Year of Production 2001 2006 2012

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Line width (nm) 150 100 50

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Air Critical Particle Size (nm) 8 2 1

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Water oxidizable carbon (ppb) 1 <1 <1

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Water Dissolved Oxygen (ppb) 1-10 1 1

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Water Particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml

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Liquid Particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml

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HCl, H2O impurities (ppt) <1000 <1000 <1000

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BEOL solvents K, Li, Na (ppt each) <1000 <1000 <1000

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POU Gases particles (per liter) 2 2 2

表5.35 SIA Roadmap Projections (Micro October 1998 p.54)