FBO Series
Mass flow sensors for gases
OUTLINE DRAWING
7.60
(0.30)
2.8
(0.11)
2.9
(0.114)
1.40
(0.055)
6.3
(0.25)
1.8
(0.07)
5.1
(0.20)
54.4
(2.14)
8.3
(0.325)
8.4
(0.33)
P1
P2
31.5
(1.24)
23.6
(0.93)
2.8
(0.11)
1.0
(0.04)
5.1
(0.20)
7.4
(0.29)
12.7
(0.50)
15.5
(0.61)
1 2 3 4 5 6
0.6
(0.025)
1.52
(0.06)
2.5
(0.10)
4.1
(0.16)
23.9
(0.94)
30.5
(1.20)
third angle projection
mass:
approx. 10.8 g
dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely
and results in negative output (pin 6 < pin 2).
E / 11721 / A
5/6
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