HFA3046, HFA3096, HFA3127, HFA3128
Die Characteristics
DIE DIMENSIONS:
53 mils x 52 mils x 19 mils
1340µm x 1320µm x 483µm
METALLIZATION:
Type: Metal 1: AlCu(2%)/TiW
Thickness: Metal 1: 8k
Å
±0.4k
Å
Type: Metal 2: AlCu(2%)
Thickness: Metal 2: 16k
Å
±0.8k
Å
PASSIVATION:
Type: Nitride
Thickness: 4k
Å
±0.5k
Å
PROCESS:
UHF-1
SUBSTRATE POTENTIAL: (POWERED UP)
Unbiased
Metallization Mask Layout
HFA3096, HFA3127, HFA3128
2
3
1340µm
(53 mils)
4
5
6
7
1
16
15
14
13
12
11
8
9
10
1320µm
(52 mils)
HFA3046
2
3
1340µm
(53 mils)
4
5
6
7
1
14
13
12
11
10
8
9
1320µm
(52 mils)
Pad numbers correspond to SOIC pinout.
10
FN3076.13
December 21, 2005