AWM43000 Series
Mass flow sensor for gases
OUTLINE DRAWING
30.5
(1.20)
27.7
(1.09)
14.0
(0.55)
32.2
(1.19)
7.62
(0.30)
3 2 1
0.64
(0.025)
34.0
(1.34)
3.0
(0.12)
10.9 8.4
(0.43) (0.33)
Ø 3.0
(Ø 0.12)
Ø 3.51
(Ø 0.138)
2.54
(0.10)
7.9
(0.31)
12.7
(0.50)
mass:
approx. 11 g
2.5
(0.10)
17.3
(0.68)
4.8
(0.19)
Ø 6.2
(Ø 0.24)
P1
1 2 3
P2
Ø 2.0
(Ø 0.08)
Pin 1: V
out
Pin 2: +V
s
Pin 3: GND
dimensions in mm (inches)
ORDERING INFORMATION
Flow range
1 0 0 0 sccm
6 S LP M
Dry gas
AWM43300V
AWM43600V
Hydrogen gas
9
AWM43300VH
---
Note:
9
Hydrogen (H
2
) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
4/4
November 2004 / 625
www.sensortechnics.com