TSX CAY 41原装进口

多电机伺服控制广泛应用于各种电力传动自动控制系统中，如配料、传动等生产过程。伺服系统中电机控制性能和多电机间协调控制的好坏直接影响生产过程的质量，如何高效管理、方便应用、实时控制是多电机伺服系统生产领域亟待解决的首要问题。因此，本文提出一种基于CAN总线技术的多轴运动控制数字交流伺服系统。

  现场总线技术解决了传统总线插板I/O模块多，干扰严重、系统软件编写复杂、系统硬件兼容性差等问题。大大减轻了现场信号连接的繁琐与费用，提高了信号传输的精度与灵活性，给安装、调试和维护带来诸多方便，为现场用户带来巨大的经济效益，代表着自动化领域发展的一个重要方向.

CAN总线技术

  随着工业现场控制和自动化技术的不断进步，传统的通信模式已不能满足现代工程需要。CAN（Controller Area Network）总线是80年代初德国Bosch公司为解决现代汽车中众多控制与测试仪器间数据交换而开发的一种串行数据通信协议，是一种性能先进、价格低廉、保密性好的现场总线（Field Bus）技术，能够有效支持分布式控制或实时控制串行通信网络[2>。CAN总线中各节点都有权利向其它节点发送信息。通信介质可以是双绞线、同轴电缆或光纤，主要技术特点有:

1,是一种多主总线

  网络上任一个节点均可在任意时刻主动向网络上其它节点发送信息，多主站依据优先机制进行总线访问;

2,非破坏性基于优先权总线仲裁技术

  采用非破坏性基于优先权总线仲裁技术结构，大大节省总线冲突仲裁时间，在重负荷下表现出良好性能;

3,具有多种传送数据功能

  具有点对点，一点对多点（成组）及全局广播传送数据功能;

4,节点数目多

  直接通讯距离最远可达10km（传输速率为5kbps），最高通讯速率可达1Mbps（传输距离为40m）;

5,可靠性高

  数据链路层采用短帧结构，实时性高，纠错效果好，每帧信息都有CRC校验及其它校验措施，数据出错率低，可靠性高;

6,故障自动判别

  发送期间若丢失仲裁或因出错而遭破坏的帧可自动重发，暂时错误和永久性故障节点判别及故障节点自动脱离CAN总线。

  CAN总线系统由CAN网络节点、转发器节点和上位机构成。总线技术遵循现场总线协议，将分布在不同位置，用途各异的测量仪表、控制设备互联成网，并可接入Intranet和Internet网络。现场总线技术的关键标志是它能支持双向多变量、总线式全数字通讯。传统4～20mA模拟直流回路只能在一根两芯电缆中单向传输一个参数，随着系统结构的日益复杂和信息量的增加，4～20mA电流环传输成为制约信息传输的瓶颈，所以现场总线替代4～20mA模拟信号标准已成为控制系统发展的必然趋势。

  基于CAN总线技术的多机伺服系统

  CAN总线控制网络结构

  基于CAN总线技术的多电机伺服控制系统网络结构如图1所示，系统由上位机、CAN总线、现场伺服单元节点组成。数控系统上位机通过CAN总线控制网络节点任一伺服单元，数字伺服与数控系统之间数据传输可分为实时性数据信息和非实时性数据信息两类。实时性数据指参与控制器实时位置、速度、转矩等控制指令和反馈信息，传输速度要求较高。非实时性数据主要是指控制器参数设置、功能设定、诊断功能、伺服状态与报警等信息，传输速度相对较低。

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【主营产品】

1：Invensys Foxboro（福克斯波罗）：I/A Series系统，FBM（现场输入/输出模块）顺序控制、梯形逻辑控制、事故追忆处理、数模转换、输入/输出信号处理、数据通信及处理等。

2：Invensys Triconex: 冗余容错控制系统、基于三重模件冗余（TMR）结构的最现代化的容错控制器。

3：Westinghouse（西屋）： OVATION系统、WDPF系统、WEStation系统备件。

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5：Schneider Modicon（施耐德莫迪康）：Quantum 140系列处理器、控制卡、电源模块等。

6：ABB：工业机器人备件DSQC系列、Bailey INFI 90等。

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8：Motorola（摩托罗拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。

9：XYCOM：I/O 、VME板和处理器等。

10：GE FANUC(GE发那科)：模块、卡件、驱动器等各类备件。

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13：Woodward（伍德沃德）：SPC阀位控制器、PEAK150数字控制器。

14:工业机器人系统备件。

AVIZA TECHNOLOGY 159369 SHIELD PLATEN 125MM AL

AMAT 1952002 NRT1 to NT2 INTRF CABLE

AMAT 30607540100 M.U. RIGHT SIDE

AMAT 3870-03767 VALVE, MECH TWIST, 2 POSITION

LSP QUARTZ 7322-143-0007-1 CERAMIC FOCUS RING A360 HIGH

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KOGANEI AFDPG-12 GRIPPER (FLAT TYPE AIR HAND)

AMAT 0020-02079 V-BLOCK, 125 MM

SEMEL LTD SY-2006 SOV Pneumatic Valve ESO VMB, 70-125 PSI Air Maximum, Valve Pre

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AMAT CLAMP, SHIELD COLLIMATOR UPPER 8"

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AXCELIS 17119340 GRA. LINER, BEAM GUIDE P

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SEMIGAS 032-0411 VALVE ESO 91S 250PSI MAX CL2 SERVICE

THK 077102 BEARING-GUIDE LINEAR 15 X 262 MM; AXELIS 077102

CAT BEARING FOR 36040-FL688

SCHUMACHER 1495-0034D T2 MASTER PROC.ASSY. Cosmetic damage

GEORG FISCHER 167-315-435 MANUAL VALVE 1/2

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Varian 17053370 Valve Shutoff with VCR (IMP4), Modified Nupro 6LV-DLBW4

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INTEGRA 213-103 INTEGRA VALVE REPAIR KIT

SULZER WEISE 230.01 FOX Impeller MB-180/6 82409003 SP0 1.4408, DIN 144

TRIKON 230192 Valve, 6 inch Seal Kit

AXCELIS 250451 COVER RIGHT REAR CABINET

AXCELIS 551431047 COVER LEFT REAR CABINET

GASTECH 7s09072 7s09072 GasTech Pump Assembly, HCL, FOR SVG

LEITZ 301-305-210-000 PCB ADDA CARD LEICA ERGOLUX

CUMMINS 3017564 CUMMINS GASKET SET

NITRIDE ETCH 311-012-4BE NITRIDE ETCH LID BASE CONNECT KIT QZ-104

DRAGER 3300518 ACKNOWLEDGMENT MODULE

AMP 350851-1 1-REEL (Approximately 7000 PINS) 0.250" Centerline 600V 19-36A Univ

HEPA FILTER 37788 HEPA FILTER SIZE 1200X1200 H14 FOR MOUNTING

TEL 3887-214163-11 VALVE AIR ASSY CABLE VLV STAT IV7 DS887-214163-11

FUTURESTAR 4000-001 OPTICAL FLOAT POSITION SENSOR (SENTINEL)

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PARKER 54013696-299999 VERIFLO IR4001SK4PBX4B REGULATOR

Entegris DIT-29-09-000 LONG INSERT DIP TUBE - HYDROGEN PEROXIDE

PERKIN-ELMER 681-0098-005 PERKIN-ELMER REGULATOR REPAIR KIT

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ALFA LAVAL A-080M8200 K100200 ACTUATOR ECX D/A FOR VALVE 3 EPDM SAUND

KEYENCE AP-33A Digital Pressurre Sensor

AP TECH AP5158S-4-CI-H-1 REGULATORS WITH DUAL GAUGES

CAT AR20-N02H-Z REGULATOR SST 1-4

TSE BBT-A60 PCB BBT PLUNGER BOARD

OMRON C200H-IA-122 Controller, Sysmac Programmable, Input Unit: 100-120VAC 10mA

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NUPRO SS-BNVCR4-PX-20 High-Purity Bellows-Sealed Valve; SS-BNVCR4-PX-2O

ASAHI TYPE 57 BUTTERFLY VALVE WAFER PVDF

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SVG 80266B-02-01 STATION CPU

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ELECTROGLAS P133 MOTOR ASSY THETA AIR DRIVE

CAT P196B32P00F0021 PCB CARD SLIT TEST CO2 LEICA ERGOLUX

TOSHIBA VT3D-2039 DRIVER BOARD

D&H MANUFACTURING 02-034112-00 2-LAYER COOLSTATION, DLCM ASSY

MKS INSTRUMENTS 162-0090P VALVE, NW80 2STAGE 1/16 POLY

Electroglas 250262-001 PCB, Theta Z Joystick Function II

MATTSON 7100-5168-08 PCA, RMS ANALOG 4108

TESCOM 74-3862VRS10-074 REGULATOR

VARIAN SEMICONDUCTOR 951-5090 VALVE, PNEU 90DEG-REPAIRED

PARKER DHT508M10808-10 VALVE SS BW DUPLEX HORIZONTAL 1 MAIN X

VARIAN SEMICONDUCTOR E H2376001 PCB, SERVO CONTROL

AMAT 0020-44140 BRACKET, PRESSURE SWITCH I/F

AMAT 0020-20177 Stud Leveling Ball End Producer SE

AMAT 0226-43899 HRNSS ASSY, INT CONN SEIKO SEIKI, STP-30

AMAT 70311188000 CAB W.H.U CONTROLLER

AMAT 0020-98923 BLK,WATER CONN OVEN FLANGE

AMAT 0050-09210 Assembly WLDMNT Auto Pill

AMAT 0200-35789 PIN, LIFT, HEATER, CVD 300MM

DNS 2-VC-39825 PCB, BAKE UNIT I/O DISTRIBUTI

AMAT 0040-42182 COVER, LOWER WTR BOX, ANNL CHMBR 300MM

AMAT 0150-90493 CFA 24C.J2/24C.PCB-HV1

ENTEGRIS VAPORSORB VSIITHC FILTER, DUV3 (460X360X155) W/O GASKETS

AMAT 0020-06997 PEDESTAL, 125MM OXIDE

AMAT 0150-20459 CABLE ASSY,H/E W/H20 FLOW SEW

USHIO 6001-1302 FINGER, ROBOT

TEL 036-005920-1 VG2 1000Torr,high tempBDSIN03

TEL 039-001614-1 POWER SUPPLY DC..P15E-24-N

TEL 051-001261-1 PNL Meter CB100-ZK1039-KPA Output: Relay, Supply: 24VAC/DC,50/

AXCELIS 1517190 PCB ASSY DOSE FARADAY INTERCONNECT BO

NOVELLUS 17-127279-00 SHIELD,BOT TOPHAT GRIT,PVD300

NOVELLUS 17-127463-00 Shield, Pedestal, Blasted, PVD300

AXCELIS 17111890 XXFEM inner beam dump graph

AXCELIS 17324630 XXELECT INSU. MAINIPULATOR

AXCELIS 1907670 CA ASSY SLIDE SEAL MA

KDT 2008040 MOTION_CONTROLLER 4

AXCELIS 258201 gymbal-cassette handler

SCP 3270371A-00 Controller, MCS-E, A-D MOD EMC Enhanced

ERIKS/WEST 337591 KIT, 10" VAT VALVE REBUILD DPS 2

AXCELIS 392151 MANIFOLD, K50, FUSION# 392151; FLANGE-LOWER 2XMCU

AXCELIS 425401 PLATE TOOL ASSY-ALIGN-XFER CALIBRATI

SCP GLOBAL 5691294A-00 METER.ASSY; FLOW; COLD DI; 9400ULS, V1-M4-A050F15-B1-X1

Kokusai 5UOT197148 Maintenance Panel

AMAT 70401605200 (C6)STEP TARGET

LAM 795-009202-002 440NM ENDPOINT FITER

TEL BB87-004961-13 ULPA-Filter

TEL BB87-007220-13 Loader Arm pick

TEL BX80-070500-11 RPL Chemical Filter Kit Parts , Size: 33X500X500

EBARA C-5010-004-0001 VME board

Varian E17220380 PLATE,BASE,IHC ARC CHAMBER

Varian E17220520 PLATE,SIDE,GAS,IHC SOURCE

Varian E17231450 LINER, SECONDARY END; LINER, SECONDARY

AXCELIS H1407109 300mm Edge Ring;300mm Edge Ring;RING

Climax MVET001 Micro Vision Tool kit for MV 1000-E

Mitsui Y75-9266-000 DIAPHRAGM, PUMP

VARIAN E11709024 ASSY, SENSOR FLOW

AMAT 0020-44727 STOP - EXTRN SLIDE

AMAT 0200-02711 VIEWPORT, LOWER LCF

AMAT 0140-02566 H/A SMIF TPCC Adapted wide Body LLB INT

TEL 2110-452698-11 Tombo Brand Products T-0107041Heater Insulator

KLA-TENCOR CORP 156868 ENCODER CARRIAGE

AMAT 0020-98743 ORIENTATION ROD, QUADRUPOLE

CROWN ERSB-3099-WQ Regulator 316 High Purity SS--not in original packaging

AMAT 0140-00134 Harness Assembly Heater AC Power Anneal Control

DAIKIN 2-39-79522 DNS 2-39-79522; FLOAT, HUMIDIFIER 200W

AMAT 0150-92671 CFA X3A.P6/X1D.P2

Applied Materials 0020-77426 Wafer Base Center

AMAT 1951429 DEVICE INTERLOCK CABLE

AMAT 0020-00342 Semiconductor Part, Bar Wafer Support

AMAT 0020-35084 SCREEN, ROUGHING LINE TRANSFER CHAMBER

AMAT 4060-00231 MANF 4 STATION W/PASS THRU, 3/4" PAR-FLARE INLET, 5X1/2" PAR-FLA

AMAT 0020-15906 PLATE, MANUAL VALVE, GPLIS ASSY, PRODUCE

PALL PHF11GT44LD FILTER LOCK

PCI TECHNOLOGIES BP-9640-GL ASSORTED TUNABLE BAND PASS FILTER

FLUKE FLUKE45 DUAL DISPLAY MULTIMETER, SERIAL NUMBER 4735001

Phillips PM2525 FLUKE AND PHILLIPS THE T&M ALLIANCE, 115V, 60Hz, 12VA.

Tektronix TSG131A MULTIFORMAT SIGNAL GENERATOR

TEKRONIX 2445 150MHZ OSCILLOSCOPE

Tektronix TSG-130 MULTIFORMAT SIGNAL GENERATOR

MICRON OPTICS, INC. FFP-C FIBER FABRY-PEROT CONTROLLER, SERIAL NO. 0702

Omega DP501 DIGITAL STRAIN GAUGE INDICATOR, SERIAL NO. 09103370

NEWPORT ESA-CXA U DRIVE CONTROLLER

Agilent HP Keysight LDC-3724 LOGIC ANALYSIS SYSTEM

Porter NVL-004FV Mass Flow Controller; Model: NVL-004FV, Range: 0.2ML/MIN TEOS

EMA IO 80-12 SENSOR,X-LIMITED,FSM8800

Agilent E7805-66543 PCA, SIC CABLE JUNCTION

ASML SERV.436.20262 RETICLE TOO HIGH SENSOR ARMS

Electroglas 244288-001 PCB, A4 TESTER INTERFACE. PCM

Gasonics 90-2588 Dual Setpoint SCR Controller

TERADYNE 281-500103-4 PROBE STATION I/F BOARD; DEVICE HAS A BROKEN Capacitor

AMAT 0190-15672 Hose Assembly, Source Sup/Ret 48" Med T"

Parker DC3-3 Parker DC3-3, DC-3 Compumotor Power Supply

Varian 4492305 Varian 4492305, Cable Fiber Optic 0.1

Varian 4492301 Cable Fiber Optic 0.1

TEL CT2980-092561-11 Filter, Unit 2-T-110-STB31

HIB 0000-500-0010 LEOPARD HIB BOARD ASSY., MISSING FUSE

SCP GLOBAL TECHNOLOGIES 00049072-00 2411931.LID ASSEMBLY.PVDF.DECKEL KO MP..NO D

AMAT 0010-15437 WINDOW ASSY - RH-LARGE-LK

AMAT 0020-13047 Wafer calibration AL 200mm

AMAT 0020-31461 COVER, PEDESTAL, 200MM POLY, 218MM SHUNT

AMAT 0020-33038 BEARING RETAINER VACUUM HOUSING

AMAT 0020-34360 Pin

AMAT 0020-40376 Arm Rod Shaft, Butterfly, 200MM Throttle Valve

AMAT 0020-40942 SLEEVE, N2 PURGE

AMAT 0020-47424 BAR, HORIZ., CD RCW, REGEN RES., 300MM C

AMAT 0020-52620 CLEVIS Piston Y Axis VAC AST

AMAT 0020-61556 HOUSING, FARADAY

AMAT 0020-62155 Bracket, Counterwieght Support Sealed Gearbox

APPLIED MATERIALS 0020-63926 MANIFOLD,RPS II LEFT/RIGHT Producer

AMAT 0020-75164 MEMBRANE TITAN OXIDE SILICON

AMAT 0020-85320 GUIDE TUBE LHS-QX PLUS INTEL

AMAT 0021-08144 PLUG, SST HTR 300MM TXZ

AMAT 0021-21406 BLOCK, OVERTEMP SENSOR MOUNT, GAS LINE C

AMAT 0021-25679 RETAINER BRG INNER, UPPER HEAD ASSY LOW

AMAT 0021-25720 Mounting Brackat, FI 5.4 FLAT PNL MONITO

AMAT 0021-36686 Lid, View TICL4

AMAT 0021-78941 Bracket Clamp

AMAT 0040-00343 Bracket Assembly, Shuttle MTG

AMAT 0040-09210 Plunger, Soft Tip Hinge Head Lock, 300 M

AMAT 0040-37739-2 Shaft, Assembly, Wing, Lower 300

AMAT 0040-55477 Crescent Drive, VDPM, 300MM Desica, CMP

AMAT 0040-79468 PIPE ASSY ARGON QUANTUM

AMAT 0040-85414 Manifold, Main Fold

AMAT 0040-85417 Manifold, Pump Feed

AMAT 0040-90574 TUBE COAX GROUNDIN

AMAT 0040-92245 Piston Clevis Assembly

AMAT 0040-92959 LEAD COVER, SOURCE

AMAT 0040-94635 VENTPIPE BLN EBARA

AMAT 0040-99798 Shield Support LH Side

AMAT 0050-04725 TUNGSTEN GAS LINE 2 CHAMBER D CVD, WELDMENT

AMAT 0050-05006 WELDMENT, MANIFOLD, BYPASS - VAP

AMAT 0050-09022 EXTENSION,SHORT ARM,VAC LINE

AMAT 0050-09398 WELDMENT,PURGE, CHAMBER B

AMAT 0050-09399 WELDMENT LINE2 CHAMBER B

AMAT 0050-09400 WELDMENT,LINE 1,CHAMBER B

AMAT 0050-40631 WELDMENT, FORELINE

AMAT 0050-40632 WELDMENT, FORLINE

AMAT 0050-41064 Gas Line SLD LIQ SOURCE TEOS GPLIS III P

AMAT 0050-61597 TUBE, PUMP OUTLET TO 3-WAY VALVE & PV19, 200MM MEG LDM

AMAT 0050-63197 Adapter

AMAT 0050-76483 WELDMENT MANIFOLD,WXZ

AMAT 0090-09045 Probe Pressure switch assy

UNKNOWN 01-4096 RF STRAP OF IRIDIA

AMAT 0100-09131 PCB, Assembly DWG Fluid Overfill Board

AMAT 0100-09134 PCB ASSY DIDO FUSE

AMAT 0100-90095 HEATSINK PWS ARC, PWBA

AMAT 0110-09108 PCB

TEL 012-006939-1 CKD LYX-0761 VALVE RESIN

FALA 013107 Plate Teflon

ALCATEL 013918 LOWER DIFFUSER

AMAT 0140-04482 HARNESS ASSY, (W83), TB 4&5/CH INTFC WET

AMAT 0140-09305 Harness Assembly, Ampule, Thermo-Electric

AMAT 0140-09483 Harness Assembly, Ampule Heater Power

AMAT 0140-12597 HARNESS ASSY DIW HTR TC INPUTS 300MM OAS

AMAT 0140-35681 HARNESS ASSY,AC TB/FUSES,DPS CENTURA

AMAT 0150-02577 Cable Assembly, Laser Cover 2, Interlock

AMAT 0150-02782 Cable Assembly, Gas Panel EV Control 1, CVD

AMAT 0150-03304 CABLE ASSY, AUXILLARY GROUND STRAP, EMAX

AMAT 0150-11161 CABLE ASSY POSITIONS SIG U

AMAT 0150-12411 CABLE ASSY USER CONFIG ANALOG I/O CMP PO

AMAT 0150-21371 CABLE ASSY TRANS CH DRIVER VHP

AMAT 0150-35733 Cable Assembly, Emo Interconnect, 75 Ft.

AMAT 0150-75131 CABLE ASSY,H2 SENSOR TO CUSTOMER TB9

TEL 018-002462-1 THK, 7D17-1, BALL, SPLINE 16UUCLF+216.6LF

AMAT 0190-10205 Specification Link Interlock Card, CH 3

AMAT 0190-10916 ECP CHEMICALS PURCHASING SPECIFICATIONS

AMAT 0190-15672 Hose Assembly, Source Sup/Ret 48" Med T

AMAT 0190-16149 MP ULTRA ROBOT LOW TEMP PAD SET

AMAT 0190-18329 Hose Assembly 30M,PARKER HOSE 5732-6 SMC/AMAT1, Supply/Return; S

AMAT 0190-19744 Diaphragm Seal, X-Chamber

AMAT 0190-77037 PVC Drain Kit

AMAT 0200-01097 INSULATOR, CERAMIC, LIFT PIN, ESC ASSY,

AMAT 0200-02929 Insert Ring, Columnar SI, #1, Step .06, 3

AMAT 0200-09936 RING, OUTER

EDWARDS 0222-8563-0 Stem 6-30

AMAT 0225-01833 Plate

GORE-TEX 02331467 1/4 X 45 feet long, Joint Sealant Teflon

TOKYO ELECTRON (TEL) 024-009282-1 Wafergard SF MINI 1/4" VCR; NIHON ENTEGRIS

AMAT 0270-20330 Calibration Tool, Robot to Heater TXZ

KOGANEI 030E1-PSL-3L VALVE, 6 position SOLENOID 8 CONNECT; 7MPa

NOVELLUS 0350-107100 CRT BACKLIGHTING

TEL 036-004034-1 NOHKEN, KRA-12-HH, SWITCH, LEVEL, POWER DC12V

NOVELLUS 04-708724-01 WINDOW,WFR HNDLR, CHM

Novellus 04-720954-05 Seal Kit M2I

AMAT 0620-00809 DRY NOVA XE CABLE ASSY 6.5M

AMAT 0620-02088 CA PX75D.O-P/PX75E.(-HV)

YORK 064227B-000 End cap

AMAT 0660-01173 CARD APC DIGITAL I/O 090 2IN X 2OUT; APC SPX-D-090-1

AMAT 0660-01176 CARD APC DIGITAL I/O 096 2IN X 2OUT; APC SPX-D-096-1

AMAT 0660-01387 CARDAPC DIGITAL I/O 0422OUT

AMAT 0680-01500 CUTLER-HAMMER AUXILIARY SWITCH FOR C-H SERIES C TYPE K-BREAKER;

AMAT 0680-01736 Circuit Protection Control THERM 1P 50VDC 1A PNL MTG Rocket SCR

Novellus 0710-106048 Chasis Slide Right Heat Exchanger, 2 feet long 3 1/2 inch w

MAGNET 0783-0025-0001 CABLE, BEAM DUMP

AMAT 0900-00079 3-Phase Filter, 3 X 480, 275V, 50/60Hz

CKD 0GD10V-X0026 VALVE 90 deg manual 316 SS

NOVELLUS 10-125068-00 TUBE ASSY,DBL-CONT,GSBX,FEMALE

NOVELLUS 10-155416-00 TUBE ASSY,V46A&V48A,STA 3-4-5

GM 1019033-01 Cap, Insulation Ring; GM 673-1019033, GMA260-0009

RIGAKU 10333-000 TUBE DOWN STREAM;X-RAY;4KW 70 UM, 950D0004

TEL 1110-307842-16 OUTER ALignment Wafer

TEL 1110-312776-11 STOPPER 2 T3 0 A5052

AMAT 1140-00098 PWRSP 24VDC 0.64A 15W

SANKO 11P00141 SHIELD, SOURCE TUB

ONTRAK 12-8885-470 66-2502-2F Gauge; TECO DES-598B MOD, 0-60 PSI, 0-30 in Hg

Ontrack-LAM 12-8892-014 opto-inter, 30" pre-prod. assembly

AMAT 13-8800-035 MOUNT, CNVYR, BLKHD, ASY, LEFT SIDE TRANSFER

LAM Research 13-8800-449 SHIELD SPRAY DRIVE ROLLER

BROOKS AUTOMATION 1305 EZ129 FLOWMETER 7GPM Solvent SS ? FVCR,

RITE TRACK 13408-03 WAFER CHUCK

Leybold 13750 Exhaust Silencer EX Kit

TEL 1380-100380-11 SENSOR TEMPERATURE VF TYPE

TEL 1386-444163-14 W/F STAGE SEN.EDGE L SOURCE, 7ft

JAPAN AIR FILTER 13CW79J 610x610x150 HEPA FILTER; 27m^3/min, 0.3um

ONTRAK-LAM 14-8886-013 ASSY.,CBL,CHEM,FLOW MONITOR; TECO DES-595A

AMAT 140-14621 HARNESS ASSY,FILTER BOX POWER INTERLOCK 0140-14621

AMAT 1400-00334 LIGHTPEN, S/ST 2.5M

WATLOW 14018094 HEATER PAD 14 IN X 18 IN W/TC S(SK1418T-21992)WATLOW-ST.LOUIS

AMAT 1410-00792 HEATER JACKET, ZONE 5, USG, CHAMBER A/B/

EDWARDS 1417 SS HOUSING with FILTER,1400/1405,4.5

Novellus 15-01137-00 BLANK-OFF, VERITY EP

NOK A2023-001014-1 TEL A2023-001014-1; BELT, TIMING 150 L 0552A L

AMAT 16F7026 POWER SUPPLY, AC TO DC, 120VAC

SEN CORPORATION 16S1240 CABLE, SHOWER FILAMENT FEED CABLE High Voltage

SEN CORPORATION 17119440 LINER, BELLOWS VG 2.34 LG

eaton 17129700 Strike Plate #1 for the GSD200 ION IMPLANTER

eaton 17129710 Strike Plate #2 for the GSD200 ION IMPLANTER

EATON 17129720 Strike Plate #2 for the GSD200 ION IMPLANTER

eaton 17129730 Strike Plate #3 for the GSD200 ION Implanter

SCHUMACHER 1730-7201 PCB, POWER SUPPLY

IMATION 17A7351 8" LINER, CASSETTE

SEN 17B8192 DUMPING, BEAM GUIDE APERTURE

SEN CORPORATION 17B8384 SHIELD, SOURCE PLATE

SEN 17B8695 LINER, BEAM GUIDE 1

SEN CORPORATION 17C7701 LINER, OUTER STRIKER PLATE -C

SEN 17D1328 COVER

SEN CORPORATION 17D8481 CHAMBER, ARC HOUSING

AXCELIS 17D9308 Insulator

SEN CORPORATION 17E7165 APERTURE, RESOLVING (2)

SEN 17E9073 SHIELD, PLATE

SEN CORPORATION 17F4192 PLATE, SEALED

SEN CORPORATION 17G0854 SPACER

SEN CORPORATION 17K0538 APERTURE, (1)

AMAT 1951941 SPC MOTOR TOSMI CABLE ASSY

HONEYWELL 1SY5-D5.4S HONEYWELL OVERTEMP DETECTION, SHORT TC

DNS 2-39-07667 ACCUMULATOR 316 SS

DNS 2-39-33150 FUJIKIN FUFT-915-6.35-0.5; FILTER, T TYPE 0.5 MICRON

SEBACS CO LTD 2-39-35874 VALVE 316 SS OPERATED AIR O.P. 3.5-7 KGF/CM2G(0.34-0.69

DNS 2-39-38907 ORIENTAL D2168-102; HEAD GEAR

DNS 2-39-43433 GUIDE LINEAR

Sebacs 2-AJ-801472 Disk Baffle

LEYBOLD 200-76-480 Exhaust Heater Assembly 1000W

LEYBOLD 200-76-481 Exhaust Heater Assembly 300W; E20076481

FLUROWARE CORPORATION 202-2 VALVE PFA

TEL 2105-120548-51 Quartz, Fin Pedestal tube connector

Tokyo Electron (TEL) 2105-120642-51 Quartz, Purge Gas Exhaust

CREST TECHNOLOGY 221104-001 PHOTO MULTIPLIER TUBE

AKRION 226-194-1AX CABLE ASSEMBLY P10 20' 1067013-19

AMAT 262475-0010 Mount

TDK 2643-01 Power Supply, AC Input: 120V~0.65A, DC Output: 24V-1.1A

TEL 286-005870-1 AC THERMISTER HC-11

FSI INTERNATIONAL 290025-400 PCB HEATER CONTROL

FSI INTERNATIONAL 290030-200 PCB COMPOMENT SIDE

TEL 2980-190087-11 NP8014R003-0 SENSOR ASSY, THETA

TEL 2986-402779-16 NOHKEN, KRA-12-L, CAPACITANCE SENSOR #003, DC12V

HITACHI 2A4-2204-000 SEAL, DOOR, SRD8201

HITACHI HIGH TECH 2G4-0608-000 ACTUATOR UNIT, RETAINER,

ORIENTAL MOTOR 2RK6GK-A2 REVERSIBLE MOTOR; 6W 100V 50/60HZ, 0.25A, 3.5UF, 1200/1

FSI 300533-001 CARD,E/PVALVE,12VDC

AMAT 30607520100 M.U. LEFT SIDE

LAM 31-0013-001 Solenoid Valve Assembly

SEMITOOL 311R0002-503 MANIFOLD, 3/8 VALVE, 3 STG 3/8 FLARETEK

SCP GLOBAL 3270141A CONTROLLER.MCS CONTROL UNIT FOR CHEM. FILL

NOVELLUS 34-10013-00 SWITCH, PRESS/VAC 1/4 VCR

NAIGAI TECH KAISHA LTD 346TYPE-20BS-PVDF VALVE Ball, HAND, TYPE 346 20BS, PVDF

UNKNOWN 347-107-4AX PolyPro Cylinder lift LID (REAR MTG)

GENERIC Fuse Kit Novellus, Buss Fuses; 10: KTK-R-7, 16:GMA-5A, 20: AGC-25, 10:

AMAT 3700-03309 KALREZ AS-568A K#239 Compound: 6375; 3-5/8 x 3-7/8 x 1/8 (INCHES

NOVELLUS 372-15317-1 TEMPSONIC APP 1000

NOVELLUS 372-45524-1 COVER CARRIER MOUNTING PLATE

NOVELLUS 372-55506-1 WATER TRACK ALIGNMENT TOOL TOMBSTONE

AMAT 3800-01264 Regulator Pressure Teflon : 0-60PSI 1/2"FLARE PVDF Housing

AMAT 3870-00057 Valve, PNEU Diaphragm, 2-Way, 125PSIG

AMAT 3870-01185 VALVE BLWS 1/4IN VCR SST SHUT-OFF SERVICE

AMAT 3870-01496 316L SS High-Purity Bellows-Sealed Valve, 1/2 in. Male VCR Metal

AMAT 3870-01829 Pneumatic Diaphragm Valve; 140PSIG 1/4BTWLD NC 1/8FIT VAR5RA

AMAT 3870-01989 Valve, Manual Diaphragm, 1/4 BUTT WELD

AMAT 3870-03944 Solenoid Valve BACKFLOW Assembly

AMAT 3870-04554 AMAT GATE COMPL. 35X336MM CHEMRAZ; AMAT 3870-04554 / VAT 229419

TEL 3M10-309231-11 DISC INSULATOR LWR

TEL 3M12-013696-11 Assembly, Bonnet Bellows

TEL 3M87-019357-13 INLET, GAS TOP HTR MK2

TEL 3M87-024120-11 HEATER, SERVICE BLOCK

TEL 3M87-026493-13 HTR ASSY TICL4 EVAC LINE 3-2

KOKUSAI 3ROT007627 AIR VALVE BASE UOM

KOKUSAI 3ROT116360 FLOWMETER; KOFLOC PN 071002-058

FUJIKIN fbsdal-6.35ugf-2b3 Air Valve Base UOM