V
S
Sensing
Element
Thin Film
Temperature
Compensation
and Gain
Stage # 1
Gain Stage # 2
and Ground
Reference
Shift Circuitry
V
OUT
GND
Pins 1 and 5 through 8 are NO CONNECTS for small outline packages
Pins 4, 5, and 6 are NO CONNECTS for unibody packages
Figure 1. Fully Integrated Pressure Sensor Schematic
TABLE 1. Maximum Ratings
(1)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
MAX
T
STG
T
A
Value
400
-40° to +125°C
-40° to +125°C
Unit
kPa
°C
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
TABLE 2. Operating Characteristics
(V
S
= 5.0 V
DC
, T
A
= 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in
required to meet electrical specifications.)
Characteristic
Pressure Range
(1)
Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G
Absolute: MPX5100A
Supply Voltage
(2)
Supply Current
Minimum Pressure Offset
(3)
@ V
S
= 5.0 V
Full Scale Output
(4)
@ V
S
= 5.0 V
Full Scale Span
(5)
@ V
S
= 5.0 V
Accuracy
(6)
Sensitivity
Response Time
(7)
Output Source Current at Full Scale Output
Warm-Up Time
(8)
Offset Stability
(9)
1.
2.
3.
4.
5.
(0 to 85°C)
Differential and Absolute (0 to 85°C)
Differential and Absolute (0 to 85°C)
Symbol
P
OP
Min
0
15
4.75
—
0.088
4.587
—
—
—
—
—
—
—
Typ
—
—
5.0
7.0
0.20
4.700
4.500
—
45
1.0
0.1
20
±0.5
Max
100
115
5.25
10
0.313
4.813
—
±2.5
—
—
—
—
—
Unit
kPa
V
S
I
O
V
OFF
V
FSO
V
FSS
—
V/P
t
R
I
O+
—
—
V
DC
mAdc
V
DC
V
DC
V
DC
%V
FSS
mV/kPa
ms
mAdc
ms
%V
FSS
0.1 kPa (kiloPascal) equals 0.145 psi.
Device is ratiometric within this specified excitation range.
Offset (V
OFF
) is defined as the output voltage at the minimum rated pressure.
Full Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum pressure applied over the temperature range of 0° to 85°C, relative to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V
FSS
at 25°C.
MPX5100
2
Sensors
Freescale Semiconductor
FREESCALE [ FREESCALE SEMICONDUCTOR, INC ]
