ASBDAU204智能工控

                                                         基于CC—Link网络的PLC控制系统

0 引 言

   随着计算机信息网络技术的飞速发展，以PLC为核心的工业控制系统也向着大规模、网络化方向发展。各PLC生产企业都开发有自己的网络产品，并不断增强其网络的联接能力。三菱公司的工业控制网络产品很丰富，可以构成各种档次的网络系统，以适用于各种层次的工业自动化网络的不同需求。其最具代表性的三种网络为：信息与管理层的以太网(Ethernet)、管理与控制层的局域令牌网(ELSECNET／H)、CC一Link开放式现场总线设备网。本文仅对CC—Link开放式现场总线设备网进行研究。

1 CC—Link网络的特点及功能

1．1 CC—Link网络的特点

   CC—Link(Control&Commurlication Link，控制与通信链路系统)，是三菱电机新近推出的开放式现场总线，其数据容量大，通信速度多级可选择，而且它是一个复合的、开放的、适应性强的网络系统，能够适应于较高的管理层网络到较低的传感器层网络的不同范围。CC—Link是一个以设备层为主的网络，一般情况下，CC—Link整个一层网络可由1个主站和64个从站组成。网络中的主站由PLC担当，从站可以是远程I／O模块、特殊功能模块、带有CPU和PLC本地站、人机界面、变频器及各种测量仪表、阀门等现场仪表设备。且可实现从CC—Link到AS—I总线的联接。CC—Link具有高速的数据传输速度，最高可达10 Mb／s。CC—Link的底层通信协议遵循RS 485，一般情况下，CC—Link主要采用广播一轮询的方式进行通信，CC—Link也支持主站与本地站、智能设备站之间的瞬间通信。

1．2 CC—Link网络的功能

   CC—Link网络具有完善的RAS(Reliability，A—vailability，Serviceability)功能。即自动返回、切断从站、通过链接继电器／寄存器的错误检测功能。

2 CC—Link总线通信

2．1 CC—Link的通信原理

   CC—Link的通信形式可分为2种方式：循环通讯和瞬时传送。循环通讯意味着不停地进行数据交换。各种类型的数据交换即远程输入RX，远程输出RY和远程寄存器RWr，RWw。一个从站可传递的数据容量依赖于所占据的虚拟站数。占据一个从站意味着适合32位RX和／或RY，并以每4个字进行重定向。如果一个装置占据两个虚拟站，那么它的数据容量就扩大了一倍。除了循环通信，CC—Link还提供主站、本地站及智能装置站之间传递信息的瞬时传送功能。信息从主站传递到从站，信息数据将以150 B为单位分割，并以每批150 B传递。若从从站传递到主站或其他从站，每批信息数据最大为34 B。瞬时传送需要由专用指令FROM／TO来完成，瞬时传送不会影响循环通信的时间。限于篇幅，本文只介绍了主站与远程设备站之间的通信关系，其通信关系如图1所示。主站与远程设备站之间的通信原理如下：

   (1)PLC系统电源接通时，PLC CPU中的网络参数传送到主站，CC—Link系统自动启动；

   (2)远程设备站的远程输入RX自动储存在主站的“远程输入RX”缓冲存储器中；

   (3)储存在“远程输入RX”缓冲存储器中的输入状态储存到用自动刷新参数设置的CPU软元件中；

   (4)用自动刷新参数设置的CPU软元件开／关数据存储在“远程输出RY”缓冲存储器中；

   (5)根据“远程输出RY”缓冲存储器中存储的输出状态，远程输出RY自动设定为开／关(每次链接扫描的时候)；

   (6)用自动刷新参数设置的CPU软元件的传送数据存储在“远程寄存器RWw”缓冲存储器中；

   (7)存储在“远程寄存器RWw”缓冲存储器中的数据自动送到每个远程设备站的远程寄存器RWw中；

   (8)远程设备站的远程寄存器RWr的数据自动存储在主站的“远程寄存器RWr”缓冲存储器中；

   (9)存储在“远程寄存器RWr”缓冲存储器中的远程设备站的远程寄存器RWr数据存储在用自动刷新参数设置的CPU软元件中。

2．2 CC—Link通信的初始化

   CC—Link通信的初始化实际上就是指CC—Link的网络参数设置。网络参数指：站的信息和站号。通信的初始化对于启动数据链接非常重要，CC—Link通信初始化设置方法只要在三菱GPPW编程软件的网络配置菜单中设置相应的网络参数，远程I／O信号就可自动刷新到CPU内存，还能自动设置CC—Link远程元件的初始参数。

3 CC—Link网络控制系统的设计

3．1 网络控制系统的构成

   图2为炉窖网络控制系统原理图。控制系统设计4条生产线，图2只给出炉窖网络控制’系统中的1条生产线，其余3条从站的配置是相同的。为了提高整个控制系统的安全性以及可靠性，系统采用了双机冗余措施。在双主机系统中，二者处于对等地位，并且同时可以监测对方的运行情况以及网络的冲突侦听，并相互间传递心跳信息，一旦发现对方系统出现故障或者连接的网络故障，监测方立即接管测控任务，从而保证了系统在任何时候系统主机的完整性和完好性，只要主机和网络安全，控制系统便会安全，实时性便可得到保证。两台冗余主机的配置均采用Q系列CPU，CC—Link总线模块QJ61BTll，QJ71E71—100以太网模块，主机配置相同以保证二者的相近似，满足系统相似性原理，对控制系统的安全性设计提供了保证。

   从站采用Q02H CPU智能控制单元，主要作用是管理模拟量采集(A／D)模块、模拟量输出(D／A)模块、数字量输入(DI)／数字量输出(DO)的端口I／0操作以及计数定时模块的设定，并且将所采集的数据负责上传到主站，并从主站获得的控制参数下传到模拟量输出、数字量输出模块，控制相应的执行结构。A／D，D／A，DI／DO以及计数定时模块分别用于采集煅烧炉中的温度、给控制三相异步电机旋转的变频器提供O～10V控制信号源、控制电机的起停以及监测控制开关的状态、控制三相异步电机旋转的时间等。模块的选用为：模拟量采集：AJ65BT一64AD；模拟量输出：AJ65BT一64DAV；数字量输入／输出：AJ65BTB2—16DR；热电偶输入：AJ65TB一68TD；高速计数器：AJ65BT—D62。

   为了将系统集成为具有测量、控制、管理功能于一体的测控系统，在车间级的Intranet中集成了生产在线数据库以及控制参数与工艺数据库服务器，生产在线数据库服务器主要用于管理当日当班的人员、计划调度以及生产完成情况，工艺数据库服务器主要用于记录生产工艺参数、重要工段以及重要设备的定时抽检数据、故障几率等，便于了生产管理。整个程序的设计功能见图3。

3．2 网络控制系统的功能

   (1)整个网络监控系统采用CC—Link现场总线，可高速地将现场数据传至主站进行管理。

 (2)上位机(PC)将操作指令通过从站1CPU传送给受令执行单元执行操作，远程执行单元将工作状态通过从站CPU传送给上位机(PC)。上位机(PC)将车间中所有控制的工作状态(开、关、报警)信息显示出来供操作人员监控。上位机(PC)接到报警和停线信息立即打印故障信息并计时、统计停线时间，并通过声卡驱动音箱进行语音提示。

   (3)主站和从站采用三菱Q系列CPU负责CC—Link网络的管理，以及将数据送到上位机(PC)进行分析和将中控室发出的指令送至现场从站。

   (4)为保证系统内大量的数据传输，每一条生产线的参数采集和控制由一台CC—Link从站完成。所有测控参数测量值通过CC—Link与从站通信。

4 结 语

   实践证明，利用CC—Link开发的网络控制系统具有实时性、开放性、保护功能齐全、通信速率快、网络先进、布线方便等优点，有利于分散系统实现集中监控，提高系统自动化水平，减轻工人劳动强度，减少事故率，提高设备的使用寿命，节能降耗，提高效率，降低了成本。

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AMAT 0226-09001 75 FOOT, CABLE EMO TO REMOTE

RECIF IDLW DISPLAY BOARD, LIGHTING MANAGEMENT

PLAST-O-MATIC RVT100V-PF PLAST-O-MATIC 1" RVT ANGLE PATTERN MACHINED PR VALVE

AMAT 0150-77339 C/A MON Keyboard Mouse Signal B

AMAT 0020-42052 Upper, Hinge, WXZ

NOVELLUS 20-123267-00 GATE,L-TYPE VLV,46X236,SMC

AMAT 0020-00239 Valve, Track, Interposer-Gate

RECIF IDLW DISPLAY A-DISPLAY A-30-3-A

AMAT 0020-04348 BRACKET,MOUNTING,SHUTTLE DRIVE ASSY

AMAT 0680-01944 CB SPCL 2P .5A 240VAC C-CURVE DIN MTG

AXCELIS 17099630 GRAPHITE, DUMP L.E. BORON

AXCELIS 17119351 GRAPHITE EXTENSION TUBE VG SHO

SVG 80230B SMIFF INTERFACE BOARD

PERFORMANCE TECHNOLOGIES INC CMP-KIT-SLURRY KIT light tower, CMP SLURRY ALARM

POWER ONE HTAA-16W-A Power Supply, International Series

SVG 80284A ASML PAS 5500 I/O INTERFACE

SAINT GOBAIN 100-00086R BOAT, 125 SLOT 200MM WAFER QTZ

AMAT 3870-01441 Valve Vacuum Bellows AIR-ACT Open SPRG-CLOSE RTANG 1.5OD NW40 SS

DNS 7-39-58078 Valve Teflon Adjustable Flow, Air OPERALET, Main 0-0.3MPa, OPERAT

CKD AMD31-15BUS-10-3F Valve Teflon Adjustable CKD, AMD31-15BUS-10-3F, VALVE, AIR

CKD AMD52-25BUS-22-F Valve Teflon, Air Operation, MAIN 0-0.3MPa, OPERATE: 0.3-0.

ETE AV-05-2PT-/4T Valve Teflon, Air Operation, Pressure: 3.0kg/cm^2 Gop A 3kg--n

TOHO KASEI AV-N20-CIFF-1 Valve Teflon , Air Operation: 0.3MPa, Pressure: Vacuum~

Omron CQM1-PA206 PLC Power Supply, Unit, Source: 100-240VAC, 50/60Hz, 120VA, OUT

AMAT 0200-01611 Injector, Gas 12 Holes, .020 DIA, .65 L

AMAT 0020-06192 FLAG, HOME EXTENSION

AMAT 0150-11305 CABLE ASSY, GASLINE HEATER JACKET PWR, 3

AMAT 0020-08247 CLAMP PLATE,LEAP 2

AEHR - TEST SYSTEMS 128-45465-00 Circuit Breaker, Contact Module (for YAMAICHI

KALREZ K-268 O-Ring 8.50ID X 1/8C/S LOWER WINDO

CKD T012-002493-1 Solenoid Valve A/L SUB-CHUCK, T012-002493-1, 500-900471-00, 1

CAT 551365206 HEAT INTERNAL 5KWW/VESSEL 1.6

ULTRATECH 01-15-04325 CABLE, FIBER OPTIC WAS ASSY 2

AMAT 0150-94889 CFA X6E.J5/X20A

AMAT 0040-45696 EXTENSION VENT LEVEL SENSOR ERT IECP

AMAT 0140-03650 Harness Assembly Gas Panel Pneumatic P4 Connect

SYSTEM PAPST MLR25PR FAN WITH FILTER HOUSING FLF3, 322115

AMAT 0150-01865 Cable Assembly SWLL Motor Encoder

AMAT 0020-95263 ELECTRODE E9 (STD) VA

AMAT 1951422 INTRLK DEVICE CABLE ASSY

AMAT 70506208000 (P)SMIF INDEXER OPER. P

AMAT 0020-48475 TIE BAR, GRIPPER

TCUMSEH AH400JT-168-A4Y TCUMSEH COMPRESSOR

AMAT 0020-06003 Robot, Arm, Right Hand, Shuttle

LAM RESEARCH SR-24-1Y CONTROLLER SHIMADEN SR-24-1Y DRY CONTACT

ASM 2510766-01 ALIGNMENT & ADJUSTMENT ELEV & LOADDOOR T ASM - VERTICAL FURNA

CAT 551302280 17-TRACK SLIDE

AMAT 0010-09183 ASSY HEAT SINK & RESISTOR NETWORK

AMAT 1410-01355 HTR INSOLATION JKT 2.75X1.62X2.75 FOR

AMAT 0050-37905 LINE,DOPANT VENT CAAM. A MF

AMAT 0226-31810 HARNESS, DUAL FREQ BD-TO-I/O DIST BD

AXCELIS 17E2926 INSULATOR

EDWARDS F31300004 CARD CAGE FOR D-1000

POLYGYR SMC 61 ACTUATOR FOR DAMPER SMC-61

DRAGER AG 6809760 SENSOR EX-PR FOR H2 P/N 6809760; 6803331

AMAT 0020-82646 ADAPTOR,SHORT KF40

AMAT 0270-09023 FIXTURE ROBOT ARM ADJUST

CONCOA 0308-3002-CONCOA REGULATOR PRESSURE BRASS W/HEATER 220V

VERIFLO 928A0PSFSFMF H.P. ISOLATION VALVE

STS 00-685508-00 CHAIN DRIVE MOTOR

AMAT 0200-20417 FINGER COIL HOLDING RIGHT A VOR IMP

AMAT 0227-12335 CABLE ASSY, EV MANIFOLD, APC

NILFISK-ADVANCE AMERICA INC 1408258000 CREVICE TOOL

AMAT 1410-01408 HTR JKT 30 MIL B LAYER UPPER

POLY-FLOW 24677 CONTACTOR 3 POLE FIN HEATER 010B0307; SCHNEIDER ELECTRIC TELEMEC

STS 71-249829-00 MICROSWITCH

FUJIKIN FPR-91-12.7 FPR-91-12.7; VALVE, AIR OPERATION

MITSUBISHI NV400-SP 3P 250A GROUND-FAULT CIRCUIT INTERRUPTER 3P

KOBELCO VP3165 SMC VP3165; VALVE, DOUBLE DIRECTION SOLENOID

SMC SR4111-03-X220 REGULATOR

SANTA CLARA PLASTICS 300D0056 CABLE TRIAXIAL RF

TRILLIUM 865-5367-14-01 TRILLIUM PCB TCAL3

MDA SCIENTIFIC 872049-1 MODULE, POINT SYSTEM 16

ORIENTAL MOTOR UPH566G-A-A25 5-Phase Vexta Stepping Motor

PRECISE SENSORS,INC 70443-3 SENSOR KIT

Crestron TPS-4L 3.6" Wall Mount Touch Screen

WHITEY SS-45F8-33C-1466 VALVE BALL SS WHITEY SERIES45 PNU NC 1/2

KLA-TENCOR CORP 500-902148-00 KLA-TENCOR CORP PAD PROBE POLISH

AMAT 0020-82809 PRE-MRS SLIT

VARIAN 18000305 VARIAN ROPLAT SEAL

AMAT 0020-22499 SHIELD, COLLIMATOR LOWER 8"

AMAT 0020-22499 SHIELD, COLLIMATOR LOWER 8" - CLEANED

AMAT 0020-04360 Lever, Indexer

AMAT 0050-51296 WELDMENT, VENT

AMAT 0050-08474 HOSE ASSY, OUTPUT, RF GENERATOR

CONVUM MPS-R3S5-GHA-D VACUUM FOR SPIN SD, SENSOR

TEGAL 39-453-002 TEGAL LOWER LH DOOR T915

AMAT 0050-54468 WLDMNT, DRAIN, CENTER, RINSE CELL, IECP

AMAT 0140-09594 HARNESS MAGNET POWER CORD 5000 MK II-XT

AMAT 50311687000 Cable Assembly CID Serial

AMAT 0200-35581 TUBING,ALUMINA,CERAMIC HEATER,GIGA-FILL

AMAT 0040-97251 X-RAY SHIELD,MAGNET

AMAT 0020-04367 Support, Blade, 100MM

AMAT 0200-20366 LABYRINTH FEEDTHRU COIL SUPPORT ELECTRA,

AMAT 9140-00391 CABLE, W/SCAN RACK TO GRPR SOL

LAM 810-017007-001 LAM CONVECTRON TUBE INTERFACE BOARD

INTERNATIONAL TEST SOLUTIONS PP-2060-7003SCMP WAPP+Plate ProbePolish70 4.25"x4.1

AMAT 0900-01080 Filter Bandpass VSBL 441.5NM-CTR 2NM-HW 12.5MM DIA

AMAT 0140-02899 Harness Assembly., Stepper Motor Power Distributor

FAIRCHILD TT6000-006 TRANSDUCER

AMAT 0660-01505 CARD APC ANALOG MOTHERBOARD 208

AMAT 0150-97220 Cable Assembly, X34A.B6/3X6A. TB B1

AMAT 0150-97221 Cable Assembly, X34A.B6/3X6A. TB B1

AMAT 0020-97810 Pillar Support

MKS INSTRUMENTS 24-0311-SP-01 WATER PRESSURE SENSOR PR3 LIQ 100/XF

AMAT 0150-97222 C/A X34A.C6/3X6A.TB A1

AMAT 0020-10976 Clamp Mount Chamber

Tokyo Electron (TEL) MB3M87-025855-12 Heater Assembly, TICL4 EVAC Line 2-3

TEL MB3M87-025854-12 ASSY, HTR TICL4 EVAC LINE 2-2

TEGAL 39-453-001 TEGAL ARM LOWER RH DOOR

CAT 523080010 WAFER Holder SES-SEZ01 ADHK685E1

PROMINENT 81.99.33 PROMINENT HEAD PTFE FOR PROMINENT PUMP MODEL E-080

PALL AMLOC-II BOARD CIRCUIT AC/DC MN AMLOC 110V YED 14

ANORAD / ROCKWELL I-SERV-BR1-220 CONTROLLR, ANORAD SERVO

SHIMADEN SR24-1P-4090 Controller, Process Control Instrument, SVG

AMAT 0226-31526 CABLE, ASSY FINAL VALVE INTLK

AMAT 0020-15903 BRACKET, BLOCK VALVE, GPLIS ASSY, PRODUC

AMAT 0140-05398 HARNESS ASSY, RACK 2(B) HEATER DRIVER CO

NOVELLUS 02-130206-00 ASSY,L-TYPE INSERT,46x236

IBM 8596 CONTROLLER, WIP STATION, AUTO

JUSUNG 901-31-51 MONITOR, CONTROL RACK

BROOKS BM01842/J Pacific Scientific H2HNRFS-LNN-NS-02 MOTOR PRECISION ASY BM0184

MDC AV-053-P-SPECIAL VALVE

RECIF IDLW DISPLAY ASSY,ROLLER,W/ROT,MTR

AMAT 0020-07927 Bellows Shield, Upper, ECP ANNEAL

AMAT 0021-11807 Clamp, Quick Release, EP Window

AMAT 0021-35946 Edge Ring, TXZ, 200MM, SNNF

AMAT 0020-80589 LOCATION BLOCK ***

AMAT 0150-91173 Fiber Optic, T7, 7640mm, 10A.B.TX/14E.B.TX

AMAT 0150-91178 FO, T8, 7640mm, 10A.B.RX/14E.B.RX

AMAT 0150-91183 FO,T7, 7600mm, 10A.E.TX/14E.E.TX

SIGNETICS PLS157N IC PAL PLS157N(PRODUCED BY SILICONIX COM?**54 PER PACK**

AMAT 0150-20586 CABLE ASSY PUMP INTFC CH CPC

AMAT 0620-02447 CABLE AC HEATER 75FT FILAMENT 208V

AMAT 70511401000 ADAPTOR CABLE FOR MONITO

AMAT 0020-75905 Hoop Pins, Advanced 101 Lift

APTech 839-609078 REGULATOR, REPLACEABLE

SuperMicro 1U Server; CPU: ONE Intel Xeon SL8TK (2.80GHz/533MHz/512MB); Memory:

AMAT 0020-98985 FINGER GRIPPER 125 CONDUCTIVE

AMAT 0040-03149 Brace

AMAT 0040-85256 ADAPTER, PLACE, SRC BSHNG

AMAT 0242-11542 KIT, STANDARD PM REPLACEMENT

AMBER INDUSTRIES, INC. 1352-1 SUPPRESSOR, TRANSIENT

DNS 2-VC-32860 PCB, INDEXER SLIDE TABLE I/O

VAT 200604 HOUSING, DOOR MONOVAT SEAT C-TYPE

GEMU 2030898 DIAPHRAGM

SEZ AG 2326274-00 HEXEINSATZ FUER JULOEINHEIT

SEIKO 240V-700W Cartridge HEATER SS, High TEMP wiring, 240V 700W, 7.25? X .5?

VAT 242083 GATE, VALVE NICKEL ULTIC SEAL

AMAT 2900-10767 BIAS PLUG

AMAT 3700-02514 O-Ring ID 2.234 CSD .139 Chemraz SS513 80 DURO WHT

ESTEK 398-18886-1S PCB, VACUUM CHUCK CONTROL

SIMRIZ AS568-263 O-RING, SIMRIZ, AS568-383 CMP 486

ITT 43303 KIT DIA/BKG CSH WR 01.00 TM/17 EVG

DRAEGER 4520311 KIT, P2.4 INCH DUCT MOUNT

WIKA 50144961 Pressure Gauge, HP SS, 40, Range: -30/15 PSI/BAR, 1/4IN FVCR Quote

GEMU 610 10D75245A11/NMHPW VALVE

LAM 713-013486-005 PN,DRIP,NZL

LAM 839-170110-001 WLDMT,PRI ISO,HE

LAM 853-017411-002 Cable, Control Gap

LAM 853-017930-003 ASSY, HARNESS, SOLENOID #1

CPI AD076-12/150F SWITCH, THERMAL

SIMRIZ AS568-263 O-RING, SIMRIZ, AS568-263 CMP SC111L; Z1015-263

CELERITY CMLHL31160123 CELERITY GROUP INC, CMLHL-31-160S123, SENSOR, PRESSURE, O

Entegris DHT-00-04-000 DISPENSE HEAD BROWN- SLURRY

ENTEGRIS DIT-71-99-000 Dip Tube Keyed Black - Slurry DEL

VARIAN E17075130 REV 5 SHIELD, BOTTOM POLE BLANKOFF

VARIAN L9545-301 PCB, I/O REMOTE (979 & 947)

MANUFACTURING INTEGRATION TECHNOLOGY LED-GPOA70-228TR LIGHTING, RED COAXIAL

DISCO M22NRFA-LNF-NS-00 POWERMAX II 1.8 STEP MOTOR, M22 W/8X12" LEADS

GOODYEAR S8M2800 Super Torque Belt; 350 teeth, 8mm pitch, 5.3 thickness

ATMI SD4BAAB-030920 DISPENSE DIP TUBE

Tokyo Electron (TEL) TS3286-000045-14 Theta Motor Assembly, 0.75A, 0,36 DEG/STEP

MILLIPORE YY5500003 O-RING, SILICONE

LAM 853-025245-002 ASSY, TEMP PROBE

Teradyne 969580 COPLEY CONTROLS CORP 230-13A LINEAR POWER AMPLIFIER

HPS Piping Vibration Isolation,SS KF-50 with KF-40 Adapt, Pack of 2

ROTEC RTC-20 RTC-20

EATON 1517380 EATON DISK FARADAY FILTER PCB

ASM 390-40510-00 PCB, PIC CARD ASSY

ICS 41159-01 INDUSTRIAL COMPUTER SOURCE DIO8-P CARD

DURALITE FA-1829 BLAZER 6000 LCD CONTROL PANEL

A&N AV300-LF80/LF100-E-M VALVE, 3" 90DEG MAN NW80/100 FLNGS

ETE AV-08-2PT-3-8T Valve Teflon, Air Operation, Pressure: 3.0kg/cm^2 Gop A 3kg--

VARIAN E17014700 SOURCE, GAS FEEDTHRU

FUSION 322391 2X SIGNAL TOWER CONTROL CARD

ICOS MVS605 LIGHT INTERFACE

AP TECH AP3625S-2PW-MV4-MV4 PRESSURE VALVE,SERIAL NO.0054175,MAX PRESSURE 3000 P

AMAT 0020-16136 STUD, CRYO/GATE VALVE W/HEX SOCKET

TEL CT-2985-400056-1A HP EXT COVER ASSY CT-2985-400056-1A

AMAT 1951334 OP.CONSOLE EMO CABLE

CAT 320001927 FITTING SS. FLEX CPLG. ISO160 L=7 THICK; VC-IS-160-FB-7

AMAT 0020-92777 CAP MAGNET

AMAT 0020-30585 INSERT NI POLY/WSI 200MM

AMAT 1360-01202 XFMR 208/240/277/380/480VAC PRI 24VAC S

DNS 2-39-61597 SCREW, BALL FOR EDGE BEAD EXP

ADVANCE AUTOMATION SERIES B&J CYLINDER, AIR

AMAT 0150-36786 CABLE ASSY HEATER VAPOR MIXER PARALLEL G

AMAT 30761002100 VeraSEM-3D Site Prepr.

LAM 853-005949-002 ASSY, PLL END POINT DETECTOR

AMAT 0050-06920 WELDMENT,SPOOL,TANTALUM

AMAT 21016404100 CABLE COAX RG188A/U

AMAT 70209630000 CYAN FILTER ASSY.

AMAT 0150-91879 C.F.A. 4F.P4/3D.P7

AMAT 02-81882-00 Umbilical Digital Cable

AB 1746-IN16 SLC500 INPUT MODULE, 24VAC/DC

AMAT 0224-00452 CABLE ASSY,PUMP UMBILICAL

YEK 11262XX03 YEK VALVE OUTLET

YORK 25L00042 YORK OIL HEATER 67-95 8 240V 600W 108-126 CHILLER

SOKUDO UN828 KNI PUMP, FAST LOOP UN828KNI-230/

AMAT 1140-01349 POWER SUPPLY

AMAT 0020-37739 Panel, Flow SW, Right, RTP

AMAT 50411374100 CABLE SGS-CDM DET CON.

COSEL 037575-007 MODULE POWER SUPPLY 12V, 037575-007

AMAT 0020-82392 SPUR GEAR,PNEUMATIC

AMAT 0020-94897 INTERMEDIATE & SUPPORT TUBE

AMAT 70309320000 HEATER FOR ION PUMP ASSY

AMAT 1400-50013 (AMJ) SNSR AMPL OPTICAL 12-24VDC

AMAT 0021-04679 PLATE, LOCK, HEATER LIFTER

FLOTECT SS60 SWITCH FLOW ASSEMBLY M14061-009

AMAT 0150-92298 Connectors 25 Pin Free Plug

AIRPAX A82840-M1 AIRPAX A82840-M1 8848; 24V 7.0W ROT, RPM: 0-8 1/3 PPS 0-200

AVIZA 189630 125MM OUTER DARK SHIELD

AMAT 0680-90089 QUICKLAG P 3-POLE; 240V 10A

SCP 3270151D CONTROLLER, ANALOG MOD(4-20MA

CAT 019588-01 ASSY KIT ELEVATOR PULLEY SET

HEATER ASSY..WALL RL PC PC2 1D86-003805-12 HEATER ASSY..WALL RL PC PC2, 4FT

ST 49-01-23-00 PCB EPC HEAT P/N 49.01.23.00

ROSEMOUNT ANALYTICAL EX89C2009X EEXIA II CT5, EEXIA II CT6; U MAX IN= 60V, I MAX

TRITEC INDUSTRIES 096-01295 PCB CONTROL PANEL ADS 200

Asyst 1003644-01 MONITOR CABLE

Tokyo Electron (TEL) 2910-490692-12 Chuck Shaft

AMAT 1410-01033 HTR IMRS 240VAC 3PH DELTA 4KW 11" 1/2MNP

AMAT 3400-01503 HOSE ASSY FLEX TFE/SST 5/16IDX136L 3/8T

AMAT 0680-01157 CB MAG 3P 480VAC 35A 50/60HZ MTR DLY 1/4-20 SCR

ASML 690-12 FILTER FIBER BUNDLE-ILLUM P.E PN 690-12

SEMIFAB 725020-00 CYLINDER PNEUMATIC PVDF

AMAT 0035-00004 BRACKET MOTOR Z-AXIS MACHINE

AMAT 0050-80413 FlareLINK UES12-LQ Fitting Tubing 3/4" LQ, Sweep Elbow, PFA Fema

AMAT 3870-02835 Swagelok B-18RM8-F8 VALVE MNL NEEDLE 1/2NPT-M/F BRS

AMAT 0020-95283 LUG, E7 ELECTRODE

AMAT 0050-02938 GAS LINE ADAPTER ELBOW

AMAT 0050-36583 LINE, OUTSIDE DEP. INJECT CAP 1/4T

AMAT 0021-13695 PLATE HARD STOP 200MM CWXZ

AMAT 4020-90125 WTR FILTER NW32L 1/8NPT PORTS

AMAT 0040-39945 Bracket, Gags Spring, Pull 300mm Producer

AMAT 0150-38422 ASSY CABLE PHOTO I/O INTERCONNECT

AMAT 70519030000 SCAN FILTER ASSY

AMAT 1951424 LASER CNTRLwINTRLK CABLE

NSMH 329073 Retainer Nut Valve

AMAT 0140-01634 HARNESS ASSY,ANAFAZE CONTROL BOX, TEMP C

AMAT 0020-35272 PROTECTIVE BRKT, CB 208V

AMAT 0020-95553 LINK OPERATING

AMAT 0021-35727 BRCKT, 3-POS, FUJIKIN, ETCH

AMAT 0040-34827 CGA 320 PIGTAIL

AMAT 0040-70379 BRACKET, ICE I/L, IMP RF MATCH

AMAT 0040-70524 WELDMENT, HOSE H2

AMAT 0040-80784 Baking Plate, Chill Plate Feed Thru, 300

AMAT 0140-01094 HARNESS ASSY, SEB REMOTES BREAKOUT

AMAT 0140-12893 HARN ASSY, DRIVER ENCL TO GND BUSS

AMAT 0150-02576 CABLE ASSY, LASER COVER 1, IN

AMAT 0150-02578 CABLE ASSY, LASER COVER 3, INTERLOCK

AMAT 0150-22707 CABLE ASSY JUMPER CONN MAIN AC SMK DET

AMAT 0150-70009 CABLE HEAT EXCHANGER

AMAT 0150-76059 CABLE ASSY, ENDURA STATUS LAMP F/P/UL

AMAT 0150-91485 7ft C/A 1CP2/3AP10

AMAT 0620-01916 CABLE,POWER CORD

AMAT 0680-01450 Square D QOB210-5253 CB MAG THERM 2P 240VAC 10A AUX SW BOLT ON

AMAT 0720-03418 CONNector RCPT PC MTG DB 62 POS MEDIUM PROILE THD INS

AMAT 1200-00295 Relay Contactor 3P 50A 24VDC Coil with DIODE 1NO AUX CONT

AMAT 1200-50048 (AMJ) RLY CNTOR MAG 3P 220VAC

AMAT 1410-01364 Heater Jacket 30 MIL B Layer Lower/BYPAS, 12V, 6W

AMAT 1410-01429 Heater Jacket 30 MIL B Layer Upper Zone 2 CHAM, 7V, 5W