MEMS Flow Sensor
D6F-P0010A
Compact, Highly Reliable Flow-Sensor
with Unique Dust Segregation System
• Cyclone flow structure diverts particulate from sensor element
• PCB-mounted & connector models available
• High accuracy, reliable mass flow measurement
• Alternative to differential pressure sensing
• Measure over 200 LPM with a bypass set-up
Ordering Information
Model
D6F-P0010A1
D6F-P0010A2
D6F-CABLE2
Wiring
PCB-mounting model
Connector model
Cable connector assembly
Flow range
1L/min
1L/min
-
Gas
Air
Air
-
Case
PBT
PBT
-
Electrical Performance
Item
Symbol
Vcc
Vout
Power supply voltage
Output voltage
Rating
5 – 10
0.5 – 2.5
Unit
VDC
VDC
Sensor Specifications
Model
Termination
Flow range/ Pressure range
Applicable gas
Accuracy
Temperature characteristic
Operating temperature
Operating humidity
Storage temperature
Storage humidity
Output signal
Withstand pressure
Current consumption
Insulation resistance
D6F-P0010A1
PCB Terminals
+ 1.0 SLM (+ 0.84 in H2O)
Air (contact Omron for other gases)
+/- 5% F.S. (typical test results within +/- 2% F.S.)
+/- 5% F.S.
-10 to 60 deg C (without freezing and condensation)
85%RH max (without freezing and condensation)
-40 to 80 deg C (without freezing and condensation)
85%RH max (without freezing and condensation)
Analog 0.5 to 2.5 VDC, Amplified and Temperature Compensated
50kPa (7psi)
Max 15mA (No load, Vcc=5 VDC, 25 deg C)
20M Ohm min.(DC 500VDC, between lead terminal and case)
MEMS Mass Flow Sensor
D6F-P
1
D6F-P0010A2
Connector JST SM03B-SRSS-TB
OMRON [ OMRON ELECTRONICS LLC ]
