AWM42000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...±25 and 0...±1000 sccm
1
· Bidirectional sensing
· Actual mass flow sensing
· Ceramic flow tube
· Manifold mount/o-ring sealed
SERVICE
To be used with dry gases only.
The AWM42150VH is a special sensor for
hydrogen (H
2
) flow.
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor.
SPECIFICATIONS
Maximum ratings
Supply voltage
2
8 to 15 V
typ. 10 ±0.01 V
max. 60 mW
ELECTRICAL CONNECTION
P1
P2
Power consumption
Temperature limits
Operating
Storage
Mechanical shock
-40 to 125°C
-40 to 125°C
100 g (5 drops, 6 axes)
1 2 3 4 5 6
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
November 2004 / 624
1/6
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