Production Process
Released
Advanced Passives & MESFET Foundry
Service
GaAs MESFET Foundry
Service
Passivation Via
TQTRp
TQTRx
Features
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Metal 3
Metal 3 - 5 um
Metal 2
Dielectric
Metal 2 - 2 um
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Metal 1
Dielectric
Metal 1
Metal 1 - 2 um
Dielectric
MIM Metal
NiCr
Metal 0
N+
N+
Isolation Implant
N-/P- Channel
E,D,G MESFET
MIM Capacitor
NiCr Resistor
Semi-Insulating GaAs Substrate
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TQTRx Process Cross-Section
TQTRp Process Cross-Section
High Density Interconnects:
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3 Global
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1 Local
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9 µm Total Thickness
High-Q Passives; >50 @ 2 GHz
0.6 µm Gate Length MESFET Op-
tional: Power & General Purpose
D-FETs; E-FET
Schottky-Barrier Diodes
Bulk & Thin Film Resistors
High Value Capacitors
Dielectric Encapsulated Metals
Planarized Surface; simplified
plastic packaging
Substrate Vias Available
Volume Production Processes
Low Cost Passives-Only Option
General Description
TriQuint’s TQTRp process has advanced metal systems and
MESFET devices. It is targeted at high performance, small size
passive-only or passive/active circuits and utilizes over 9 µm of
gold metal. High density interconnections are accomplished
with three thick global and one surface metal interconnect lay-
ers. The four metal layers are encapsulated in a high perform-
ance dielectric that allows wiring flexibility and plastic packag-
ing simplicity. Precision NiCr resistors, implanted resistors,
and high value MIM capacitors are included. Advanced 0.6 µm
enhancement/depletion mode MESFET devices include an inte-
grated power MESFET, general purpose D-Mode MESFET, and
Enhancement Mode MESFET and are based on the TQTRx
process, currently TriQuint’s highest volume process. The
TQTRp process is available on 150-mm (6 inch) wafers.
Applications
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Active and/or Passive
Components
Circuits Requiring High Q Passive
Elements
Ideal for Mixers, Converters, and
Phase-Shifters with Baluns, Trans-
formers, E-M Structures
Mobile Phone Front End Blocks
RF Module Front-Ends
TriQuint Semiconductor
TriQuint Semiconductor
2300 NE Brookwood Pkwy
2300 NE Brookwood Pkwy
Hillsboro, Oregon 97124
Hillsboro, Oregon 97124
Semiconductors for Communications
www.triquint.com
Page 1 of 7; Rev 1.0 11/15/01
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Phone: 503-615-9000
Phone: 503-615-9000
Fax: 503-615-8905
Fax: 503-615-8905
Email: info@triquint.com
Email: info@triquint.com
TRIQUINT [ TRIQUINT SEMICONDUCTOR ]
