鼎晟达自动化 TPC-1571H-D3AE
日期：2020-6-15一、电除尘器低压控制系统的组成及控制要求
电除尘器的低压控制工艺主要包括振打控制，绝缘子温箱电加热控制灰斗电加热控制、卸灰控制、料位控制、进出口温度显示、高压隔离开关到位显示以及远程通讯等。
1.1振打控制系统
电极振打清灰是电除尘器的主要工作过程，其清灰效果不仅与施加在阴阳极上的振打加速度有关，而且振打周期对其影响也很大。传统的振打方式为切向振打，其控制可分为连续振打和定时振打。在振打力度和均匀性都满足要求时，振打制度是否合理，对电除尘器除尘效率影响极大。振打过频，收集在阳极极板上的粉尘不能成块落入灰斗，二次飞扬严重，尤其末级电场的二次飞扬，将大大降低除尘效率。反之，振打周期过长，阳极上的粉尘堆积过厚，会使阴阳极之间电压降低，二次电流降低，电晕功率减小，除尘效率下降;阳极板严重积灰甚至形成反电晕，使已经被收集在在阳极板上的粉尘再次进入气流。因此，选择合理的振打周期，将有助于更好地清灰和提高除尘效果。
1.2卸灰控制系统
进入电除尘的粉尘被阴阳极捕获后，由振打系统振落在灰斗中，这些灰料应适时排送出去，灰料堆积太多，相互了增加灰斗的荷重外，严重时还会造成阴阳之间的短路，使电除尘器无法正常运行，相反，灰斗没有储灰，在灰斗出口出现漏风，引起二次扬尘，使除尘效率降低。
1.3极热控制系统
加热控制系统的对象包括大梁电加热器、阴瓷轴电加热器、灰斗电加热器等。常用的控制策略是根据测温装置的温度信号对电加热器进行恒温控制。当温度地狱下限时，启动电加热器加热;温度高于上限时，停止电加热器加热。
二、电除尘器低压控制系统的应用实例
山东某厂使用的低压控制系统除尘室采用三电场除尘方式，电除尘器3个电场有6个振打电机、3个灰斗加热控制器、3根大梁加热控制器、3个卸灰电机，再加上报警用信号输出端、热风电机控制、总启动、故障解除、3个电场料位计检测输入、大梁灰斗等处温度、控制等，总计是20点数字输出、23点数字量输入、8点模拟量输入,6TC温度测量输入。
根据以上计算，电除尘器低压控制系统以CPU-224A为主控部分。
其中CPU224A模块接受电机驱动保护器的故障信号，电加热保护控制器的故障信号，温度采集处理器的温度信号，料位信号以及输卸灰设备的电气信号等，经分析处理后，根据工艺流程把控制振打电机、加热器、报警器等控制信号输给相应的外部设备。数字量输入/输出模块EM223把CPU模块控制卸灰电机的信号输给相应的外部设备。模拟量输入模块EM231把高压硅整流设备的有关信号及温度采集器送进来的进出口烟气温度，大梁、瓷轴、灰斗等处的温度信号送给CPU模块分析处理。
三、电除尘器低压控制系统的软件设计
3.1振打控制设计
根据多年对电除尘器低压控制系统的运行经验，为提高电除尘器的除尘效率，有效降低功耗，对本地振打电机的优化控制作如下要求：
同一电场中阴极和阳极振打不能同时进行;
多电场除尘器中，前后电场阳极(或阴极)振打不能同时进行;
设置有振打槽板的电除尘器，其末电场阳极振打和槽板振打不能同时进行。
3.2加热工作
加热器采用恒温区间控制，即以设定温度的上、下振幅为工作区间来控制加热器的启停。当测量温度低于设定温度低于设定温度的下偏差时，加热器开始工作，当加热到测量温度高于设定温度的上偏差时，加热器停止工作，直到测量温度低于设定温度的下偏差，加热器再次开始加热，循环往复，完成温度控制。
3.3卸灰控制设计
电除尘器的卸灰方式可分为定时自动卸灰，上、下料位自动卸灰及上料位定时自动卸灰。在本系统中采用的是“高料位+时序”的控制方法，即高料位定时卸灰，周期卸灰相结合的综合方式。所谓高料位卸灰指的是当低压控制系统检测到某一上料位信号时先启动相应的卸灰装置;当器工作一定时间后，再延时一段时间停止相应的输灰联锁系统。为避免出现料位计损坏或者误报而导致电场堵灰，又加入定时周期卸灰功能，以保证系统能够进行自动卸灰。
原标题:PLC在电除尘控制系统中的应用
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LAM RESEARCH 853-031469-001 / Tylan General CMS-11S02 - MC MANOMETER
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Tylan General CDLD-02 Baratron Pressure Transducer, CDLD02, 0-2 Torr, 422299
Tylan General CM-01-10 Capacitance Diaphragm Gauge
Tylan General CMLA-11S02 Assy Manometer, DXE, CMLA1102, Farmon ID 413055
Tylan General CMLA-11S06 Output: 0-10 VDC, Range: 0-10 Torr
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Tylan General FC-260 KZ Mass Flow Controller, MFC, 200 SCCM, BCL3, 410721
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TYLAN GENERAL MDVX-100BS01, MOTOR DRIVEN THROTTLE VALVE, VEXTA PH265-02, 399799
Tylan CDLD-11S06 Capacitance Diaphragm Guage
3 Tylan Millipore CDLD-21S06 Capacitance Diaphragm Guage
24 Vented Aluminum Cap CPTHDAL6061VNT, CPTHAL6061-1724 Size 9 16-18
UCV EV80-FV-L83-EP Valve
5 Staset model precision pressure switch Open at 40 PSI, closes at 35 PSI with built in display.
2 Staset precision pressure switch. Open at 100 PSI, close at 2000 PSI
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2 new ultratech stepper crossmask 2244 s-150 OH-15-02836-02
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Ulvac GP-ISRY Vacuum Control, Direct Box 412179
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UNIT UFC-1100, CL2, 40 sccm, MFC 1100
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Unit Instruments UFC-1100 Mass Flow Controller, MFC, N2O, 10 SLPM, 410619
Unit Instruments UFC-1100 Mass Flow Controller, MFC, BCL3, 200 SLPM, 410620
Unit Instruments UFC-1100 Mass Flow Controller, MFC, BCL3, 15 SCCM, 410605
UNIT MFC, UFC-1100 N2, 1 SLM Range
Unit UFC-1100A, N2, 1 SLPM, MFC, Mass Flow Controller (Calibrated). 422515
UNIT UFC-1100A MFC Mass Flow Controller, N2, 10 SLPM, 417315
UNIT UFC-1100A, AR, 20 sccm, MFC 1100, SOFTSTART INC.
Unit Instruments UFC-1100A MFC, Mass Flow Controller, SIH4, 500 SCCM. 418730
Unit Instruments UFC-100A MFC, Mass Flow Controller, N2, 5 SLM. 418731
UNIT MFC UFC-1100A, N2, 200 SCCM gas range, 9450007600, mass flow controller
UNIT MFC UFC-1100A, N2, 50 SCCM gas range, 9548102500, mass flow controller
UNIT Instruments Mass Flow Controller UFC-1100A
UNIT MFC, UFC-1100A O2, 4 SLM Range
UNIT MFC UFC-1100A, Ar, O2, He, Hcl, lots of 10
UNIT UFC-1100A, SiH4 1 SLM, MFC 1100,
UNIT UFC-1100A, N2, 2.5 SLM, MFC 1100
UNIT UFC-1100A, O2, 10 sccm, MFC 1100
UNIT MFC UFC-1100A, O2, 10 SLM gas range, SC11-104515, mass flow controller
2 UNIT MFC UFC-1100A, O2, 10 SLM gas range, C11-68056, mass flow controller
2 UNIT MFC UFC-1100A, O2, 10 SLM gas range, C11-79828, mass flow controller
4 UNIT MFC UFC-1100A, AMAT 3030-01065 N2, 20 SCCM Gas Range
Unit MFC, UFC-1100A, He, 1.5 SLM range, S7084
Unit MFC, UFC-1100, WF6, 1 SLM range, S25TF
2 Unit MFC, UFC-1100A, 15%PH3/SIH4, 100 SCCM range
UNIT UFC-1100A MFC, HE gas, 1.5L range, 30437
UNIT UFC-1100A MFC, HE gas, 1.5L range, 18776
UNIT UFC-1100A MFC, HE gas, 3 SLM range, 9827
UNIT UFC-1100A MFC, H2 gas, 20 SLPM range, 5023
UNIT UFC-1100A MFC, H2 gas, 20 SLPM range, 0700
UNIT UFC-1100A MFC, H2 gas, 20 SLPM range, 1825
UNIT UFC-1100A MFC, H2 gas, 20 SLPM range, 9523
UNIT UFC-1100A MFC, H2 gas, 20 SLPM range, 8118
UNIT MFC UFC-1100A, H2, 500 SCCM RANGE, 399095
UNIT UFC-1100A, MFC 1100, O2 SLM 2, 399883
Unit MFC, UFC-1100A, ASH3, 100 SCCM range, S6618
Unit MFC, UFC-1100A, TMPI, 500 SCCM range
Unit MFC, UFC-1100A, AR, 0-200 SCCM
Unit MFC, UFC-1100A, B2H6, 2 SLPM range, S1558
UNIT UFC-1100A, MFC 1100A, 1100, AMAT 1100-100768, CHF3 100 SCCM, 405479
UNIT UFC-1100A, MFC 1100A, 1100, H2 10 SLM, 405481
UNIT UFC-1100A, MFC 1100A, 1100, H2 10 SLM, 405482
UNIT UFC-1100A, MFC 1100A, 1100, H2 10 SLM, 405483
UNIT UFC-1100A MFC, 5SLM N2
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2, 1 SLPM, 410621
Unit Instruments UFC-1100A Mass Flow Controller, MFC, SiH4, 200 SCCM, 410624
Unit Instruments UFC-1100A Mass Flow Controller, MFC, CHCL3, 20 SCCM, 410627
Unit Instruments UFC-1100A Mass Flow Controller, MFC, O2, 1 SLPM, 410628
Unit Instruments UFC-1100A Mass Flow Controller, MFC, O2, 400 SCCM, 410629
Unit Instruments UFC-1100A Mass Flow Controller, MFC, SF6, 40 SCCM, 410631
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2O, 10 SLPM, 410632
Unit Instruments UFC-1100A Mass Flow Controller, MFC, O2, 1 SLPM, 410633
Unit Instruments UFC-1100A Mass Flow Controller, MFC, CHCL3, 20 SCCM, 410634
Unit Instruments UFC-1100A Mass Flow Controller, MFC, CHCL3, 20 SCCM, 410635
Unit Instruments UFC-1000 Mass Flow Controller, MFC, O2, 20 SCCM, 410637
Unit Instruments UFC-1000 Mass Flow Controller, MFC, N2, 1 SLPM, 410638
Unit Instruments UFC-1100A Mass Flow Controller, MFC, BCL3, 100 SCCM, 410639
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2, 20 SLPM, 410640
Unit Instruments UFC-1100A Mass Flow Controller, MFC, BCL3, 15 SCCM, 410641
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2, 50 SCCM, 410642
Unit Instruments UFC-1100A Mass Flow Controller, MFC, BCL3, 100 SCCM, 410643
Unit Instruments UFC-1100A Mass Flow Controller, MFC, H2, 5 SLPM, 410644
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2, 100 SCCM, 410648
Unit Instruments UFC-1100A Mass Flow Controller, MFC, HE, 20 SLPM, 410650
Unit Instruments UFC-1100A Mass Flow Controller, MFC, N2, 500 SCCM, 410630
UNIT UFC-1100A MFC, 5SLM NH3
UNIT UFC-1100A MFC, 1SLM N2
UNIT MFC UFC-1100A, N2, 100 SCCM gas range, C11-80437, mass flow controller
Unit Instruments UFC-1101A Mass Flow Controller, MFC, 5 SCCM, SF6, 410719
Unit Instruments UFC-1110A Mass Flow Controller, MFC, 20 SLPM, H2, 410724
Unit Instruments UFC-1110A Mass Flow Controller, MFC, 20 SLM, N2, 410748
Unit Instruments UFC-1110A Mass Flow Controller, MFC, 20 SLPM, H2, 410749
Unit Instruments UFC-1110A Mass Flow Controller, MFC, 20 SLM, H2, 410750
Unit Instruments UFC-1110A Mass Flow Controller, MFC, 30 SLPM, N2, 410751
Unit Instruments UFC-1160A, Mass Flow Controller, MFC, 500 PSI, CL2, 50 SCCM
Unit MFC, UFC-1160A, HBR, 100 SCCM range
UNIT MFC UFC-1200A, N2, 50 SCCM gas range, 9511009300, mass flow controller
UNIT MFC, UFC-1200 O2 5 SLM
Unit Instruments UFC-1200 Mass Flow Controller, MFC, CF4, 100 SCCM, 410569
Unit Instruments UFC-1200 Mass Flow Controller, MFC, CHF3, 25 SCCM, 410570
Unit Instruments UFC-1200 Mass Flow Controller, MFC, CF4, 100 SCCM, 410571
UNIT UFC-1200A, AR 20 sccm, MFC 1661,
Unit Instruments UFC-1200A, Mass Flow Controller, MFC, CHF3, 100 SCCM, 410968
Unit Instruments UFC-1200A, Mass Flow Controller, MFC, AR, 1 SLM. 417637
Unit Instruments UFC-1200A MFC, Mass Flow Controller, AR, 100 SCCM, 420865
Unit Instruments UFC-1200A MFC, Mass Flow Controller, AR, 100 SCCM, 420866
UNIT MFC UFC-1200A, N2, 200 SCCM gas range, C11-112129, mass flow controller
UNIT MFC UFC-1200A, N2, 50 SCCM gas range, C11-77312TF, mass flow controller
UNIT MFC UFC-1200A, N2, 200 SCCM gas range, 9446030300, mass flow controller
UNIT MFC UFC-1200A, N2, 200 SCCM gas range, C11-98553, mass flow controller
UNIT MFC UFC-1200A, 20 SCCM Gas Range, C11-107850
Unit MFC, UFC-1200A, H2, 50 sccm, S7822
Unit MFC, UFC-1200A, H2, 50 SCCM range, S6037
Unit MFC, UFC-1200A, H2, 500 sccm, S1600
UNIT UFC-1200A MFC, HE gas, 500 SCCM range, 92012
UNIT UFC-1200A MFC, HE gas, 1000 SCCM range, 96249
UNIT UFC-1200A MFC, HE gas, 1000 SCCM range, 109327
UNIT UFC-1200A MFC, HE gas, 1 SLM range, 116353F
UNIT UFC-1200A MFC, H2 gas, 10 SLM range, 4960
UNIT MFC UFC-1200A, H2, 2 SLM RANGE, 399089
UNIT UFC-1200A, MFC 1200, O2 SLM 2, 399859
UNIT UFC-1200A, MFC 1200, 399869
UNIT UFC-1200A, MFC 1200A, 1200, AR 1000 SCCM, 55268F
UNIT UFC-1200A, MFC 1200A, 1200, AR 1 SLM, 51600
UNIT UFC-1200A, MFC 1200A, 1200, AR 1.5 SLM, 106591
UNIT UFC-1200A, MFC 1200A, 1200, AR 1.5 SLM, 115135
UNIT UFC-1200A, MFC 1200A, 1200, AR 1.5 SLM, 095200
Unit MFC, UFC-1200A, AR, 100 SCCM
Unit MFC, UFC-1200A, AR, 200 SCCM
UNIT UFC-1200A, MFC 1200, 1200A, 02 20 SCCM, 405462
UNIT UFC-1200A, MFC 1200, 1200A, 02 20 SCCM, 405463
UNIT UFC-1200A, MFC 1200, 1200A, 02 100 SCCM, 405464
UNIT UFC-1200A, MFC 1200, 1200A, 02 100 SCCM, 405465
UNIT UFC-1200A, MFC 1200, 1200A, 02 200 SCCM, 405466
UNIT UFC-1200A, MFC 1200, 1200A, 02 25 SCCM, 405468
UNIT UFC-1200A, MFC 1200, 1200A, 02 50 SCCM, 405469
UNIT UFC-1200A, MFC 1200, 1200A, 02 100 SCCM, 405470
UNIT UFC-1200A, MFC 1200A, 1200, AMAT 1200-101400, CHF3 100 SCCM, 405476
UNIT UFC-1200A, MFC 1200A, 1200, CHF3 100 SCCM, 405477
UNIT UFC-1200A, MFC 1200A, 1200, AMAT 1200-101399, CF4 200 SCCM, 405478
Unit Instruments UFC-1200A Mass Flow Controller, MFC, SF6, 500 SCCM, 410572
Unit Instruments UFC-1200A Mass Flow Controller, MFC, N2, 100 SCCM, 410573
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CCLF3, 100 SCCM, 410574
Unit Instruments UFC-1200A Mass Flow Controller, MFC, C2F6, 200 SCCM, 410576
Unit Instruments UFC-1200A Mass Flow Controller, MFC, C2F6, 200 SCCM, 410577
Unit Instruments UFC-1200A Mass Flow Controller, MFC, O2, 200 SCCM, 410578
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CF4, 100 SCCM, 410579
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CF4, 100 SCCM, 410579
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CF4, 80 SCCM, 410580
Unit Instruments UFC-1200A Mass Flow Controller, MFC, AR, 1000 SCCM, 410581
Unit Instruments UFC-1200A Mass Flow Controller, MFC, Ar, 200 SCCM, 410582
Unit Instruments UFC-1200A Mass Flow Controller, MFC, SF6, 200 SCCM, 410583
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CHF3, 25 SCCM, 410584
Unit Instruments UFC-1200A Mass Flow Controller, MFC, O2, 200 SCCM, 410585
Unit Instruments UFC-1200A Mass Flow Controller, MFC, N2, 100 SCCM, 410586
Unit Instruments UFC-1200A Mass Flow Controller, MFC, HBR, 300 SCCM, 410587
Unit Instruments UFC-1200A Mass Flow Controller, MFC, CF4, 80 SCCM, 410590
Unit Instruments UFC-1200A Mass Flow Controller, MFC, SF6, 500 SCCM, 410591
Unit Instruments UFC-1200A Mass Flow Controller, MFC, SiH2CL2, 20 SCCM, 410611
Unit Instruments UFC-1200A MFC, Mass Flow Controller, AR, 100 SCCM, 240865
Unit Instruments UFC-1200A MFC, Mass Flow Controller, AR, 100 SCCM, 240866
UNIT MFC, UFC-1210A, N2 gas, 20 SLM Range.
Unit Instruments UFC-1260A MFC, Mass Flow Controller, N2, 50 SCCM, 420864
UNIT MFC UFC-1260A, N2, 20 SCCM gas range, U11-2157, mass flow controller
UNIT MFC UFC-1260A, N2, 100 SCCM gas range, S97340034900, mass flow controller
UNIT MFC UFC-1260A, N2, 200 SCCM gas range, S9502022400, mass flow controller
Unit MFC, UFC-1260A, SiH2CL2, 100 sccm, S1200
UNIT UFC-1260A, MFC 1260, O2 SLM 1, AMAT 1260-100419, 399861
Unit MFC, UFC-1260A, 1%BCL3/H2, 100 SCCM range, dented
Unit Instruments UFC-1260A MFC, Mass Flow Controller, N2, 50 SCCM, 240864
Unit MFC, UFC-1268A, N2 gas, 30 SLM range
UNIT UFC-1300, MFC 1300, 1300, AR 1 SLM, 89555
UNIT UFC-1300, MFC 1300, 1300, AR 3 SLM
Unit Instruments UFC-1300 Mass Flow Controller, MFC, HE, 50 SCCM, 410595
Unit Instruments UFC-1300 Mass Flow Controller, MFC, HE, 50 SCCM, 410596
Unit Instruments UFC-1300 Mass Flow Controller, MFC, HE, 50 SCCM, 410597
Unit Instruments UFC-1300 Mass Flow Controller, MFC, HE, 50 SCCM, 410598
Unit Instruments UFC-1300 Mass Flow Controller, MFC, HE, 50 SCCM, 410599
Unit Instruments UFC-1400 Mass Flow Controller, MFC, SF6, 15 SCCM, 410715
UNIT UFC-1410N MFC, H2 gas, 30 SLM range, 5200
UNIT UFC-1410N, MFC 1410N, 1410, H2 10 SLM, 405489
Unit MFC, UFC-1500A, CF4 200 SCCM
2Unit MFC, UFC-1500A, WF6, 30 SCCM range, S90TS
Unit Instruments UFC-1500A Mass Flow Controller, MFC, SF6, 5 SCCM, 410592
Unit Instruments UFC-1500A Mass Flow Controller, MFC, SIH4, 500 SCCM, 410593
Unit Instruments UFC-1500A Mass Flow Controller, MFC, SIH4, 500 SCCM, 410594
2 UNIT MFC UFC-1501, N2, 10 SCCM Gas Range, C15-18360
UNIT MFC UFC-1501, N2, 10 SCCM RANGE, 399094
Unit Instruments UFC-1501A Mass Flow Controller, MFC, SF6, 5 SCCM, 410713
UNIT MFC UFC-1560A, N2, 100 SCCM gas range, JU58-0161, mass flow controller
UNIT MFC UFC-1560A, N2, 100 SCCM gas range, U15-0838, mass flow controller
UNIT UFC-1560A, HF, 50 sccm, MFC 1560
UNIT UFC-1560A, HF, 500 sccm, MFC 1560
UNIT UFC-1560A, HF, 500 sccm, MFC 1560
Unit UFC-1660, Ar, 200 SCCM, Mass Flow Controller Calibration. 422166
AMAT 3030-01877, MFC UFC-1660, 300 SCCM, N2, 1/4 VCR, MTL, NC, HOV, 416368
Unit Instruments UFC-1660, Mass Flow Controller, MFC, CL2, 200 SCCM, 411173
Unit Instruments UFC-1660, Mass Flow Controller, MFC, CHCL3, 50 SCCM, 411353
Unit Instruments UFC-1660, Mass Flow Controller, MFC, O2 200 SCCM, 411354
UNIT 1660 MFC UFC-1660 Ar gas, 200 SCCM range, S6500
5 Unit MFC, UFC-1660, O2 and 4 unknown gases, 500 SCCM
6 UNIT 1660 MFC, UFC-1660, O2, Ar, Cl2, BCl3, C2F6 different gas range.
5 Unit MFC, UFC-1660, (CH3O)3B, Ar, N2, C4F8, HBr, Different gas range.
5 UNIT 1660 MFC, UFC-1660, CL2, N2, SF6, Ar, BCl3, C2HF5, different gas range.
Unit MFC, UFC-1660, CF4 gas, 100 SCCM gas range, S80000
Unit MFC, UFC-1660, BF3 gas, 5 CC gas range, S2600
NEW Unit UFC-1660, HBr, 100 SCCM, CALIBRATION SHEET
Unit 1660 MFC, UFC-1660 O2, 10 SCCM
UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet
3 Unit 1660 MFC UFC-1660 Cl2 50 sccm, SiH4 200 sccm,He 200 sccm
Unit MFC, UFC-1660, He, 200 SCCM, sealed bag.
4 MFC, UNIT UFC-1660, CF4 100 SCCM, Cl2 200 SCCM, N2 20 SCCM, He 200 SCCM MFC
UNIT MFC UFC-1660, HCl gas, 100 SCCM range, S962602
UNIT 1660 MFC UFC-1660, HBr gas, 300 SCCM gas, S97500019000
UNIT UFC-1660, MFC 1660, CH4, 50 SCCM, 399831
5 Unit MFC 1660, UFC-1660 N2 100 SCCM,Ar 400 SCCM,CHF3 50 SCCM, CH2F2, (CH30) 3B
Unit 1660 MFC UFC-1660 Cl2 50 sccm, BCl3 20 sccm, N2 300 sccm, O2 20 sccm
Unit Instruments UFC-1660 Mass Flow Controller, MFC, 50 SCCM, N2, 410754
Unit Instruments UFC-1660 Mass Flow Controller, MFC, 20 SCCM, CHCL3, 410755
Unit UFC-1661, N2, 750 SCCM, MFC, Mass Flow Controller (Calibrated). 421770
NEW UNIT 1661 MFC UFC-1661, He gas, 10 SLM gas range, 1661E, NOV 22-190309-00
UNIT UFC-1661, NH3 10 SLM, MFC 1661, Novellus 22-144882-00
Unit 1661 MFC, UFC-1661, BCl3 gas, 200 SCCM range, S7600
UNIT UFC-1661, MFC 1661, SCCM N2, 399854
UNIT UFC-1661E, 5 SLM NH3, MFC 1661, Novellus 22-190305-00
UNIT UFC-180HS, MFC 180HS, CF4 1L, 399853
Unit UFC-2020, H2, 2 SLM, MFC, Mass Flow Controller Calibrated. 422167
UNIT UFC-2020, MFC 2020, Ar 30 SLM, 405471
Unit Instruments UFC-2020 Mass Flow Controller, MFC, 20 SLM, N2, 410768
Unit Instruments UFC-2020 Mass Flow Controller, MFC, 20 SLM, N2, 410769
Unit Instruments UFC-2020 Mass Flow Controller, MFC, 20 SLM, N2, 410770
UNIT UFC-2020A MFC, H2 gas, 30 SLM range, 9470
UNIT UFC-2020A, MFC 2020, H2 SLM 30, 399860
UNIT UFC-2020A, MFC 2020, H2 SLM 30, 399881
UNIT UFC-2020A, MFC 2020, H2 30 SLM, 405472
UNIT UFC-2020A, MFC 2020, AMAT 2020-100093, H2 30 SLM, 405473
UNIT UFC-2020A, MFC 2020, H2 30 SLM, 405474
UNIT UFC-2020A, MFC 2020, NH3 50 SLM, 405475
UNIT UFC-2550 MFC, N2 gas, 1 SLM range, 397750
UNIT 7000 MFC UFC-7000, H2 Gas, 1 SLM range, S9928002402
Unit UFC-8100, He, 100 SCCM, MFC, Mass Flow Controller (Calibrated). 422508
UNIT 8100 MFC C2F5 Gas, 200CC gas range, SA0402065800
Unit MFC, UFC-8160, PH3 Gas, 500 SCCM Range, S31000
Unit MFC, UFC-8160 HBr 500 SCCM
UNIT UFC-8160, NF3, SiH4, PH3, lots of 3,
Unit MFC UFC-8160 NF3 gas, 500 SCCM range, S9444042200
UNIT 8160 MFC UFC-8160, N2 gas, 1 SLM gas range, S98020038800
UNIT MFC UFC-8160, HBr gas, 500 SCCM gas range, S9538049400
UNIT 8160 Device Net MFC, CL2 gas, 100cc range, UFC-8160, 6200
UNIT 8160 Device Net MFC, BCL3 gas, 100 sccm range, UFC-8160, 7200
UNIT 8160 Device Net MFC, BCl3 gas, 200cc range, UFC-8160, 1031
UNIT 8160 Device Net MFC, N2 gas, 200cc range, UFC-8160, 9700
UNIT UFC-8160, MFC 8160, Cl2 200 SCCM, 399902
UNIT 8162 Device Net MFC, BF3 gas, 5 cc range, UFC-8162, AMAT 0030-13809
UNIT 8162 Device Net MFC, BF3 gas, 5 cc range, UFC-8162, AMAT 0030-13809
UNIT MFC UFC-8165, 10L, Gas N2, NEW in box
UNIT 8165 Device Net UFC-8165 MFC, Ar gas, 6L range, AMAT 3030-00056, SA104320
UNIT 8165 Device Net UFC-8165 MFC, NF3 gas, 3L range, AMAT 3030-12076, SA505302
UNIT 8165 Device Net UFC-8165 MFC, SiH4 gas, 400CC Range, AMAT 3030-12078
UNIT 8165 Device Net UFC-8165 MFC, NF3 gas, 3L Range, AMAT 3030-09422
UNIT 8165 Device Net UFC-8165 MFC, N2 gas, 20L Range, AMAT 3030-00057
UNIT 8165 Device Net UFC-8165 MFC, SiF4 gas, 300CC range, AMAT 3030-11007
UNIT 8165 Device Net UFC-8165 MFC, SiH4 gas, 400CC range, AMAT 3030-09425
UNIT 8165 Device Net UFC-8165 MFC, O2 gas, 100CC range, AMAT 3030-01158
UNIT 8165 Device Net UFC-8165 MFC, SiH4 gas, 200CC range, AMAT 3030-02947
UNIT 8165 Device Net UFC-8165 MFC, NH3 gas, 100CC range, AMAT 0190-08927
UNIT 8165 Device Net MFC, SiH4 gas, 5CC range, AMAT 3030-02946, UFC-8165
UNIT 8165 Device Net MFC, PH3 gas, 30CC range, AMAT 3030-09509, UFC-8165
UNIT 8165 Device Net MFC, AR gas, 1 SLM range, UFC-8165
UNIT 8165 Device Net MFC, NH3 gas, 100cc range, UFC-8165, AMAT 0190-08927
UNIT 8165 Device Net MFC, AR gas, 50cc range, UFC-8162, AMAT 3030-09426
Unit Instruments UFC-8169 MFC, Mass Flow Controller, CF4, 50Sccm, 8160. 418266
Unit MFC UFC-8561C, H2 100CC lots of 2
DeviceNet Unit MFC UFC-8565, H2 2L, SIH4 30CC lots of 2
Unit 8560 Series DeviceNet UFC-8565 O2 He Lot's of 8
UNIT UFC-8565, MFC 8565, H2 2L, AMAT 3030-11625, 399862
UNIT UFM-1100 MFC, HE gas, 6 SLM range, 9915
UNIT UFM-1100A, He, 3 SLM, MFC 1100
2 Unit MFC, UFM-9150 He, 6 SLM and 3 SLM
UNIT UFM-9150 MFC, HE gas, 6 SLM range
UNIT UFM-9150 MFC, HE gas, 6 L range
UNIT UFM-9150 MFC, HE gas, 6 SLM range, 9773, broken cover
Unit 9000 Series UFM-9660 He 6L Lot's of 3
Unit 180HS MFC CF4 1 SLM with calibration sheet
Unit Unit-1100, Ar, 50 SCCM, MFC, Mass Flow Controller (Calibrated). 399812
Lot of 2 PLG, PIN, QM, 16-18AWG, 2PT, AU,NI, 4A-1-24
UNIT MFC UPC-1300, H2, 5 SLM RANGE, 399090
2 Unit MFC, UPC-1360 He 100 sccm, UFC-1200A He 200 SCCM
Unit Instruments URS-100-5, Flow Controller. 416031
Unit Instruments URS-100-WE MFC, Controller, 117VAC, 50-60Hz, w/Key. 419877
Unit Instruments URS-40, Flow Controller, 120 AC, 50/60 Hz. 416032
UNIT MFC UFC-1210A, CF4, 10 SLPM RANGE, 399815
UNIT MFC UFC-1501A, AR, 10 SCCM RANGE, 399814
2 United Instruments 15-400FG01B oil filled 15psi pressure gauge
Universal End Point, eP-8000 Interface
UNIVERSAL FLOW MONITORS WVS2GM-2-A1ND-PM-1D, LOTS OF 2
Universal Plastics Chiller, UP033-2500-DLD
LCD Control Board
577328 relay board
BOARD CASSETTE SENSOR 17000317
PCB board 70906001 wire wrapped board with adapter
NEW KF 40 Vacuum Bellow 100993726, Assy, Hose, NW40, 20 inch MEDWALL, HP
Filter, Oxy/Mix 233278031
ASSY, PCB driver, drive PSB 500049532, AGV, BOARD, ARM(DDRV-U)
flex tube LF100 L=500
2 Jet, SS-U Jet w/Long Connect, 50225010016, 751-06-003, 14-30-06B
MAGNETRON, M200PC, 200P/1/1501, Low Frequency
PWB 64C2012 REV A.1 08344-5-A 641
PWB 64C2015 REV A ASSY 06C2016 Allen intergrated assemblies
PWB 64C2015 REV A 08344-5-B 623
PWB 64C2015 REV A ASSY 06C2016 08066-2-B 552 E100370
PWB 64C2018 REV A ASSY 06C2019 08344-7-C 24 E100370
PWB 64C2018 REV A ASSY 06C2019 0000781 425 E100370
PWB 64C2018 REV A ASSY 06C2019 08344-5-C 647 E100370
cable 038-003-505, TCP50090451346 with Direct attached SFP 0904, 2053308-4
DP/N 0J8461 DVI to VGA Adapter
Ceramic Chuck 1150-000-009, 051106-01
2 210-17046-00 Support, Blower Tube, EQS-300
24 9601168 Rev. D
26-82822-00
Cable Union 3064653-1B
NEW AMAT 3070-00078 Vacuum Bellows, KF50, NW-50, 7 inch
Assy 3780-280-0, PCB Assembly, Extender, 26X/280/28 OS/29X0 (Card Edge) 402583
Assy 3780-280-0, PCB Assembly, Extender, 26X/280/28 OS/29X0 (Card Edge) 402584
Assy 3780-280-0, PCB Assembly, Extender, 26X/280/28 OS/29X0 (Card Edge) 402585
Assy 3780-280-0, PCB Assembly, Extender, 26X/280/28 OS/29X0 (Card Edge) 402586
40082-01 Chamber lid with Omega OS137-3-V2 infrared temp sensor on kf50 flange
Aluminum Vacuum Chamber 40358-01 18"x18"x6 with Mott Diffuser
18 VCR 1/2 Inch Gasket with Retainer 4JR-9.52RE-RG-Ni-O
2 Insulator, Chuck Body 500661-00, PTFE Material
13 Assorted 512 MB memory
5 NEW Teflon Seal 2.40 OD x 1.97 ID, 70887-15 Canted Spring
7CAB9-1515-7200 Cable Assembly HD15, Male-Male, 8'
CONTROL PANEL REV. D WITH 80311-01, 1295-501 REV. A 412420
Etch Chamber Window, A16-56987A, Farmon ID 412178
Adaptor Flange with KF25 and ASA 5 inch to ASA 6.5 inch, C3095
Aluminum Vacuum chamber 17"x16"x4" Various ports 2 gas feed ports with Mott tube
3 Aluminum Vacuum Chambers, 18"x18"x6" with various ports and flanges
Bellows Assembly, 2.5" Flanges, 4.75" Long
3 New Motor control I/O boards in sealed bags, no chips
Vacuum Tube DN 100-130
Vacuum Adapter Flange DN 130
Vacuum Bellows DN 100
Fan and Heat Sink for Processor E70796-001
ELH002 Electrode Plate, Farmon ID 412537
ELH002 Electrode Plate, Farmon ID 412538
NEW KF 40 Vacuum Bellow FH-150-18-2NW, Hose, Flex NW 1.5", 2-15688702-370
HA121 Phototransistor Optical Interrupter Switch, With Connectors
Vacuum gauge controller cable, HCIG Tube beamline, P4 1B6-J2
10 HK120 Bearing, Wafer Clamp, H/C 412674
Flash I2C232 Embedded Micro Software
KF40 Foreline With Bellows
3 Flange with KF16 connection and ISO bellow flange
5 Flange with KF16 connection and ISO bellow flange
2 KF 25 Vacuum Bellow
39 KF 40 clamps
KF40 Vacuum Bellow NW-40
3 KF40 Vacuum Bellow NW-40
NEW KF40 Vacuum Bellow 08.2-6559, assy, hose, THN, NW40, 12 inch L
NEW KF40 Vacuum Bellow NW-40, 10 Inch
3 NEW KF40 Vacuum Bellow NW-40, 10 Inch QF40
4 NEW KF40 Vacuum Bellow NW-40, 10 Inch QF40
KF40 Vacuum Bellow NW-40, IM12234
KF40 Offset Foreline With Bellows
NEW KF40 Vacuum Bellow NW-40, 10 Inch, IM12234
2 NEW KF50 Vacuum Bellows NW-50, 7 inch
Nano Coulomb Meter KQ-701P
BIDIRECTIONAL MOTOR DRIVER WITH BREAKING FUNCTION
LCF 40, NW-40 Vacuum Pump Foreline Pipe
Printer port card with IDE cable and extra port connections
2 MW300-F-C and 2 MW300G-C, 300mm silicon storage case carrier
Unknown NPO3746 0632 Capacitor 50pF 15kV type61
Vacuum Flange with KF16 connection,ISO bellow flange for vacuum pump NRY12J526
New NW16 wing nut clamp
Seal CTR RING ASSY NW25 ORING
New NW25 quick clamp w/ ratchet
Vacuum Flange with KF16 connection and ISO bellow flange for vacuum pump P528003
Vacuum Flange with KF16 connection and ISO bellow flange for vacuum pump P539331
Polypropylene Water manifold assy with PPMT015, and 50DN40-G2 1/4" flange
Silicon O'ring High Temp. 1/8" dia, 32" circum,
Catch Cup for wet Etch, 3 piece
Solvent distribution tank PVDF material
12 Position gas manifold W/ Mott filters, Tescom Pneumtic valve, Nupro valve
2 Electrical vacuum feed through, 411356
25 Tooling Pin, Magnetic, 411641
16 Magnetic Tooling Pins, 3/4"x3-1/8", 411642
Magnetic tooling pin, Fork, 411643
2 AC Power supply 0-15 VOLTS
Water Manifold with flow switch
Rinse station with 2 wafer slots and 2 rinse positions on each surface
Dual Gas Manifold W/ Setra 217 Pressure switch, Tescom Iso valve, Pall Filters
USB Four Serial Converter Universal Serial Bus
AC Replacement, AC Plug/Computer Power Receptacle
50 canted springs seals
PCB Board
RF inductive coil, silver plated copper tube, water cooled.
Aluminum Vacuum Chamber labeled Thermal Test system 18"x18"x6"
Carbon motor brushes pack of 4
1 wafer handler robot end effector
TALON CLAMP LARGE 3 PRON CLAMP
CLAMP, TWO PRONG CLAMP
Class 2 Transformer Input: AC 120V, 60Hz, Output: DC 12V 500mA
VF-155-10-SF 10 inch bellow KF-40, 1.5inch X .006 inch X 10 inch QF40's
Keyed AC Switch Box
9 Rolls of Chart Recorder Paper, RD3057-RP
Water hose quick disconnect fitting
KF40 Vacuum Elbow, QF40, WW40
Arrow Heart, 6612 Locking Plug 30A 120/208V 3PH Y P
KF-40 Vacuum Tee Extended
Novellus, Vacuum Foreline with GP 275 Mini-Connection and Bellows
Bellows Vacuum KF 40 vacuum line piping, hoses Flex Tube, 80 inch, NW40
KF25, 1/2 Oring Pop Off Fitting for Cryo Pump
KF25 Weldment
KF-50 90 Degree Elbow SST
Lot of 3 KF-40 90 Degree Vacuum Foreline Elbow
KF16 90 Degree Aluminum Vacuum Foreline Elbow
KF50 to KF40 Reducer Adapter
KF40 Vacuum Bellows?
KF40 Vacuum Foreline Tee
KF40 Bellows, Vacuum Bellows
KF50 Bellows Vacuum Line
KF40 Assy Vacuum Bellows?
KF40 Heavy Assy Vacuum Bellows
KF25 Vacuum Bellows
Lot of 2 KF40 Vacuum Bellows?
Lot of 2 CFM Bodies with 9 EPDM Gaskets
2 Vacuum Pipe, Line, KF50, NW50, 12 inch length, Foreline
KF40 Vacuum Tube 3.25 Inches, NW40, QF40
KF 50 manual vacuum isolation valve
HTO Flange Inlet
6" Process Cassette, Height 5.5", 395648
6" Process Cassette, Height 4.5", 395649, 395650, 395651, 395652
6" Black Process Cassette, Height 7", 395658, 395659, 395660, 395661, 395662
Rack Assembly, with Double Ended Drawer Assembly
KF40 Vacuum Tube, Full Nipple
12" Vacuum Tube KF50
Vacuum foreline KF40 flange, 5 inch, KF-40
Unocal 76 W95100320 Carbon, A/M (1) AMM003-S55PBZZZ 406522
4 Unocal Poco AMM07531 Slit, Revolving Current Medium, 406534
Unocal Poco AMH004 Liner, H/C Analyzer #4, 411802
5 Unocal Poco AMM004 Carbon 2, Graphite, S55BPZZZ, Farmon ID 411893
US Digital Optical Kit Encoder, E4P-300-250-D-D-D-B, M004004
US Digital Optical Kit Encoder, E4P-300-250-D-D-D-B, M004004, 398605
US DIGITAL E4P-300-197-D-D-D-B, 4003-0464-02, 28PA10K385S, 9701-4048-02
US Digital Motor 212-2575-001 Rev. A W101
U.S. ELECTRICAL MOTORS, 6596-A INVERTER DUTY MOTOR
4 US Filter, Gelman Stainless Filter housing, Facility 3" piping, shutoff Valve
4 US Filter Stainless Filter housing, DI water Facility 3" piping, shutoff Valve
10 new filter cartridges, Sealed
US Filter T93011147016, Filter Cartridge, PFA, 0.1 Micron, Filterite. 419782
lot of 12, US Filter VFSH020-04M3S Filter cartridge
3910-112022, US filter T910567-000, air filter separator canister
Filter, US Filter USF Cold filters
US Robotics 0266, Sportster PCB, 406166
US Robotics 000840-06 33.6 ISA Internal Data/Fax Modem
US Robotics 005687-53 ISA Internal Modem Card
USB CD Drive with power supply
Ushino DDL 20V150W, Halogen Projector Lamp, 20V, 150W. 419965
Ushio America 1001820, Lamp Module, Bulb, 1000W Clear Lamp, 120V. Farmon I.D. 412742
Ushio DDL 20V150W, Halogen Projector Lamp 20V, 150W. 419967
Ushio DDL 20V150W, Halogen Projector Lamp 20V, 150W. 419968
USHIO 6900-243201 Halogen Projector lamp
7 Ushio 120V-500W EVRSCREW Halogen Lamp, Micron 81-06239, 406586
Ushio GTL3, Germicidal Lamp, Mercury, AMAT 1010-01291, 409986
2 Ushio JCD120V-800WB Lamp, Bulb, 407995
Ushio JCV120V-750WBH1 Lamp, Dual Hanger, 8IN, 1001816
Ushio JIH 120V-600WB2 Halogen Lamp 402491
40 Ushio JIH 120V-600WB2 Halogen Lamp 402497
10 Ushio JIH 120V-600WB2 Halogen Lamp 402499
Ushio QIH240-1600/S, Quartz, Halogen, Infrared, Lamp 402653
Ushio Type 120V-500W EHD Halogen Lamp 422752
Ushio USH-1000FC, BH3-3178-000, High Pressure Mercury Lamp
Ushio USH-1002FN Super High Pressure Mercury Lamp, 414760
Ushio 120V-600W DYS Halogen Lamp
Ushio 240V-1000W FEP Halogen Lamp
USTC THERMAL TOOL CHILLER USTX 103910 CHILLER, MC150E1FB1/2P2
USTC THERMAL TOOL CHILLER USTX 103910 CHILLER, MC150E1FB1/2P2, S20087R0211
2 USTC Water Chiler Hose w/ Temperature Control Plate for Chip Qualify 10134UH
USTC 205000LC Chiller with hoses, 20A @ 208-230VAC, 205000LC-060, 398508
USTC 205000LC Chiller, S086, with hoses seen in the picture, 422702
USTC 2402-5FWC2A2D Thermal Control System
USTC 2412-5FWC1A2D Thermal Control System
USTC 103320 Chiller, S123, and chiller hoses seen in the pictures
USTC 103310 Chiller, S105, with hoses seen in the picture
USTC Model 103710 Chiller, S19956
USTC Chiller, USTC-103320b-126 Chiller, USTC-103320b-126 and hoses seen. 395726
USTC Chiller, USTC-205000LC Chiller, USTC-20500LC-079 and hoses seen?
USTC Chiller, USTC-205000LC Chiller, USTC-20500LC-081 and hoses seen
USTC Chiller, USTC-205000LC Chiller, USTC-20500LC-073 and hoses seen
USTC Chiller, USTC-205000LC-052, USTC-205000LC-052 and hoses seen, 395733
USTC 205000LC Chiller, S094 and hoses seen in the picture
USTC Chiller, USTC-5000PC Chiller, USTC-5000PC and hoses seen, 395728
USTC Chiller, USTC-5000PC Chiller, USTC-5000PC and hoses seen, 395731
USTC Chiller, USTC-5000PC-032, USTC-5000PC-032 and hoses seen, 395745
UTSC 205000LC Chiller, 205000LC082 w/ Hoses, 422767
VAC PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 411018
VAC PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 411022
100001419 KIT, Bellows Assy, NW40
FLG, KF, Blank-Off NW50.304 100311706
Kit, IL/NIT/BWCVD, Throttle, Valve 233067803
233270097 Cup, Outer, Feedthru, IMP
4 copper standoffs, vented, 506227-00
9 insulators vented for vacuum system 507689-00 price for all 9 uits
BELLOWS CYLINDER 80*60STMV lot's of 2
Vacuum chamber with 2 spare clamp rings, aluminum
Lot of 4 Misc, KF40 Clamps
Lot of 5 misc. KF 40 Clamps
KF 40 3" long extension tube , Stainless KF40
KF 40 6" long extension tube, Stainless KF40
KF 40 5.5" long extension tube with 1/4 in VCR, Stainless KF40
KF 40 weldment flange KF40
New Vacuum Fitting Reducing Tee NW50, SST, lot's 3
Gasline connection 3way and gasflow meter
Water cooled feed through with insulated connector and metal seal. 329442
vacuum chamber Flange, Cryo Turbo, Gate valve interface
ISO 80 to KF50 Bellow, 10 inch
3 AMP-D-0645-139 Vacuum chamber rings with radiation o'rings, anodized aluminum
Exhaust Vacuum Flange 215-12194-00, REV B, TEI 27-06
MKS 250B throttle valve controller with vacuum general 80-6B pressure display S1
Vacuum General AC-2 AdapTorr Vacuum Controller, 422242
Vacuum General AC-2 AdapTorr Vacuum Controller, 422243
Vacuum General CLMA-21S06 100 Torr Capacitance Diaphragm Gauge
Vacuum General CLMB-21S06 100 Torr Pressure Transducer
Vacuum general pressure transducer CML-21, 100 TORR
Vacuum General Pressure transducer CMLA-21S06, 100 TORR
Vacuum General CMLB-11 Pressure Transducer, 10 Torr, +/- 15 VDC, 410300
Vacuum General CMT-01S02 Pressure Transducer, parts only
Vacuum general MDV-100B Throttle valve, Stepping motor M061-FD-301
UltraFlo Vacuum General UC2-11, O2 and N2 10 SCCM
UltraFlo Vacuum General UC2-11, O2 100 SCCM
UltraGlo vacuum general UV2-11 & UC2-31S01, N2, 10 SCCM and 1 SLM
Vacuum TEE with 3 12 inch ASA Flanges
Vai SMA-EX1 Vacuum Control Center, Turns on
Valex E31X1-1/2X3/4X104 Reducer HP BW, 412764
Valex E7RX1/2X1/4X401, TEE HP BW, 402300
Valin NV6-6-3 Valve, 3/8" Teflon Needle, 411632
New Varian Cold Cathode vacuum gauge w/ nw25 port
5 Varian 842 vacuum ionization gauge, 115/230 volts
VARIAN WAVEFORM GEN III ASSY 01907110 BOARD
4 new VARIAN 2235016 valve solenoid valve 5080GB
Varian VALVE solenoid 2235019 Humphrey X85
varian 2235025 solenoid valve 52 VALVE 52N8DGB
VARIAN 2235025 valve solenoid 52 vavle 52N8D6B
2 new varian 2520020 boot neoprene
2 new varian 2541547 O-ring spec
varian 2560019 Manual gas isolation valve
Varian 2560142 Valve, 412163
2 new varian RT angle drive 2595022
varian 2595160 gauge, 0-15, PSL, 2" display, 1/8" port
varian filter INLINR 60 MIC 2700039 Nupro gas filter
2 Varian 2700103 Filter, VCR-Inline, 329077
Varian 2750004, Filter, Powerline, 3PH, SAE Y60B, EMI. 420069
Varian 2750004, Filter, Powerline, 3PH, SAE Y60B, EMI. 420070
Varian 2750004, Filter, Powerline, 3PH, SAE Y60B, EMI. 420071
Varian 2850098, Ring, Assembly, Control, AL. 418710
Varian 2850098 Seal, Center Assembly, NW250, Ring, IC-250-AV, Q3627-312, 423286
2 new varian 3136342 IC RETRIGGERABLE
Varian 03811001 PC Assy P.S Scan Monitor ECI-C-6, 325745093023, Farmon ID 412038
varian dial 03929001
PSI module, single, Looks very clean, maybe new or rebuilt
VARIAN 04185001, TC CONTROL PCB ASSY, 325745113054, 12004184, 12004185 402510
Varian 04185001, Assembly TC Control, PCB, Acopian D15-03 Power Module, 406439
Varian 04185001 Assembly TC Control PCB, 325745014058, Mach 12004184, 420343
Varian 04298001 , Feed Thru and Lens Assembly
Varian 04298001 , Feed Thru and Lens Assembly
Varian 4500099 Relay, Thermal Load, PCB, Cox Engineering 35074, 414757
Varian 4500113 Control Relay 412238
Varian 4500114 Relay 3N01-Inc Cont, Telemecanique CA2-EN131F 412730
3 Varian 4500133, Thermal Overload Relay, 3PH, Square D, Case 9065. 420160
Varian 4751002, Potentiometer, Lin, MF, 1/4 W/IN, 2, Vernitron 83740A. 418410
New Varian P/N 4752005
Varian 4758021 Motorized Potentiometer, Dual, 10T, ETI, MC5179B-2K/2K, 421552
2 new varian 4830038 bridge rectifiers
Varian 5620005, XFMR, 415/480V, IN, 24V. 423120
Varian 5620005, XFMR, 415/480V, IN, 24V. 423128
Varian 5705004 Vacuum Tube, 8 Pin, National Electronics 6BK4C / 6EL4A, 420128
Varian 6060025 Cord, Fan 402269
Varian 0006100363 D.C. Cable for TEMP/HUMI, 420249
Varian 06887001 Assembly Motor Drive Control
20 new varian 07136001 filament signet 37-7136
varian support plate 07140001
Varian 07266001, Water Feed Thru 402285
2 new varian 07268001 rod connector
Varian 07485001 Gear Carriage Worm 413157
2 new varian 07476001 roller ball screw
2 new varian gear carriage worm 07485001
3 new varian 07514001 platen gear mod
2 new varian 07519001 light rod
2 new varian 07562001 insulating spacer
Varian 07742001 PCB, Power Fail Assy, D12007742, Farmon ID 412022
Varian 07742001 PCB, Power Fail Assy, D12007742, Farmon ID 412023
Varian 07742001 PCB, Power Fail Assy, D12007742, Farmon ID 412024
Varian 07742001 PCB, Power Fail Assy, D12007742, Farmon ID 412025
6 new varian 07895001 shunt bars, 14 degree field
varian 07898001 pump resistor assy
Varian 08180001 feed thru, gear hub Phenol
Varian 08285001 PCB Assy Arc Preamp, D12008285, Mach D12008573, 415610
Varian shield short 09619001
4 new shield endplate botE17037063
Varian 0470908301 Fixture, Lift, Metal Bar Components, 407029
Varian 0068356001 Bellows Assy 3290 VP, 412193
Varian 0068432000, Shield. 419788
Varian 0068612400 Ion Gauge Tube, 075, L.L., Novellus 00-686124-00, 420434
Varian 0068612400 Ion Gauge, Tube, L.L., 075, Novellus 00-686124-00, 422682
Varian 70278001, Moisture Detector 416985
3 new varian 70575001 housing vaporizer
End station vacuum controller
Wayflow logic PCB Assy
varian 71020001 wafer slide plate as
Varian 101649001 Aperture, Source Exit, Panel, 101649-1, 420392
Varian 102596100 Rev.4, Regen Logic PCB. 418551
Varian 102698001 Rev.6, Plate, Actuator. 419698
Varian 102698001 Rev.6, Plate, Actuator. 419699
Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420199
Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420200
Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420202
4 Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420206
Varian 104057001, Pick Mold Assembly. 419954
Varian 104057001, Pick Mold Assembly. 419955
Varian 106233001, Motor, Assembly, Source Drive Motor Technology 121A326. 419890
Varian 107739001 PCB Assy, Scanner Drive Amp, PCB Machining D107739001, 411777
Varian 107739001 PCB Assy, Scanner Drive Amp, PCB Machining D107739001, 411778
Varian 108094002 Opto Isolator assy.
Varian 108103001 Rev.A, 173731023005, PCB Dual Opt Sense Cassette. Farmon I.D. 412512
Varian 108728001 Fiber Optic Rec. Assembly, 410200
Varian 108967001 PCB, Assy, H/VPWR Sup, Farmon ID 412480
Varian 109132001, Linear Scale Mod, PCB Assy, Farmon ID 412008
Varian 111003001 Rev.4, Insert Assembly, Beamgate. 418626
Varian 111003001 Insert Assembly, Beamgate, 111003-1, 419060
Varian 111141001, 688594, 950575, Bias, 1st Aperture. 414436
Lot of 3, couplings with flange
Varian 111537001 Graphite Ground Electrode, 329071
Varian 111537001 Graphite Ground Electrode, 329126
Varian 111537001, Graphite Ground, Electrode 402190
Varian 111539001, Plate MTG Support, Panel. 414880
8 Varian 112387002 Clamp, Strap, Filament, Silver Plated, 233485034
Varian 112415001 Bushing, Feedthru
Varian 112415001 Bushing Feedthru ANO Bundle
Varian 112603001, Brazement Setup Cup. 419974
Varian 112603001, Brazement Setup Cup. 419975
Varian 112603001, Brazement Setup Cup. 419976
Varian 112603001, Brazement Setup Cup. 419977
Varian 112603001, Brazement Setup Cup. 419978
Varian 112606001 Collimator, Laser DIO Revision 6 412686
Varian 112711001 Shield Aperture 414853
VARIAN 112722001 CARRUAGE WAFER LIFT 402791
Varian 113135001 Sensor Assembly, Reflect, 421630
Varian 113522001 Shorting Bar Assembly, EN, 422642
Varian 113837001 Plate, Insulator, ARC Chamber, 411837
Varian 113940001, 1902, Arc Cham Base Plate. 419112
Varian 113940001 Arc Chamber Base Plate, 406499
Varian 113940001 Arc Chamber Base Plate, 418477
Varian 113945001, Plate Chamber Front Arc, V2. 419947
Varian 0230000201, Electro Magnetic Break. Farmon I.D. 412875
VARIAN 0240053531 REGULATOR Farmon ID 406024
Varian 0240053531, SMC Precision Regulator, IR202, Valve. 416627
Varian 0240065161 Filter, 10 Micron, 915-9.52-10, 420807
Varian 0310002711 Breaker EG32A/20-30MA-TL, Fuji Electric, 412729
Varian 0310002711, Breaker, EG32A/20-30MA-TL, Fuji Electric. 414882
Varian 0313020000, REPL Absorber Assembly, Ebara 0313-02005. 419785
Varian 0313020000, REPL Absorber Assembly, Ebara 0313-02005. 419786
2 Varian 0372002021, Matsushita, Relay Y and Z, 250V AC, P6221, HG2-DC12. 329197
VARIAN 0400001861 ORIENTAL MOTOR VEXTA MOTOR STEPPING UPH566-A-A19 407375
Varian 0470575801 Rod, Heater, Center, 420344
Varian 0470677001 Cable Assembly, RS232, 6FT, Novellus 04-706770-01, 419840
VARIAN 0471017604 TIMING BELT 400GR 402776
Varian 0471663004 Shield, Dep Q SRC, 406406
Varian 0471663004 Shield, Dep Q SRC, 406332
Varian 0471663004 Shield, Dep Q SRC, 406333
Varian 0471854701 Shield, Lower HV, Poped VL, 405868
Varian 0471880301 Plate 6" Ceramic, Novellus 04-718803-01 Mounting, Ring, 420708
Varian 0471880301 Plate 6" Ceramic, Novellus 04-718803-01 Mounting, Ring, 420710
Varian 0471882301 Clamp Ring, 6" Wing FL, 406152
VARIAN 0471884902 P3C, M2I, CLAMP, SPRING RELEASE 401870
VARIAN 0471884902 P3C, M2I, CLAMP, SPRING RELEASE 401871
Varian 0471949904 Cable, 25 Foot Network, 420882
VARIAN 0472158701 NOVELLUS 6" CLAMP AY 93C 401887
Varian 1162201412 Screw, Set Cup, PT S/S, 410201
Varian 1181000031 PCB DC411A, Pyrogenic Controller Board, 420393
Varian 2083970000 Fan, Sprite SU2A5, 115V, 50/60 Hz, 420173
Varian 2799967100 Air Cylinder, 414780
Varian 3800000602 Power Supply, PCB, 380-000060-2, Farmon ID 413058
Varian 6260006700, 8420, SN74LS38N, IC LSTTL QUAD NAND. 416642
Variance 7292033800 Hamlin, HE721R0510, Relay, Reed, Dil, SPCO, 5PCO, 5VDC
Varian 8102200975 Rev.*, TEL, Chamber Bottom Ring. 419683
Varian 8102201132 Exhaust Plate, 418479
VARIAN 8102203471 AIR LOCK COVER 407366
Varian 8104207921 Shaft Seal Holder, 410198
Varian 8104218031 Collar 421609
Varian 8104224451, Window. 420049
2 Varian 8104224451, Window. 420050
Varian 8800200991 Pressure Switch CE10-223, 411803
Varian 8800201001 Pressure Switch, 414781
Varian 8800201691 Cylinder Valve, Fujikin Type NC Valve, Farmon ID 413155
Varian 81125966001 Baffle, 200 Liter, Ebra, 421602
2 new AMAT 3700-02433 ORING, O-RING compound V0747
Varian Turbo TV70D, 9699361K, with controller SQ158,
Varian X06888001 Assembly Motor Drive Control, 5 RPM
VARIAN 000PQF2781 POWER DIST (MAIN) PANEL 4 OUTLET DISTRIBUTION 406775
VARIAN 000PQF2781 POWER DIST (MAIN) PANEL 4 OUTLET DISTRIBUTION 406776
Varian 000PQF2782 Power Distribution (Sub), Panel, Relay, 2 Outlet, 420896
Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 322292
Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 409815
Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 409815
4 Varian 023-1009251 Timing Belt, B10CS3MY60, 406478
Varian 07737001 Rev.G, T.C. Amplifier Board, PCB
Varian 04073-1, Accel/Decel MDL-2/10, Power Supply. Farmon I.D. 412977
Varian 04-709565-01 Plate, Mounting, 6", Cerm Ring 412966
2 Varian Systems 04-709953-08 Rev.AP, Distribution, Panel, Plate. 417098
Scanner pre amp PCB D12004719-3
VARIAN assy 04-719311-03 Process Heater Interlock
VARIAN assy 04-719317-04 RF Interface Controller
10 varian 04764001 plate resistor
Varian 0531-F0472-301 Thermocouple Vacuum Gauge, Type 0531, 409987
Varian 0564-K2500-303 Ionization Gauge, 420638
Varian 0571-K2471-307, Ion Gauge Tube Vacuum Filament. 419494
3 new AMAT varian 07092001 flange source mount
Source mounting flange
Fitting A-07139001, 07139-001
Varian 07563001 Rotary drive Shaft
2 new varian bushing 07572-001
PCB Assy, 07630-001
Varian 07646-001 Wayflow interconnect PCB board, no components, 07646001
2 Varian 07737001 assy. TC amplifier PCB
2 new varian 07974-001 bumper wafer guide
Gating control PCB Assy, Looks new, sell as , may have bent pins or components due to storage /handling
16 bit, optic isolator PCB, looks new, sell as
Meter, filament amps, Compton Modutec
Filament Preamp PCB Assy, 08290-001
varian filament feed rod 08485-001
2 Varian 10-46100-01, Lucas Ledex 9245 H-15064-029, Drop Rod Assembly. Farmon I.D. 413375
Varian 11271100-1 Rev.A, K31-H01, 527424, Shield, Aperture. 419389
Varian 112711001-1 Rev.A, Shield Aperture 527424. 418409
Varian 11A0291 Assembly Feed Thru Block 406523
API-437 bracket 233-3055-07, cleaned
Varian Turbo-V 300HT Macro Torr, TV Pump 9699037S008. 400939
Varian Ion pump Control module 322 4050
varian IC retriggerabl347AJ 3136347
Varian 36-848436-903, Pulse Motor Driver, E P.C Board. Farmon I.D. 413374
121 new signet 37-8883 insulator filament
Varian 381-639332-4 Map Terminal Board, 308-639332-4, 411847
Varian 381-639332-6 Map Terminal Board, 308-639332-5, 411848
Varian 381-639472-2 PCB, TVME 68 KSV BRDON BRD, 411666
Varian 3SN0102100 Spring Balancer, Farmon ID 413048
3 new retaining cup 42781-00
Varian 42781-00, Predestal, Retaining Cup. 420149
Varian 509264-00 Type 0531 Vacuum Gauge, TC NW16, KF16 Flange
3 Varian 5TW0073605 Plug, 1/8, SUS, 410206
Varian 629-5001 Ion Pump controller
Varian 683630-02 RF Match, 683631-02, 411310
Varian Source Control Assembly, R-F Source, 698633-01
VARIAN 40301-007776 PCB VERTICAL Y SCAN GENERATOR ASSY D-F4685002 406443
Varian 810-320687-1, Top Cover, TEL. 419684
Varian 810-320687-1, Top Cover, TEL. 419685
Varian Multi-Vac Controller 929.6003S00 110 Volt, 12A, 50-60 Hz
Varian 9296004S001 MultiVac Dual Ion Pump Controller w/Cables and Keys, 414830
Varian 953-5014 Copper Gasket, Seal, CF Conflat Flange, 418827
Varian 953-5017, 6 3/4" Copper Sealing Ring for Conflat 402185
NEW Varian 969-9306, E37000103, Screem, Inlet
Varian 9699361K Turbo Pump w/ SQ158 Contoller, 422570
Varian 9699546S002 Turbo-V 700 ICE Turbo Vacuum Pump Controller, 423285
Varian 990-DCLD leak detector Nuvac MRP-201 ELC pump
2 Varian 995-22000 Ceramic Ring, VAR995-22000
Varian BB95456279, Bearing 413390
Varian IIS C-F2518001 Thermocouple Gauge Tube/Vacuum 413282
Varian D-101885001, PCB Assembly, Source RDAC Interconnect, D-101886001. 420143
Acopian D15-15A, Miniature AC to DC Power Supply, Varian D108481001 PCB. 418411
Varian D-12004145 Precision Deadband AMP Assembly, 408551
Varian D12008285 Arc Preamp Assy, PCB Board, 414751
Varian D-F5428001 Digital Main Control Board, PCB 413288
Varian D-F5428001 Digital Main Control Board, PCB, Farmon ID 413069
VARIAN ASSEMBLY D-H0117001, MACH D-H0118001, PARALLEL I/O & A/D INTERFACE 402490
Varian D-H0535003 PCB Assy, Target Select, PCB Mach D-H0536003, Farmon 413103
Varian E11021661, Hose, Metal, 20" LG, SS Hose, ME, NW25, KF25, Bellow. 419418
Varian E11045400 Rev.1, Bracket Assembly ADJ. 419556
Varian E11058939 Purge Kit, Balzer. 423280
Varian E12003670 Gear, 422168
Varian E15000100 Electrode Manipulator Assy, PCB, Farmon ID 412035
Varian E15000150 Multi Proteus Signal Conditioner Assy, Sensor, PCB, 412010
Varian E15000150 Multi Proteus Signal Conditioner Assy, Sensor, PCB 412013
Varian E15000150 Rev.B, Proteus Signal Conditioner, Ion Implants Systems
Varian E15000370, ASM 14000370 Rev.A1B, Board w/ Cable, PCB. Farmon I.D. 412517
Varian Extrion, E15000420, Linear Motor Extender, EDAC 305-056-520-202, 406095
Varian E15000560 Trek Controller, PCB Assembly, E14000560, 411021
Varian E16005920 Cable Assembly, Scangen Kit 402268
Varian E160311760 Harness, EXHT, Leak, Interconnect, 414737
?Varian E17014700 Source-Gas FeedThru?
Varian E17014860 Source-Water Manifold, Farmon ID 412519
Varian E17014860 Source-Water Manifold, Farmon ID 412520
Varian E17014860 Source-Water Manifold, Farmon ID 412521
Varian E17026130 Rev.1, Assorted R.H. Bottle Tubing. 419957
Varian E17026130 Rev.1, Assorted R.H. Bottle Tubing. 419958
Varian E17026160, L.H. Bottle Tube GB. 419951
Varian E17026160, L.H. Bottle Tube GB. 419952
Varian E17026553 Rev.A, Electrode Ground, Plate. Farmon I.D. 412907
Varian E17026680, Graph Scan Ground Plate for Varian E220/E500 Ion Imp. 419175
Varian E17028530 Multi-Grapht Liner, 420389
2 Varian E17033300-3, 332857, Plate SPT Aperture, Panel. Farmon I.D. 412710
Varian E17082250-1 RF Latch Rack, 419990
Varian E17036990 Tungsten Fillament, Bernas E220/500 C.M. Inc E-17036990, 422833
4 new E17043060 spool lip seal wafer lift
Varian E17048720 Feedthru Assembly 419748
Varian E17048800 Spacer Filament Clamps 414889
Varian E17060430, Post, Upper Filament. 423127
Varian E17066291, Plate, End Plate, Arc Chamber Blanket. 418813
10 Varian E17066300, Shield, Top, End plate. 329175
Varian E17069340 Filament, Bernas, Viision, 422194
Varian E17082250-1 Bell Jar Shim, 419104
NEW VARIAN E17085430, Parker 43800232 veriflo valve 102620, 928MAOPSTST.75
NEW VARIAN E17085430, Parker 43800232 veriflo valve 100320, 928MAOPSTS1.75
Varian E17092030, Insulator, Suppression Magnet. 420055
Varian E17092030, Insulator, Suppression Magnet. 420091
VARIAN E17093140 PLATE, 2ND, RECT ELEC. (SN S524084I)
Varian E17132320 Repeller Nut, 422221
Varian E18000306, Roplat Clutch Tool 402873
VARIAN E18001310 PICK ALIGNMENT PLATE 402826
Varian E19000690, Balzers Vent Valve, TSF 010, PM Z01 017, 110V, 60Hz. Farmon I.D. 412495
Varian E37000093 (275203), Tube, Convect, Pipe, Gauge. Farmon I.D. 413489, 413490, 413491, 413492
Varian E-E15001431, Analog Control PCB Subassembly 413338
3 new AMAT varian F08235001 mounting cup
6 varian F183001 graphite aperture plate
Varian F2189001 Wire Harness Assembly Gas Box, 419930
varian F2687001 plate mounting cooled
varian F2696001 plate front aperture
2 new F2907001 PCB assy. data logger pre scale, ECI-C-6 94V1
2 varian F4578001 faraday bias
Varian F4681002 horizontal scan PCB
Varian F4681002 Horizontal X Scan Generator, PCB, D-IT0700002 w/ E15001560 Board
Varian F4681002 Horizontal X Scan Generator, PCB, D-H0700002, Farmon ID 412507
Varian F4681002 Horizontal X Scan Generator, PCB, D-H0700002, Farmon ID 412508
Beam Scan PCB
Varian F4685002, Assy D-F4685002, Vertical Y Scan Generator, PCB, 406203
Varian F4685002, Vertical Y Scan Generator, Beam Scan PCB Assy, D-F4685002
Beam Scan PCB
2 F4980001 reflectors or shields
TC gauge controller
Varian F5183001 Aperture, Horizontal Entrance, Farmon ID 412571
F5185001 shield horizontal aperture
8 new F5205001 feed though wire
Varian G15-00022 TFS Miscellaneous Interface PCB, G14-00022, 402560