Easy Measurement using Optical Fiber
FUNCTIONS OF HARDWARE
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Measurement Parameter Setting
•
Measurement interval
•
Exposure time: 20 to 32767 ms
•
Data accumulation: 1 to 32767 spectra
•
Sensor sensitivity: 3 settings (1x, 2x, 5x)
•
Wavelength smoothing: on/off
•
Width for wavelength smoothing: any integer value within 1 to 50 nm
•
Time smoothing (rolling average): on/off
•
Filter for time smoothing: any value within 0 to 100 %
•
Trigger : measurement start trigger
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Measurement Script
Scripts contain measurement conditions as well as formula and
judgments applied to the data. Results of script processing can be
output via the software and via the analog BNC terminal in real-
time. Each etch process will be treated by a tailored script.
The maximum number of scripts the MPM can store internally is
100, and one of them is selected as the active one. Each script can
contain the definition of up to 32 formulas. All script processing is
perfomed inside the MPM and in real-time.
SPECIFICATIONS
Bundle diameter inner: 1 mm; outer: 7 mm
Fiber aperture (N.A.) 0.2
Bundle length 3 m
200 to 950 nm (Measuring range)
Wavelength range
235 to 950 nm (Sensitivity-corrected range)
< 2 nm
Wavelength resolution
A/D resolution
16 bit
Analog signal output result 2 outputs
BNC; 0 to 10 V
of formula calculation
Script output result of
5 outputs (3 outputs for External Trigger)
judgment calculation
BNC; TTL; High impedance
BNC; TTL; High impedance
Busy output
BNC; TTL; High impedance; pulse width: min. 40 ms
Start input
IEEE 802.3 (10BaseT); 10 Mbit/s
Ethernet
Interfaces
RJ45 modular connector
RS-232
Serial
Interface protocol
TCP/IP (for Ethernet only)
Line voltage
AC 100 / 117 / 220 / 240 V
±
10%; 50 / 60 Hz
90 VA
Power consumption
Fiber input optics
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Script Formula
Script fomula can be defined to perform math operations between
spectral intensities. Besides the four basic algebraic functions, it is
also possible to compute smoothing, differentials as well as the
special spectral patterns applied for endpoint and fault detection
(see section on U8851 in this brochure).
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Judgments
Judgments are used to detect endpoint or fault conditions. They
are defined by thresholds applied to formula, and they can be
chained and combined by logical operators.
DIMENSIONAL OUTLINE (Unit: mm)
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Main Unit (weight: approx.7kg)
C7460
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Fiber Input Optics (weight: approx.100g)
3000
40
50
1
2
3
4
5
POWER
RS-232C
1
2
98.5±1
200±1
262±1
6±1
3±0.5
25±1
325±1
383±1
0.95
7
Input side
To main unit
4
HAMAMATSU [ HAMAMATSU CORPORATION ]
