Output Characteristics
Differential
Pressure
Flow Rate
Output
3.0
2.5
Output Voltage (V)
2.0
1.5
1.0
0.5
0.0
(inH2O)
0.00
0.07
0.24
0.51
0.84
(SLM)
0.00
0.25
0.50
0.75
1.00
(V)
0.50
1.60
2.10
2.31
2.50
Mass flow converted into volumetric flow rate
SLM (standard liters per minute) at 0
°C,
1 atm.
Note, 0 to 0.5V output indicates a negative flow
direction.
0.0
0.2
0.4
0.6
0.8
1.0
Differential Pressure (inH2O)
Repeatability, typical test results
1.0
0.8
0.6
Repeatability [%F.S.]
0.4
0.2
0.0
-0.2
-0.4
-0.6
3.0
2.5
OUTPUT [V]
2.0
1.5
1.0
0.5
-
0.00
0.25
0.50
0.75
1.00
FLOW RATE [LPM]
(output results of 34 samples)
-0.8
-1.0
0.0
0.3
0.5
0.8
1.0
Flow Rate [LPM] (5 samples, repeated 10 times each)
Bidirectional Dust Segregation System
The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal
chambers, in which particulate matter follows in the outer path, away from the MEMS sensor chip
regardless of the flow direction. Note, standard products are calibrated for unidirectional flow, as shown
above. Contact Omron for bidirectional calibration options.
sensing element
2
MEMS Mass Flow Sensor
D6F-P
OMRON [ OMRON ELECTRONICS LLC ]
