Pressure
On-chip Temperature Compensation and Calibration
Figure 2
illustrates the absolute sensing chip in the basic
Super Small Outline chip carrier (Case 1317).
Figure 3
shows a typical application circuit (output source
current operation).
Figure 4
shows the sensor output signal relative to
pressure input. Typical minimum and maximum output
curves are shown for operation over 0° to 85°C temperature
range. The output will saturate outside of the rated pressure
range.
Fluorosilicone
Gel Die Coat
P1
A fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the silicon diaphragm. The MPXxx6115A
series pressure sensor operating characteristics, internal
reliability and qualification tests are based on use of dry air as
the pressure media. Media other than dry air may have
adverse effects on sensor performance and long-term
reliability. Contact the factory for information regarding media
compatibility in your application.
Stainless
Steel Cap
Thermoplastic
Case
Die
Wire Bond
Lead
Frame
Absolute Element
Sealed Vacuum Reference
Die Bond
Figure 2. Cross Sectional Diagram SSOP/SOP (not to scale)
+5.0 V
V
S
Pin 2
100 nF
MPXxx6115A
V
out
Pin 4
GND Pin 3
47 pF
51 K
to ADC
Figure 3. Typical Application Circuit
(Output Source Current Operation)
5.0
4.5
4.0
3.5
Output (Volts)
3.0
2.5
2.0
1.5
1.0
0.5
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
110
115
120
Pressure (ref: to sealed vacuum) in kPa
0
MIN
Transfer Function:
V
out
= V
s
* (.009*P-.095) ± Error
V
S
= 5.0 Vdc
TEMP = 0 to 85ºC
MAX
TYP
Figure 4. Output vs. Absolute Pressure
MPXA6115A
Sensors
Freescale Semiconductor
5