR
Response time
7
External output load
8
AWM3200CR
AWM3201CR
Min.
3.7
3.6
Typ.
4.0
4.0
5
Max.
4.3
4.4
±0.5
±2.0
24
5
32
5
-31
5
-32
5
60
Unit
mA
% reading
mA
% reading
ms
Ohm
100 to 300
GAS CORRECTION FACTORS
9
Gas type
Helium (He)
Hydrogen (H
2
)
Argon (Ar)
Nitrogen (N
2
)
Oxygen (O
2
)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH
4
)
Ammonia (NH
3
)
Nitrous oxide (N
2
O)
Nitrogen dioxide (NO
2
)
Carbon dioxide (CO
2
)
Correction factor (approx.)
0.5
10
0.7
10,11
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
6
Shift is relative to 25 °C.
7
Initial warm-up time for signal conditioned circuitry is 1 minute max.
8
Output load connected from V
out
to GND (current sinking).
9
Gas correction factors are referenced to nitrogen (N
2
) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
10
When sensing Hydrogen (H
2
) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
11
Hydrogen (H
2
) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
June 2006 / 582
3/6
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