AWM43000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS4
VS = 10 ±0.01 V, TA = 25°C
Flow range
Part no.
Max. flow
change5
Output voltage
@ trim point
(full scale)
AWM43300V
AWM43600V
1000 sccm1
6 SLPM2
5.0 l/sec
5.0 l/sec
5 ±0.15 V @ 1000 sccm1
5 ±0.15 V @ 6 SLPM2
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
Characteristics
Zero offset
Min.
Typ.
Max.
1.05
±0.5
±1.0
±0.3
Unit
0.95
1.0
V
Repeatability and hysteresis
(combined)
AWM43300V
AWM43600V
% reading
V
Ratiometricity error3
Temperature effects6
Offset
Span
-25 to 85 °C
±0.025
-25 to 25 °C AWM43300V
AWM43600V
-5.0
-6.0
6.0
6.0
3.0
150
25
% reading
25 to 85 °C AWM43300V
AWM43600V
Response time
1.0
ms
psi
Common mode pressure
AWM43300V
AWM43600V
Notes:
1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3 Output voltage is ratiometric to supply voltage
4 A 5 micron filter is recommended for all devices.
5
Maximum allowable rate of flow change to prevent damage.
6 Shift is relative to 25 °C.
2/4
November 2004 / 625
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