FBA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
FBAM200DU
Press.
(mbar)
0.49
0.42
0.35
0.28
0.21
0.14
0.09
0.04
0.00
Flow
(sccm)
7
200
175
150
125
100
75
50
25
0
Nom.
(V
DC
)
5.00
4.80
4.50
4.17
3.75
3.27
2.67
1.90
1.00
Tol.
(± V
DC
)
0.15
0.16
0.17
0.18
0.19
0.19
0.17
0.13
0.05
Press.
(mbar)
2.50
1.70
0.84
0.42
0.34
0.26
0.17
0.08
0.00
FBAM030DU
Flow
(sccm)
7
30
20
10
5
4
3
2
1
0
Nom.
(V
DC
)
3.75
2.90
1.95
1.50
1.40
1.30
1.20
1.10
1.00
Tol.
(± V
DC
)
0.70
0.45
0.20
0.10
0.08
0.08
0.07
0.06
0.05
Press.
(mbar)
3.40
2.90
2.40
2.00
1.60
1.20
0.80
0.54
0.31
0.12
0.00
FBAL001DU
Flow
(sccm)
7
1000
900
800
700
600
500
400
300
200
100
0
Nom.
(V
DC
)
5.00
4.90
4.80
4.66
4.42
4.18
3.82
3.41
2.96
2.30
1.00
Tol.
(± V
DC
)
0.15
0.16
0.17
0.18
0.19
0.20
0.21
0.19
0.17
0.14
0.10
Press.
(mbar)
3.49
2.42
1.59
0.83
0.31
0.00
-0.31
-1.59
-2.42
-3.44
FBAL001DB
Flow
(sccm)
7
1000
800
650
400
200
0
-200
-600
-800
-1000
Nom.
(V
DC
)
5.00
4.82
4.67
4.42
3.96
3.00
2.03
1.35
1.15
1.00
Tol.
(± V
DC
)
0.15
0.18
0.20
0.20
0.15
0.05
0.18
0.25
0.30
0.35
Note:
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FBAM200DU
FBAM030DU
FBAL001DU
FBAL001DB
E / 11722 / A
3/5
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