6se6440-2uc23-0ca1

一直以来，作为现代工业自动化的三大技术支柱之一，PLC广泛应用于各种自动化系统，在生产过程的自动化控制方面发挥着巨大的作用。2015年11月4日，汇川技术在第17届中国国际工业博览会工业自动化展（IAS 2015），重磅推出AM600系列中型PLC（以下简称AM600）。据了解，这是汇川技术聚焦高端工业自动化应用领域，凭借十余载工控设备沉淀，以更全面的功能和更简易的操作重新定义PLC。
新品技术发布现场，深圳市汇川技术股份有限公司总工程师周保廷对新品AM600进行详解。

1.jpg

（周保廷详解AM600产品特性）
据介绍，M600是汇川技术基于CoDeSys+A8的软硬件平台自主研发的高性能中型PLC。它专为高端工业自动化应用而生，好比一个坚固可靠的工业大脑，具备一站式解决方案，包括强大的运动控制、大规模分布式IO控制、多层次网络等方案，可同时承载工业自动化与信息化的中心枢纽功能。
2.jpg
（汇川技术AM600-IS620N追飞剪演示）

一站式解决方案
AM600一个主机就包括各种现场总线，包括EtherCAT、CANopen、Profibus-DP现场总线，支持数万点分布式IO；具备RS485x2，可以与更多外设互联；内置高速IO，可在需要的场合实现对步进电机驱动器或伺服驱动器的精准控制；此外，主机还可以直接挂多达16个扩展模块。
不仅如此，AM600还具备通用以太网功能，可作为调试端口，同时也可作为多机互联或与服务器实现互联。
强大的运动控制功能
AM600聚焦总线运动控制，支持电子凸轮/电子齿轮功能，同时亦可支持PLCopen主流应用功能。基于EtherCAT总线运动控制，AM600可连接32轴伺服，实轴与虚轴可同时组合控制，两伺服从站最长可达100m距离，支持伺服与扩展机架的同时扩展。在支持电子凸轮/电子齿轮功能表现上，AM600亦有不俗的表现：16轴电子凸轮控制同步周期小于2ms；图形凸轮编辑器可以实现对复杂运动控制轨迹的快速执行，可以在运行中实时动态修正凸轮数据；每个凸轮表数据支持65535点；凸轮数据与IEC程序相结合控制编程。
多层次网络解决方案
得益于AM600的各种总线及通信接口，一网打尽设备或者产线的各个层次，包括——信息层：利用以太网接口轻松连接至工厂制造执行系统MES及企业资源计划ERP系统。设备层：提供以太网ModbusTCP功能，可连接并动态协调各设备动作；提供CAN通信互连设备，支持CANlink3.0或CANopen协议。控制层：提供EtherCAT实现多轴的运动控制以或大规模IO控制；提供Profibus-DP以及CAN通信现场总线，可以控制多台驱动器或IO。信息层与设备层、控制层无缝结合，真正实现“一个主机，全面覆盖”。
简单易用
采用IEC61131-3编程语言体系，支持PLCOpen标准6种编程语言，并充分考虑了亚洲用户的编程习惯；全可视化组态配置，支持多种总线组态及本地IO硬件组态；辅以现代工程管理软件，可实现多人合作编程，即使面对复杂应用也游刃有余。此外，模块化和可拆卸端子台设计，让AM600的安装及接线维护更方便；离线仿真、在线调试及在线修改功能以及CPU本体自带数码管设计，使得产品调试及诊断更轻松。
AM600适用于大规模控制的工厂自动化、产线自动化、过程自动化领域以及高端自动化设备，为各种自动化控制设备及系统提供广泛、可靠的控制应用。

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【主营产品】
1：Invensys Foxboro（福克斯波罗）：I/A Series系统，FBM（现场输入/输出模块）顺序控制、梯形逻辑控制、事故追忆处理、数模转换、输入/输出信号处理、数据通信及处理等。

2：Invensys Triconex: 冗余容错控制系统、基于三重模件冗余（TMR）结构的最现代化的容错控制器。

3：Westinghouse（西屋）： OVATION系统、WDPF系统、WEStation系统备件。

4：Rockwell Allen-Bradley: Reliance瑞恩、SLC500/1747/1746、MicroLogix/1761/1763/1762/1766/1764、CompactLogix/1769/1768、Logix5000/1756/1789/1794/1760/1788、PLC-5/1771/1785等。

5：Schneider Modicon（施耐德莫迪康）：Quantum 140系列处理器、控制卡、电源模块等。

6：ABB：工业机器人备件DSQC系列、Bailey INFI 90等。

7：Siemens(西门子)：Siemens MOORE， Siemens Simatic C1，Siemens数控系统等。

8：Motorola（摩托罗拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。

9：XYCOM：I/O 、VME板和处理器等。

10：GE FANUC(GE发那科)：模块、卡件、驱动器等各类备件。

11：Yaskawa（安川）：伺服控制器、伺服马达、伺服驱动器。

12：Bosch Rexroth（博世力士乐）：Indramat，I/O模块,PLC控制器,驱动模块等。

13：Woodward（伍德沃德）：SPC阀位控制器、PEAK150数字控制器。

14:工业机器人系统备件。
Nissin NI89-0286-1, Keyboard H/C (English Version), 416873

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419625

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419626

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419627

STEC SEC-4550 MFC, Mass Flow Controller, N2, 30 SLM

STEC SEC-4550 MFC, Mass Flow Controller, N2, 30 SLM

STEC SEC-4550 MFC, Mass Flow Controller, N2, 40 SLM

STEC SEC-4550 MFC, mass flow controller, O2, 50 SLM, 324247

PCB Scan driver bd for SEM 0001-00001 rev C

Danfoss 131L9869 VLT HVAC Basic Drive, 11kW, 15HP, 3x380-480V, 50/60Hz, 423666

Millipore MFC Tylan 2979M Series FC-2979MEP5, O2, 1 SLPM Looks very clean

Tylan MFC 2979 series FC-2979MEP5-L, C4F8, 50 SCCM, looks new

NEW Millipore MFC FSCGD100QE09, H2, 100 SCCM, With calibration sheet

Millipore MFC Tylan 2979 series, FC-2979MEP5-W, O2, 100 SCCM, looks very clean

Nor-cal Products 796-00809-1-001, High Vacuum Pneumatic Valve w/ Chamber, 422573

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322259

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322281

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322258

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322260

Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 409815

Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 322292

MKS CDN391R, AS01391-21-1, FW:4.025, HW:2002, Board, PCB. 322259

AMAT 0020-23079, Clamp Ring, 5", AL, SMRMF, Reduced Flat. 416195

AMAT 0020-10122 Plate, Perf, 125mm, Oxide 415187

AMAT 0020-85419, Electrode Focus, CARBOGTAF 500. 419158

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417641

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417642

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417643

AMAT 0140-00644 Rev.001, Harness Assembly, D Cell A Digital Pneumatic. 417644

Coyote Point Equalizer E650GX Load Balancer 416372

Coyote Point Equalizer E650GX Load Balancer 416374

ABB QSB23175L, Circuit Breaker, 240V, 175A, 3 Pole 416375

Tektronix 577, Curve Trace w/ 177 Standard Test Fixture, D2 Storage. 416423

NEW SWAGELOK 6LVV-ALD6HFR4-P-CS-NV lots of 2

Semprex 17-2358.00 Motor Controller, 423534

2 TEL, Tokyo Electron SR00609, 8", Extension Ring, MIT w/ Data Sheet. 418401

AMAT 0030-90038 Casting Cam, 417805

AMAT 0020-75402 Rev.A, KLC 1702, Reducer, 2" FNPT x 1 1/4" MNPT FTG. 418307

AMAT 0010-04051 Hose Assembly Chamber Supply 200MM Preclean, 418650

AMAT 0010-04051, BAT, Hose Assembly Chamber Supply 200mm Preclean. 418705

AMAT 0200-09084 Shield, 125mm, Sputter Etch, 417389

AMAT 0140-04457, Harness Assembly, Pressure XDRC Control, 300mm R. 417574

AMAT 0140-04457, Harness Assembly, Pressure XDRC Control 300mm R. 417582

AMAT 0140-07090 Harness Assy, 300M Axiom, Bulkhead C Bias, 417624

AMAT 0100-40029 PCBA, Source Metrology BD

AMAT 0660-01894 INTL PC STPR BackPane Integra

AMAT 0040-33564 Release Shaft, Quick Change 2.1 Brush Mo

AMAT 0190-13922 External Encoder cable, version 2

Granville Phillips 274028 Ion Gauge Sensor, PVD, AMAT Conflat Seal, 419257

AMAT 0040-44407 Clamp, Bottom, NI Producer, Quartz, Blade, 420356

AMAT 0040-44407 Clamp, Bottom, NI Producer, Quartz, Blade, 420357

AMAT 0020-99382 Rev.A, Thomas Hatchard, Shaft, Drive 25-30, Durometer. 419310

AMAT 0020-09062 Gas Distribution Plate 416636

Millipore FC-2900M-4V MFC, Mass Flow Controller, O2, 100 SCCM, 422032

Unit Instruments UFC-1200A MFC, Mass Flow Controller, HCL, 50 SCCM, 405469

AMAT 0040-03590 Pan, Spill, 1.2L TDMAT, TXZ Gas Box 300, 417820

AMAT 0020-24633 Top Cover CH TRay B Outer (Widebody) 417900

AMAT 0020-24633 Top Cover CH TRay B Outer (Widebody) 417901

AMAT 0020-24633 Top Cover CH Tray B Outer (Widebody) 417902

AMAT 0021-04094, Support, Chamber, AFO, CH C/D, SEIKO S. 417917

Black Box ACS4201A-R2-MM DVI-D KVM Extender, 423780

AMAT 0020-14010, Shield End Effector. 417955

Motion Systems 73058-001, Motor W/ AMAT 0040-49302, 0020-22987, 24V. 416718

Melles Griot 040AS008, Microscope Objective Lens, 6.3x, Tencor 209074. 416813

Kollmorgen AKM24F-BSM22-02 Servomotor, 320VDC, 8000 RPM, 418162

Metron 233-4939-60 ACT 12-200 Catch Cup, 3 Pieces, 423638

IVS 0001-00060 Control module for SEM

AMAT 0021-23121 Rev.003, MEI-003-21302, Pin Tip PPR iECP. 419652

MKS Instruments 683B-26033, Isolation Gate Valve. 416972

MKS Instruments 683B-26033, Isolation Gate Valve. 416973

MKS Instruments 683B-26033, Isolation Gate Valve. 416974

MKS Instruments 683B-26033, Isolation Gate Valve. 416975

Asyst 3200-1065 Daughter Board, PCB, Asyst 3200-1015, FAB 3000-1065-01, 423315

LAM KG7-M4520-010 I/O Board Assy, Yamaha Motor KG7-4521-010, 422712

Keithley 2000 Mulimeter, 423565

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417048

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417049

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417050

Yaskawa CIMR-ZU4A0005FAA, VFD, Variable Frequency Driver, Z1000, Digital. 419697

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417007

AMAT 0190-02328 Waveguide, QTZ RPN Step Transition CH C, 0190-02328/001, 418181

AMAT 1350-00056 Baratron Pressure Transducer MKS 872B12PME2MR1, 100 PSIA, 418202

Brooks Automation 8112212G005 Cable Assy Adapter On-Board, 50', 423843

Brooks Automation 8112212G005 Cable Assy Adapter On-Board, 50', 423844

7 Centronics Interface PCB Board 068486-003

Micron 810-00347R KF40 Isolation Valve Staggered Port, 421560

Brewer Science 6KSD-9004C, Spinner Motor Card, PCB. 418252

THORLABS LDC 202 C LASER DIODE CONTROLLER 200mA, LDC 202C, 423585

NEW Berkeley Process Controls ASM81-A-0/L-00-LB/10 AC brushless servo motor

Unit Instruments URS-100-WE MFC, Controller, 117VAC, 50-60Hz, w/Key. 419877

Danfoss 131L9798 VLT HVAC Basic Drive, 5.5kW, 7.5HP, 3x200-240V, 50/60Hz, 423665

Digital Graphix Inc 068155-02 PCB Assy, 2166-1098, 07-0130-00, 58430212, 422377

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417149

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417150

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417151

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417152

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417153

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423399

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423400

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423401

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423402

MKS 627A-13267 Type 627 Baratron Pressure Transducer, 20 Torr, 422913

AMAT 0225-02349 Rev.XA, Pedestal Assembly, Bottom, 150. 418450

Cambridge Technology Dual 6650 Glavanometer Optical Scanner Assembly. 417205

MRC A115105, Eclipse Star Remote Control Box, KBD. 419961

AMAT 0020-07049 Support, Seal

AMAT 0040-75023 BEZEL, Monitor Cover, 420711

NEW Bodine 42R5BFPP-5N, Gear motor 120VDC 1/8 hp gearmotor

Arroyo Instruments 5305 TECSource Temperature Controller, 5A/12V, 423605

AMAT 0150-70038 Coaxial Cable, 420027

Nikon PCB KBA00101-AE36, R Stage SRV 12031-IC, CL5542. 418550

AMAT 0040-18113 Rev.B, Arm #2, MW Support, Ultima MDP-CVD. 418609

Asyst 4002-9005-01 Power Supply, V ADJ, 422585

Asyst 4002-9005-01 Power Supply, V ADJ, 422586

AMAT 0050-76094 Rev.A, 021, 1028, 17393201, Equalizaton Line. 418662

Power One HCBB-75W-A Power Supply, 420771

AMAT 0190-20096, TC Wafer, 8" MAC, SensArray 1501A-8-0139. 416026

AMAT 0020-10176 Rev.P1, Motorola MOS 21, Cover, Shadow Ring, Quartz. 417354

AMAT 0200-09557B, Ring, Focus, West Coast Quartz, POLY, 150mm/170. 417415

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417425

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417426

AA2-12 Cable, 8 Conductor, 16 AWG, AAZ-12, 422628

Equipe 2002-2137, Pre300 Video PCB, FAB 2008-2090, Wafer Prealigner. 420141

Oriental Motor Vexta KBLD120-A, AC Servo Driver, 50/60Hz, 7.5A. 416337

UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet

AMAT Slit Valve Door Insert Buffer Transfer Chamber PVD Centura Endura, 416344

Pfeiffer TPS 100 Turbo Pump Power Supply Controller, PM 041 828-T, 420181

Keithley 2000 Multimeter, 423723

AMAT 0200-20061 Insulator, Quartz, 6", PVD Sputter chamber PCII, , 417506

AMAT 0021-15387 Bracket Foreline Support, Producer, 417509

ABB ACS355-03U-24A4-2 IP20/UL Open Type Low Voltage Machine Drive, 423730

AMAT 0020-10771 Perf Plate, 150mm, OX, Showerhead 417528

Nikon KBA00101-AE36, Reticle Stage SRV, PCB, 12031-IC. 419205

Pacific scientific N31HRHK-LNK-001 Stepper Motor

2 MKS MASS FLOW CONTROLLER 5877, He, 10 SCCM

UNIT MFC Mass Flow Controller UFC-8165, 10L, Gas N2

STEC MFC Mass Flow Controller SEC-4400MC-UC, NH3, 5 SLM

UNIT UFC - 7000 industrial MFC Mass Flow Controller, H2, 1.00 SLM

BOC EDWARDS interface module, U20000521

Watlow Winona Syst-5071-0000 Temperature Monitor, 420921

Watlow Winona Syst-5071-0000 Temperature Monitor, 420922

3 AMAT 0020-26721 Mount, Ball Transfer, FI Outrigger, 3690-00526, 329445

AMAT 0010-60024, SUSC. 6", BSE BWCVD, Susceptor, Plate, 150mm, Back Aram. 417636

Unit Instruments UFC-1200A, Mass Flow Controller, MFC, AR, 1 SLM. 417637

KLA Tencor 52-0282 Motor Filter Wheel, UV 1250, 419243

KLOEHN SYRINGE PUMPS MOTORIZED INJECTOR VALVES 19311

AMAT 0140-02419 Rev.001, Harness Assembly, Pressure XDUCER, CVD, 300mm. 417691

Pacific Scientific N31HRHK-LNK-NS-001 Stepper Motor

Vat Isolation Valve, DN 100, 90 Degree Angle

AMAT 0020-99422 Issue.A, Insert, Inner, Carbograf 500. 417898

AMAT 0020-99422 Insert, Inner, 417867

AMAT 0090-00980 Rev.001, Outer Element Heater ECP Anneal 300mm, 134. 418361

AMAT 0090-00980 Rev.001, Outer Element Heater ECP Anneal 300mm, 192. 418362

AMAT 0090-00980 Rev.001, 134, Outer Element Heater ECP ANNEAL 300mm. 418444

AMAT 0020-30600, Plate Gas Dist EGEC. 417565

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417799

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417800

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417907

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417908

4 new E17043060 spool lip seal wafer lift

4 NEW AMAT 0190-05336 Belt Assembly, Buffer / Trans

Bodine Electric 32X5BEPM-W2 Gearmotor, 130V DC, 1.0 A, 1/8 HP, 456 RPM, 423832

Bodine Electric 32X5BEPM-W2 Gearmotor, 130V DC, 1.0 A, 1/8 HP, 456 RPM, 423833

New Varian Cold Cathode vacuum gauge w/ nw25 port

Lot of 12 Clamp Assembly Disc 233471447

2 Novellus Speedfam IPEC 810-738370 Vexta PK564ANA-TG30, Stepper Motors

Danfoss 131L9869 VLT HVAC Basic Drive, 11kW, 15HP, 3x380-480V, 50/60Hz, 423679

2 BOC Edwards APG-M-NW25 ST/ST Active Pirani Gauge, 422592

2 BOC Edwards APG-M-NW25 ST/ST Active Pirani Gauge, 422593

AMAT 7300-027077 Chuck, AN AL, 300mm, 422673

3 AMAT 0040-45933 Ball Transfer Screw Assy, 324366

6 AMAT 0020-14125 GASKET, SILICONE, RUBBER LAMP MODULE

Yaskawa CIMR-F7U27P5 Varsispeed F7 AC Drive, 423768

2 TCR 20S30 source magnet power supply electronic measurements

BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN

MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLPM

AMAT 0190-70066 Fantray 300CFM 19" X1.75" X 8" 115 VAC, REPL, 417819

MKS 124A-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422768

MKS 124A-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422769

AMAT 0040-45546 Rev.001, Hood, Toxic Skin Upper Front, 300mm RADI. 417858

AMAT 0021-37701 Side Receiver, Left 200mm, 316-EP, 417986

AMAT 0021-21504 Shield, Heater, 8" Enhanced Orienter Degas, 417987

NEW PCB Robot Motion control amplifier Western servo design 10087-100 AVB

AMAT 0020-24727 Pedestal Shield 5" Preclean II, 418296

AMAT 0040-22933 Rev.001, Base, 300mm, PVD Chamber, GASBOX. 418324

Keyence N-400 Multi-Drop Controller Assy w/ 2 N-48 Communication Units. 423412

AMAT 0020-18715 Insert Chamber Slit Valve, 423975

MKS 124-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422986

MKS 124-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422987

Contemporary Controls MODHUB-16F, 4-Port Modular Network Hub, ARCNET. 420051

AMAT 0200-09347, Collar SI, 0X/M2R/NIT, 150mm FLAT, 5200. 416859

AMAT 0021-36625 Cover, Side Lower Chamber, DPS, 417388

ILX Lightwave MPS-8033 Precision Fiber Optic Source, 850 nm FP, 416307

AMAT 0020-30086 Plate Perforated, 150mm, Nitride, Giant Gap, 415299

MKS 99E0716 Vacuum Interlock Assy w/ Safety Valve, 750C11TCD2GG Baratron, 423493

AMAT 0200-10246 Uni-Insert, GDP, Liner, 88 Hold, Quartz, 417558

AMAT 0090-77349 Assy TRM MTR Rotary SHTL PM 1/2, MCG-ME3776, 7.50 LB-IN 416369

AMAT 0090-77349 Assy TRM MTR Rotary SHTL PM 1/2, MCG-ME3776, 7.50 LB-IN 416370

Ebara C-3812-324-0021 Edge Ring E, TEL, Tokyo Electron SR00908, 420251

AMAT 0021-20571 Shield, Lower 8" 101, 11.3, SST, Aluminum, 401193

AMAT 0020-18452 Rev.A, Strip 2, Side Coil, Match Box, HDPCVD, Rev3. 418085

Olympus MDPlan 150, 0.95, IC 150,

3 AMAT 0150-09616 SPAN IPS 122 Type 1, 8-30VDC, 12W Cable Pressure Switch 418436

AMAT 0200-00014, Cover, Quartz, 100mm, XTAL. 417350

AMAT 0225-32985, XYCarb Ceramics 590423A, Gas Ring, Quartz, 12 Holes. 417353

AMAT 0225-32985, Gas Ring, Quartz, 12 Holes, 417443

AMAT 0030-90039 Casting Bracket Lock, 417749

AMAT 0100-00156 Isolation Amplifier PCB, FAB 0110-00156, 416454

AMAT 0100-00046 AC Current Sense, PCB, FAB 0100-00046, 416456

AMAT 0020-77370 Pulley

GAST, Oiless Vacuum Diaphragm, 965513, D800

AMAT 0020-25631, Cover, POS, A/B, MEI-120. 416678

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419402

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419403

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419404

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1 Vented 12V. 419409

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419414

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419415

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419416

Z axis ball screw with stepper motor 500054082

AMAT 0021-06926 Holder, Liner, XZ Anneal, 417990

Tamagawa Seiki AU3501N8 Turbo Pump Controller, 423298

Tamagawa Seiki AU3501N8 Turbo Pump Controller, 423299

Advanced Energy AE-4855015 RF Cable, AE, 423657

Ampro F12035002 PCB, OPC 1298MD, Circuit Board, STPCE1HEBC, 422714

AMAT 0200-09474 Disc, Ring, 150mm, Quartz, 422864

AMAT 0140-03870 H/A, AC Power, PDO Tray 3-Station, 24 VDC, 5.8 FT, 418139

AMAT 0040-76149 P5000 MKII-XT Weldment, Foreline CH B HE, 418145

6 Centronics Interface PCB Board 068486-003

BOC Edwards A55001192 Pump Silencer TMS Control Unit, 330w, 50/60 Hz, 421559

Summit Contactor 8-32S9K/ST2ATC Cover Set, 1906484-101, 423854

Novellus 15-10676-00, Blank off Mesa Flange, Chamber Spacer , Insert. 418247

AMAT 0040-76149 Rev.A, P5000 MKII-XT Weldment, Foreline Chamber B HE. 418249

AMAT 0200-14015 Sheath Quartz Radiometer, 418239

AMAT 0040-76149 P5000 MKII-XT Weldment, Foreline Channel B HE, 418297

Ham-Let H-700-SS-L-1"-T-LD Manual Lever Valve Assembly, Griswold Controls 420661

Danfoss 131L9867 VLT HVAC Basic Drive, 5.5kW, 7.5HP, 3x380-480V, 50/60Hz, 423680

Disco FBPCB-0022, Text Graphic Board, PCB, PWB-A223-B, BP-MTG-001. 418414

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 321343

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 321345

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 407883

2 AMAT 0050-03937 Rev.P, Water Supply Weldment, Piping Cham A. 417180

AMAT 0020-09029 Covering Pipe, 419900

AMAT 0020-09029 Covering Pipe, 419901

AMAT 1360-00045, XFMR Control 50VA 208/240/277/380/480P. 401331

AMAT 0020-04194 Rev.A, Top Lid, MXP, 0020-09517 Heating Element. 419908

Pfeiffer Balzers TCP 121 Turbo Pump Controller, 422562

11 new AMAT 0030-00196 face seal 200mm

6 Swagelok 6LVV-DPBW4-P-C Valve Manifold, 422565

Hoke 7387004R, Valve 100 PSIG, 316 SST/ EPDM. 418440

Varian 113940001 Arc Chamber Base Plate, 418477

AMAT 0020-04194, Top Lid, MXP, 0190-09162 Heating Element, Chamber. 420048

AMAT 0200-09602, Pipe, Insulating, Quartz w/ Flange, Tube MXP. 420059

Unit Instruments UFC-3165 MFC Mass Flow Controller, N2, 100L, 3030-03330, 423453

Unit Instruments UFC-3165 MFC Mass Flow Controller, N2, 100L, 0190-08914, 423454

AMAT 0100-14006 w/ PCB Operator Interface Assy, 417302

AERA FC-PA7800C-BA MFC, Mass Flow Controller, AR, 5 SLM, 423695

AERA FC-PA7810C-BA MFC, Mass Flow Controller N2, 10 SLM, AMAT 3030-16228, 423697

Opto 22 AC37 High-Speed Communication Adapter Card, PCB, 422591

MKS MFVA23C026AAA Mass Flow Verifier, 423480

AERA FC-PA7810C-BA MFC, Mass Flow Controller AR, 20 SLM, 423705

AERA FC-PA7800C-BA MFC, Mass Flow Controller AR, 5 SLM, 423706

ULVAC PST-030AU Sputter ION PUMP, 420784

ULVAC PST-030AU Sputter ION PUMP, 420785

AMAT 0021-07321 Bracket, BPSG Assembly, XE CH A, RTP, CM, 417356

AMAT 0200-00047D, West Coast Quartz, Clamp Ring, 150mm, 1/4 TK OXIDE/MLR. 417429

Comdel CPM-5000 Match Pro Remote Controller, CPM-5000/REMOTE, 423043

Leybold CT 200 ECE Turbo Pump Controller 416323

Leybold CT 200 ECE Turbo Pump Controller 416324

Leybold CT 200 ECE Turbo Pump Controller 416325

Parker Digiplan PDS 13-2/USA , PDS Series 13, 97101400163, 300VA. 416335

AMAT 0021-38456 Cover, Lining, 420180

Varian 113940001, 1902, Arc Cham Base Plate. 419112

APTech AP3000S 2PW TW4 TW4 1.75 Valve Assembly, w/ AP3625NS, 420223

Bay Advanced Technologies 9268-01, 40 Station Valve Assy. 416352

AMAT 0200-14015 Sheath, Quartz, Radiometer, 417500

ABB ACS355-03U-24A4-2 IP20/UL Open Type Low Voltage Machine Drive, 423731

Aera FC-PA7810C-BA MFC, Mass Flow Controller, Si2H6, 2 SLM, 3030-16242, 423739

Aera FC-PA7810C-BA MFC, Mass Flow Controller, NH3, 8 SLM, 3030-16230, 423741

AMAT 0100-90697 Rev.A, PWBA 9210 Wafer Arm Replaces 0100-9063 242138-SP. 417608

Mitsubishi FR-F740PJ-3.7K Inverter, 423753

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417723

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417725

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417722

Matchlett ML-6257 High Voltage Power Vacuum Tube, Raytheon, 422966

AMAT 0190-08850 Specification Assy, Cable, Ext, Polarize MT, Nanometrics, 417767

AMAT 0020-04267 Rev.P8, Base DCR Controller, PAR 30/94. 417853

AMAT 0050-76080 Line, Exhaust Channel C&D Lower 316L SST, 418389

AMAT 0050-76080 Rev.A, Line, Exhaust Chamber. C&D Lower 3. 418427

AMAT 0140-05437, Wire Set DC Power Supply, Cable, Assembly. 416227

AMAT 0100-90190, PWBA M/B Filament Power Supply. 417580

AMAT 0100-90190-H, CN2-01-17, ZZGAD, 108H, PWBA M/B Filament PWR Supply. 417581

AMAT 0100-90190, WH 14 B, 4608083-0001, PWBA M/B HLAMENT Power Supply. 417595

AMAT 0190-08850 Specification Assy, Cable, EXT, Polarize MT, 417658

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416952

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416958

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416959

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416960

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416961

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416964

Swagelok NXT-DRP41AFDFD-0 2-Way, Flare 3/8," AMAT 3870-04958, 420577

OMEGA LCGD-1k Load cell 0-1000lb, sealed box

AMAT 0040-44376 Rev.001, Panel, Photohelic 300mm. 419726

2 Mitsubishi MR-J2S-20B Servo Motor 417009

4 AMAT 0021-06582 Stop, Hard, Lift, Rot Head-ECP, 421604

Mattson 2411931, AWP Piranha, Cover PVDF Complete. 417125

Mattson 2411931, AWP Piranha, Cover PVDF Complete. 417126

VERIFLO CORP GAS VALVE 45200254

Vexta PK54ANA-TG3- 5 phase stepper motor, .024" step, Oriental motors

APPLIED MATERIALS 3870-01584 VALVE AIR ACTUATEO DIAPH

Yaskawa SGDA-01AS Servopack Servo Drive, Amplifier, AMAT 0870-01010, 423919

Nano Metric XLS75, 7200-02208 Rev.B , UV Light Source. 418537

AMAT 3870-04958, Swagelok NXT-DRP41AFDFD-0, 2-Way Valve, Flare 3/8". 418675

2 AMAT 0020-76429 Side Plate Upper Frame Rear Centura, 422598

6 AMAT 3320-90034 gasket graphite

Millipore CDLD-21S06E Manometer, 0-100 Torr, Novellus 60-054373-00, 423479

Advanced Energy 3155043-001A RFX 2 System Remote Controller 416326

Advanced Energy 3155043-001A RFX 2 System Remote Controller 416327

Disco EAUA--334701, FAPCB-0412, Driver Board. 419181

Novellus 27-127854-00, COSEL UAW500S-24, Power supply, 24 V, 22A , NIB

New AMAT 0040-05531 Cover, CHM I/O Drawer Top

Nova 964948 Display Mount

AMAT 0040-46720 Guard, Spoolpiece, Left, TICL4 Producer, 417751

4 Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420206

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420995

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420996

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420997

AMAT 0020-21095 Issue.A, Shielding Disc (Buncher Elect). 419322

AMAT 0020-30407 Perf Plate, 200mm, BW, Showerhead, 422734

ASYST 4003-3011-01 SERVO MOTOR, REV A, DELTRAN PT, BRP-19AL, 24 VDC

ASYST 4003-3011-01 SERVO MOTOR, REV A, 24 VDC

AMAT 1270-00224 SW Flow Non-Adjustable 100CC/M Increasing, 417904

AMAT 0020-05053 Perf Plate Performance+, 100-150mm, 417882

AMAT 0040-62929, SWLL B FI Panel Intermediate TETRA. 417925

AMAT 0140-04642 Rev.001, Harness Assembly, ACDC Drawer, DC 300mm RTP C. 417929

Cutler-Hammer JD3250F Series C Circuit Breaker, AMAT 0680-01142. 419540

AMAT 0040-96525 Init.B, FXD Clip Silicon Sprayed 200 - 0. 417950

SMC VV5Q11-ULB990070 16 Station Pneumatic Manifold Assy, NP420-DN1, 423500

cybor power supply 512F

APTech AP1410S 4PW MV4 FV4 0 0 ST SP Regulator Valve, 4-Way, 423549

Varian 810-320687-1, Top Cover, TEL. 419684

Varian 810-320687-1, Top Cover, TEL. 419685

Varian 70278001, Moisture Detector 416985

Edwards AIM-S-NW25 Active Gauge, Turbo Molecular Pump Vacuum, 420574

STEC LF-310A-EVD, TEB 0.1 g/min Liquid Flow Controller

STEC LF-310A-EVD, TEPO 0.25 g/min Liquid Flow Controller

STEC LF-310A-EVD, TEB 0.5 g/min Liquid Flow Controller

Aera MFC FC-7800CU, O2, 2 SLM

Aera MFC, Mass FLow Controller, FC-7810CU, C2F6, 2 SLM

Pittman 9236E466 Asyst Loader Motor, 24 VDC, 500 CPR, 418141

Agilent 9699950L0500 V70-V150HT- V250- V300HT 500 CM Extension Cable, 423845

Agilent 9699950L0500 V70-V150HT- V250- V300HT 500 CM Extension Cable, 423848

Nor-Cal Manual ESV-202-NWB NW50 KF50 Isolation Valve, 422430

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418238

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418239

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418240

Warner Electric M06.3-LE-507E Slo-Sync Stepping Motor 2.9A, 3.36VDC. 418241

Warner Electric M06.3-LE-507E Slo-Sync Stepping Motor 2.9A, 3.36VDC. 418242

ABB AF185-30-11 Circuit Breaker 100-250V 50/60HZ / 100-250V DC, 422433

ABB AF185-30-11 Circuit Breaker 100-250V 50/60HZ / 100-250V DC, 422531

THORLABS LDC 201 C ULN LASER DIODE CONTROLLER 100mA, LDC 201C, 423586

AMAT 0190-15735 Rev.P1, 9281-03 Rev.A, Harness Assembly DNET Gas Panel 1. 418267

PCB Scan Focus Board for SEM 0003-00596 rev c

Silicon Thermal PS500 Power Supply, LB 300-1 Controller, T Type TC. 418336

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423397

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423398

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423396

APTech AP1210SM 2PW FV8 MV8 FC Single Stage Regulator Valve, Isolation, 422873

Keyence N-400 Multi-Drop Controller Assy w/ 2 N-48 Communication Units. 423411

Danfoss 131L9866 VLT HVAC Basic Drive 4.0kW, 5.5 HP, 3x380-480V, 50/60Hz, 423681

Vacuum General AC-2 AdapTorr Vacuum Controller, 422242

AMAT 0021-11628 Cover, EMO Panel 300mm SM4, 419936

AMAT 0021-11628 Cover, EMO Panel 300mm SM4, 419938

Metrowerks CWCODDETEST4MIC Codetest Data Collection Unit, 419939

TEL, Tokyo Electron, 1208-001151-11, Indexer PCB. 419963

TEL, Tokyo Electron, 1208-001151-11, Indexer PCB. 419964

Yokogawa Compumotor SD1004B64 Dynaserv Servo Drive, Parker, 422927

AMAT 0200-00059 Cover, QTZ DF, 417247

AMAT 0035-00069, Base, RF Filter Box, 300mm DPS II, 0035-00068. 419944

AMAT 0021-13247 No.3, Arm, Right Extended Reach 300mm. 418429

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423450

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423451

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423452

AMAT 0100-00177 Rev.E, EP Module I/O Interconnect. 418510

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN I/O. 418560

AMAT 0040-34742 Rev.001, Bracket for Manostar Gauge. 418561

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418520

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418527

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418575

Berkeley Process Controls MWTX-8-MNET, 2.1.1 Machineworks Controller, 422270

Berkeley Process Controls MWTX-8-MNET, 2.1.1 Machineworks Controller, 422272

MKS 1259C-00010SV MFC Assy, Mass Flow Controller, N2, 10 SCCM, 423470

AMAT 0200-00059 Rev.001, Cover, Quartz, 6, DF. 417380

TEL, Tokyo Electron, 581-1AE1-006 Sensor Transducer, 911 Magnetrol Level, 423617

TEL, Tokyo Electron, 581-1AE1-006 Sensor Transducer, 911 Magnetrol Level, 423618

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417419

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417422

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417423

Novellus 22-055667-00 DN100 4" Mechanism VAT 94842-R1, Gate Valve Insert, 422629

EFFEKTA EFF.1500 I-NET 19"-STE UPS, Uninterruptible Power Supply, 416309