FBO Series
Mass flow sensors for gases
FEATURES
· Ranges 0...±30 to 0...±1000
or -600...1000 sccm
1
· Bidirectional sensing
· Actual mass flow sensing
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FBO series is NOT designed for
liquid flow and will be damaged by
liquid flow through the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage
2
8 to 15 V
typ. 10 ±0.01 V
max. 50 mW
typ. 30 mW
ELECTRICAL CONNECTION
Power consumption
P1
P2
Temperature limits
Operating
Storage
Mechanical shock
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
1 2 3 4 5 6
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
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