FBO Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS
3
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Part no.
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
Flow range
(full scale)
±200 sccm
±30 sccm
±1000 sccm
-600...1000 sccm
Max. flow change
4
5.0 l/sec
5.0 l/sec
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
30 mV @ 100 sccm
11.8 mV @ 25 sccm
50 mV @ 650 sccm
50 mV @ 650 sccm
PERFORMANCE CHARACTERISTICS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
Repeatability and hysteresis
(combined)
Offset
Temperature effects
Span
FBOL001DB
all others
-25 to 85 °C
5
-25 to 25 °C
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
25 to 85 °C
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
Sensor resistance
(Pin 2 - Pin 1, Pin 6 - Pin 1)
Sensor current
(Pin 2 - Pin 1, Pin 6 - Pin 1)
Response time
Common mode pressure
Min.
-1.0
Typ.
0
Max.
1.0
±1.0
±0.35
Unit
mV
% reading
mV
±0.20
2.5
5.0
5.0
5.0
-2.5
-5.0
-5.0
-5.0
5
0.6
1.0
3.0
25
% reading
kOhm
mA
ms
p si
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Shift is relative to 25 °C.
E / 11721 / A
2/6
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