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    产品型号MS767的Datasheet PDF文件预览

    MS767  
    PRESSURE SENSOR DIE (0-7 BAR)  
    • 0 to 700 kPa range (7 bar or 102 PSI)  
    • Absolute pressure sensors  
    • RoHS-compatible & Pb-free1  
    DESCRIPTION  
    The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted  
    under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an  
    absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference  
    pressure.  
    FEATURES  
    •
    •
    •
    Uncompensated pressure sensor die  
    Output Span 392mV @ 5V  
    Temperature Range -40°…+125°C  
    •
    •
    •
    Linearity 0.15% (typical)  
    Die Size 1.72 x 1.58mm  
    Low Cost, High reliability  
    APPLICATION  
    •
    •
    •
    For absolute pressure sensor systems  
    Tire pressure measurements  
    Electronic scales  
    ELECTRICAL CONNECTIONS  
    Positive output for pressure applied topside  
    Vs+  
    EPI  
    Vs+ : Supply voltage of Wheatstone bridge  
    Epi : Connection of epitaxial layer (membrane)  
    Out- : Negative output  
    Out+  
    Out-  
    Out+ : Positive output  
    GND1 : Ground  
    GND2 : Ground  
    GND1  
    GND2  
    1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans  
    the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).  
    DA767_007.doc  
    August 30th, 2005  
    1/4  
    00000767356  
    ECN 797  
    PAD OUT  
    Vs+  
    Epi  
    Out-  
    Important remarks:  
    As the sensing elements are diffused resistances, the voltage  
    applied on the ground pads (GND1 and GND2) has to be lower  
    than the voltage applied on supply voltage pad (Vs+).  
    The epitaxial layer is connected to the Vs+ pin on the die  
    Out+  
    GND1 GND2  
    LAYOUT  
    DA767_007.doc  
    August 30th, 2005  
    2/4  
    00000767356  
    ECN 797  
    FULL SCALE PRESSURE  
    Inches  
    H2O  
    kPa  
    bar  
    mbar  
    PSI  
    atm  
    mm Hg  
    m H2O  
    700  
    7
    7000  
    102  
    6.9  
    5250  
    71  
    2810  
    ABSOLUTE MAXIMUM RATINGS  
    Parameter  
    Symbol  
    VS+  
    Conditions  
    Min  
    Max  
    20  
    Unit  
    Supply voltage  
    Storage temperature  
    Pressure overload  
    Ta = 25 oC  
    V
    oC  
    TS  
    -40  
    +150  
    35  
    Bar  
    ELECTRICAL CHARACTERISTICS  
    (Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )  
    Parameter  
    Min  
    0
    Typ  
    Max  
    7
    Unit  
    Bar  
    Notes  
    Operating Pressure Range  
    Operating Temperature Range  
    Bridge Resistance  
    Full-scale span (FS)  
    Zero Pressure Offset  
    Linearity  
    -40  
    3.0  
    322  
    -40  
    125  
    3.8  
    462  
    40  
    °C  
    3.4  
    392  
    0
    kΩ  
    mV  
    mV  
    % FS  
    ± 0.15  
    ± 0.4  
    1
    2
    Temperature Coefficient of Resistance  
    + 2400  
    - 1500  
    - 80  
    + 2800  
    - 1900  
    + 3300  
    - 2300  
    + 80  
    ppm/°C  
    ppm/°C  
    µV/°C  
    Span  
    Offset  
    Pressure Hysteresis  
    Repeatability  
    ± 0.05  
    ± 0.1  
    ± 0.15  
    ± 0.2  
    0.3  
    % FS  
    % FS  
    % FS  
    3
    4
    5
    Temperature Hysteresis  
    NOTES  
    1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar).  
    2) Slope of the endpoint straight line from 25°C to 60°C.  
    3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or  
    maximum rated pressure, at 25°C.  
    4) Same as 3) after 10 pressure cycles  
    5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.  
    DA767_007.doc  
    August 30th, 2005  
    3/4  
    00000767356  
    ECN 797  
    PICKING TOOLS  
    The MS767 sensors have a sensitive membrane (0.5 x 0.5 mm) the sensor dice outer diameter is:  
    1.62 x 1.48 mm. The pick and place tool has to be of a soft material as rubber (Hardness 78-97 Shore A). Its  
    external size must fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful  
    test where done with some tools of SPT (see SPT drawing and references bellow).  
    SPT references  
    RTR-A1-060x060  
    External dimension  
    Internal dimensions  
    TL & TW: 0.06 inch /1.52 mm  
    ∅H: 0.035 inch / 0.89 mm  
    ORDERING INFORMATION  
    Product Code  
    Product  
    Art.-Nr.  
    76710025  
    76710022  
    MS767A-0.5  
    MS767A-0.2  
    700 kPa Absolute Pressure Sensor with Pyrex™ 0.5 mm thick (standard)  
    700 kPa Absolute Pressure Sensor with Pyrex™ 0.2 mm thick  
    The MS767 dice are supplied sawn on blue foil, mounted on plastic rings  
    FACTORY CONTACTS  
    Intersema Sensoric SA  
    Ch. Chapons-des-Prés 11  
    CH-2022 BEVAIX  
    Tel. 032 847 9550  
    Tel. Int. +41 32 847 9550  
    Telefax +41 32 847 9569  
    e-mail:  
    SWITZERLAND  
    http://www.intersema.ch  
    NOTICE  
    Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to  
    supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license  
    under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent  
    infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such  
    applications will be suitable for the use specified without further testing or modification.  
    DA767_007.doc  
    August 30th, 2005  
    4/4  
    00000767356  
    ECN 797  
    配单直通车
    MS76502A-25JC产品参数
    型号:MS76502A-25JC
    是否无铅： 含铅
    是否Rohs认证： 不符合
    生命周期：Obsolete
    零件包装代码：LCC
    包装说明：QCCJ, LDCC52,.8SQ
    针数：52
    Reach Compliance Code：unknown
    ECCN代码：EAR99
    HTS代码：8542.32.00.71
    风险等级：5.92
    最长访问时间：20 ns
    其他特性：SINGLE ARRAY; PORTA/PORTB:16/8 OR 16/16; PARITY GENERATOR/CHECKER
    最大时钟频率 (fCLK)：25 MHz
    周期时间：40 ns
    JESD-30 代码：S-PQCC-J52
    JESD-609代码：e0
    长度：19.05 mm
    内存密度：4096 bit
    内存集成电路类型：BI-DIRECTIONAL FIFO
    内存宽度：16
    功能数量：1
    端子数量：52
    字数：256 words
    字数代码：256
    工作模式：ASYNCHRONOUS
    最高工作温度：70 °C
    最低工作温度：
    组织：256X16
    可输出：YES
    封装主体材料：PLASTIC/EPOXY
    封装代码：QCCJ
    封装等效代码：LDCC52,.8SQ
    封装形状：SQUARE
    封装形式：CHIP CARRIER
    峰值回流温度（摄氏度）：NOT SPECIFIED
    电源：5 V
    认证状态：Not Qualified
    座面最大高度：4.82 mm
    子类别：FIFOs
    最大压摆率：0.075 mA
    最大供电电压 (Vsup)：5.5 V
    最小供电电压 (Vsup)：4.5 V
    标称供电电压 (Vsup)：5 V
    表面贴装：YES
    技术：CMOS
    温度等级：COMMERCIAL
    端子面层：Tin/Lead (Sn/Pb)
    端子形式：J BEND
    端子节距：1.27 mm
    端子位置：QUAD
    处于峰值回流温度下的最长时间：NOT SPECIFIED
    宽度：19.05 mm
    Base Number Matches：1
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