FBA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS
3
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Part no.
FBAM200DU
FBAM030DU
F B A L001D U
F B A L001D B
Flow range
(full scale)
2 0 0 sccm
3 0 sccm
1 0 0 0 sccm
±1000 sccm
Max. flow change
4
5.0 l/sec
5.0 l/sec
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
5 V @ 2 0 0 sccm
3.4 V @ 25 sccm
5 V @ 1 0 0 0 sccm
5 ±0.15 V
PERFORMANCE CHARACTERISTICS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
FBAM200DU
FBAM030DU
F B A L001D U
F B A L001D B
Repeatability and hysteresis
(combined)
Temperature effects
Offset
-25 to 85 °C
5
FBAM200DU
all others
FBAM030DU
F B A L001D B
all others
Span
-25 to 25 °C
FBAM200DU
FBAM030DU
FBAL001...
25 to 85 °C
FBAM200DU
FBAM030DU
FBAL001...
Response time
6
Common mode pressure
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Shift is relative to 25 °C.
6
Initial warm-up time for signal conditioned circuitry is 1 minute max.
Min.
0.95
0.90
0.90
2.95
Typ.
1.0
1.0
1.0
3.0
Max.
1.05
1.10
1.10
3.05
±0.5
±1.0
Unit
V
% reading
±100
±50
±25
-4.0
±5.0
-5.0
4.0
±5.0
5.0
1.0
3.0
25
ms
p si
% reading
mV
E / 11722 / A
2/5
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