Production Process
InGaP HBT Foundry Service
Features
Metal 2 - 4um
TQHBT3
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MIM
Metal 0
Isolation Implant
Dielectric
Metal 1 - 2um
Dielectric
E
B
C
Emitter
Metal 1 - 2um
B
C
NiCr
Base
Collector
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Sub Collector
Buffer & Substrate
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TQHBT3 Process Cross-Section
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General Description
TriQuint’s new TQHBT3 process is a highly reliable InGaP
HBT process with three levels of interconnecting metal and
state-of-the-art device performance. Thick metal intercon-
nects and high quality passives promote integration. The thick
metal interconnects, which promote enhanced thermal man-
agement, and high density capacitors keep die sizes small.
MOCVD epitaxial processes are utilized to grow the active
layers. A carbon-doped Base and InGaP Emitter are utilized
for high RF performance consistent with high reliability. De-
signs utilizing the 3-um emitter width have the performance of
previous 2-um emitters, but with the reliability and ruggedness
associated with wider emitters. Precision NiCr resistors and
high value MIM capacitors are included. The three metal layers
are encapsulated in a high performance dielectric that allows
wiring flexibility and plastic packaging simplicity.
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2– and 3-um emitter widths
>22 dB MAG @ 6 GHz; with 3-um
emitters
Amplifier Ruggedness: VSWR 70:1
@ 5 V supply
High Linearity in PA applications
InGaP Emitter Process for High Re-
liability and Thermal Stability
Base Etch Stop for Uniformity
MOCVD Epitaxy
High Density Interconnects;
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2 Global, 1 Local
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Over 6 µm Total Thickness
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Dielectric Encapsulated Metals
Thick Metal Interconnects:
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Enhanced Thermal Management
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Minimum Die Size
Effective Base Ballasting for Maxi-
mum Gain
150 mm Wafers
High-Q Passives
NiCr Thin Film Resistors
High Value Capacitors & Stacked
Capacitors
Backside Vias Optional
Validated Models and Design
Support
Applications
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Power Amplifiers
Driver Amplifiers
Wideband, General Purpose
Amplifiers
TriQuint Semiconductor
2300 NE Brookwood Pkwy
Hillsboro, Oregon 97124
Semiconductors for Communications
www.triquint.com
Page 1 of 6; Rev 1.1 2/8/2005
Phone: 503-615-9000
Fax: 503-615-8905
Email: info@triquint.com
TRIQUINT [ TRIQUINT SEMICONDUCTOR ]
